2021年1月25日
An Antenna-Shaped MEMS Tactile Sensor with Angle Detection Capability
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
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- 巻
- 2021-January
- 号
- 開始ページ
- 139
- 終了ページ
- 142
- 記述言語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1109/MEMS51782.2021.9375281
This is the first report of an antenna-shaped MEMS tactile sensor that integrates a detector for correcting the device's measuring posture in a single chip. Many objects are difficult to measure using conventional tactile sensors. For example, it has been difficult to measure objects with curved surfaces or holes because of the size and measurement method of the sensors. Our solution to these problems was inspired by the antenna characteristics of insects and enables us to measure complex and intricate areas in a small and narrow space. The antenna-shaped angle detection integrated in the tip of the device detects the relative state of the target and simultaneously acquires fine irregularities in micro areas for the first time.
- リンク情報
- ID情報
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- DOI : 10.1109/MEMS51782.2021.9375281
- ISSN : 1084-6999
- ISBN : 9781665419123
- SCOPUS ID : 85103472337