2015年
Two-dimensional thickness measurement using acousto-optically tuned external-cavity laser diode
OPTICAL SYSTEMS DESIGN 2015: OPTICAL FABRICATION, TESTING, AND METROLOGY V
- ,
- ,
- 巻
- 9628
- 号
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1117/12.2193027
- 出版者・発行元
- SPIE-INT SOC OPTICAL ENGINEERING
We propose a swept source optical coherence tomography that uses an original external-cavity laser diode and demonstrate measurements of thickness distribution in two dimensions using this equipment. We first conducted high-speed, wide-range wavelength scanning with an external-cavity laser diode that was equipped with a special antireflection-coated laser diode working at 770 nm. Using an acousto-optic deflector enabled a tuning range and rate of 22 nm and 20 kHz, respectively, with no mechanical elements. Next, we applied this source to an optical coherence tomography and measured the two-dimensional distribution of thickness of a thin glass plate.
- リンク情報
- ID情報
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- DOI : 10.1117/12.2193027
- ISSN : 0277-786X
- Web of Science ID : WOS:000366832100037