We demonstrate the fabrication of thin films of ionic liquid (IL), 1-butyl-3-methyl-imidazolium tetrafluoborate, by nano-inkjet printing method using an atomic force microscope (AFM) cantilever. The IL filled in a pyramidal hollow of the AFM cantilever tip was extracted from an aperture at the bottom of the hollow and deposited onto a Pt substrate when the bias voltage was applied between the cantilever and the substrate. We succeeded in fabricating IL thin films with a thickness of 4 nm. The areas and thicknesses of IL thin films were controlled by the fabrication conditions in this method, which is also useful for the investigations of nanometer-scale properties of ionic liquid. (C) 2010 Elsevier B.V. All rights reserved.