2011年
Beam scanning laser interferometer with high spatial resolution over a large field of view
2011 INTERNATIONAL CONFERENCE ON OPTICAL INSTRUMENTS AND TECHNOLOGY: OPTOELECTRONIC MEASUREMENT TECHNOLOGY AND SYSTEMS
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- 巻
- 8201
- 号
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- DOI
- 10.1117/12.910102
- 出版者・発行元
- SPIE-INT SOC OPTICAL ENGINEERING
It is difficult in interferometric metrology to maintain high spatial resolution over a large field of view. In this paper this characteristic is achieved by scanning two focused laser beams over an object surface and a reference mirror surface, respectively, with a rotating mirror, a lens, and a polarization beam splitter. An electric-optic phase modulator generates the phase difference of a sinusoidal waveform of 10 MHz between the two focused beams. Sinusoidal phase-modulating interferometry is used to calculate the phase of the interference signal caused by the two focused beams. The scanning speed of the beams is 20 m/s, and the sampling interval of the interference signal is 1/80 microseconds. The spatial resolution is 2.0 microns over the measurement region of 18.8mm. The measurement results show that the measurement error is less than 5nm.
- リンク情報
- ID情報
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- DOI : 10.1117/12.910102
- ISSN : 0277-786X
- Web of Science ID : WOS:000298794700015