論文

2021年1月25日

An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
  • Hayahide Oka
  • ,
  • Kyohei Terao
  • ,
  • Fusao Shimokawa
  • ,
  • Hidekuni Takao

2021-January
開始ページ
139
終了ページ
142
記述言語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1109/MEMS51782.2021.9375281

This is the first report of an antenna-shaped MEMS tactile sensor that integrates a detector for correcting the device's measuring posture in a single chip. Many objects are difficult to measure using conventional tactile sensors. For example, it has been difficult to measure objects with curved surfaces or holes because of the size and measurement method of the sensors. Our solution to these problems was inspired by the antenna characteristics of insects and enables us to measure complex and intricate areas in a small and narrow space. The antenna-shaped angle detection integrated in the tip of the device detects the relative state of the target and simultaneously acquires fine irregularities in micro areas for the first time.

リンク情報
DOI
https://doi.org/10.1109/MEMS51782.2021.9375281
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85103472337&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85103472337&origin=inward
ID情報
  • DOI : 10.1109/MEMS51782.2021.9375281
  • ISSN : 1084-6999
  • ISBN : 9781665419123
  • SCOPUS ID : 85103472337

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