論文

2018年9月1日

Highly efficient double-taper-type coupler between III-V/silicon-on-insulator hybrid device and silicon waveguide

Japanese Journal of Applied Physics
  • Junichi Suzuki
  • ,
  • Fumihito Tachibana
  • ,
  • Kumi Nagasaka
  • ,
  • Moataz
  • ,
  • S.A.M. Eissa
  • ,
  • Liu Bai
  • ,
  • Takuya Mitarai
  • ,
  • Tomohiro Amemiya
  • ,
  • Tomohiro Amemiya
  • ,
  • Nobuhiko Nishiyama
  • ,
  • Nobuhiko Nishiyama
  • ,
  • Shigehisa Arai
  • ,
  • Shigehisa Arai

57
DOI
10.7567/JJAP.57.094101

© 2018 The Japan Society of Applied Physics. An optical mode converter between hybrid device and Si waveguide is the key component for efficient and stable operation of III-V/silicon-on-insulator (SOI) hybrid photonic integrated circuits (PICs). In this study, we introduced a double taper structure into such a mode converter and investigated the coupling efficiency dependence on their structural parameters. By using N2 plasma activated bonding technology, III-V/SOI double-taper-type mode couplers with various taper-tip-widths and taper lengths were fabricated, and their coupling efficiencies were evaluated. As the result, a coupling efficiency of as high as %0.2 dB was achieved for a double-taper device with a tip width of 0.4 µm and total length of 85 µm.

リンク情報
DOI
https://doi.org/10.7567/JJAP.57.094101
Scopus
https://www.scopus.com/record/display.uri?eid=2-s2.0-85053424786&origin=inward
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85053424786&origin=inward