SHIMOKAWA Fusao

J-GLOBAL         Last updated: Jun 17, 2018 at 18:58
 
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Name
SHIMOKAWA Fusao
Affiliation
Kagawa University
Section
Faculty of Engineering and Design

Misc

 
下川房男
Jpn. J. Appl. Phys.   49(11) 116001   Nov 2010   [Refereed]
A Post-CMOS Formation Process of High-Adhesiveness SU-8 Structures for Reliable Fabrication of Integrated MEMS sensors
前田勇作, 寺尾京平, 鈴木孝明, 下川房男, 高尾英邦(Yusaku Maeda, Kyohei Terao, Takaaki Suzuki, Fusao Shimokawa, Hidekuni Takao)
Japanese Jouranal of Applied Physics   52(6) pp. 06GL18-06GL18-5   2013   [Refereed]
山崎 秀貴, 寺尾京平, 鈴木孝明, 下川房男, 高尾英邦(H. Yamasaki, K. Terao, T. Suzuki, F. Shimokawa, H. Takao)
The 26th International Conference on Micro Electro Mechanical Systems (IEEE MEMS2013)   205-208   Jan 2013   [Refereed]
A Post-CMOS Process of High Adhesion SU-8 Structure to Apply to Sensor Device
前田祐作, 寺尾京平, 鈴木孝明, 下川房男, 高尾英邦(Y. Maeda, K. Terao, T. Suzuki, F. Shimokawa, H. Takao)
25th International Microprocesses and Nanotechnology Conference (MNC2012)      Oct 2012   [Refereed]
前田祐作, 寺尾京平, 鈴木孝明, 下川房男, 高尾英邦(Y. Maeda, K. Terao, T. Suzuki, F. Shimokawa, H. Takao)
IEEE Sensors2012 Conference      Oct 2012   [Refereed]