2005年
The micro Fabry-Perot interferometer for the spectral endoscope
MEMS 2005 MIAMI: TECHNICAL DIGEST
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- 開始ページ
- 830
- 終了ページ
- 833
- 記述言語
- 英語
- 掲載種別
- 研究論文(国際会議プロシーディングス)
- 出版者・発行元
- IEEE
This paper reports on a micro Fabry-Perot interferometer (MFPI) for the spectral endoscope which can acquire spectral images of a target at each pixel. The MFPI with the Si/Si3N4/Si multi-layer mirrors and the MFPI prototype were designed and fabricated. This MFPI can be used in the wavelength ranging from 400 nm to 1000 nm. The RGB image of the butterfly was taken by the spectral endoscope, which consists of the MFPI prototype, a CCD, and lenses. The image according to the peak wavelength was also acquired. Thus, we demonstrate the efficiency of the MFPI for the spectral endoscope.
- リンク情報
- ID情報
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- ISSN : 1084-6999
- Web of Science ID : WOS:000228430000206