2019年1月
A Highly Sensitive Planer Silicon-Hair Device Reproducing the Function of Human Hair Follicle
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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- 巻
- 2019-January
- 号
- 開始ページ
- 198
- 終了ページ
- 201
- DOI
- 10.1109/MEMSYS.2019.8870727
© 2019 IEEE. This is the first report of a novel silicon-hair device with the function of highly sensitive hair follicle to realize peculiar sense in hairy skin of human. The target sensitivities of our device are 10\mu \mathrm{N} in force and 10nN·m in moment, since they are considered as the sensitivities of human hair follicle. A fine silicon-hair with 10\mu \mathrm{m}-width and 5mm-length is monolithically integrated, and 2-axis forces and 1-axis moment applied to the silicon-hair are detected independently by tri-axis sensing structure. The fabricated device was evaluated, and the minimum detectable input was 5\mu \mathrm{N} in axial force, 1\mu \mathrm{N} in shear force, and 3nN·m in moment. These sensitivities are advantageous to human's hair follicle, and it is very promising to apply the device to novel measurement applications. As the first application, surface tension of liquid was precisely acquired. Absolute value of surface tensions were successfully measured at small absolute error using the highly sensitive silicon-hair device.
- リンク情報
- ID情報
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- DOI : 10.1109/MEMSYS.2019.8870727
- ISSN : 1084-6999
- SCOPUS ID : 85071902277