Formation of two- and three-dimensional micro architectures with chemical functions was verified by photo-vapor phase assisted surface polymerization (VASP) of functional monomer vapors combined with an auto-drawing system manipulated by prescribed programs. The surface modification by the photo-VASP of styrene vapor progressed rapidly, and a fine lines-pattern of photo-mask was transcribed as the corresponding polymer accumulations on poly(methyl methacrylate) (PMMA) substrate surfaces. Substrate surface modified by photo-VASP of acrylic acid showed reversible changes in hydrophilic/hydrophobic properties according to repeating external chemical stimuli. The successive auto-drawing by photo-VASP of three kinds of monomer vapors was examined under spot illumination from a fine optical fiber on an X-Y stage manipulated by a prescribed program, resulting in the production of a pre-designed functional structure by successful accumulations of corresponding polymers on the substrate surface.