MISC

2011年

Characteristics of Hydrogen Negative Ion Source with FET based RF System

SECOND INTERNATIONAL SYMPOSIUM ON NEGATIVE IONS, BEAMS AND SOURCES
  • A. Ando
  • ,
  • T. Matsuno
  • ,
  • T. Funaoi
  • ,
  • N. Tanaka
  • ,
  • K. Tsumori
  • ,
  • Y. Takeiri

1390
開始ページ
322
終了ページ
328
記述言語
英語
掲載種別
DOI
10.1063/1.3637402
出版者・発行元
AMER INST PHYSICS

Characteristics of radio frequency (RF) plasma production were investigated using a FET inverter power supply as a RF generator. High density hydrogen plasma was obtained using an external coil wound a cylindrical ceramic tube (driver region) with RF frequency of lower than 0.5MHz. When an axial magnetic field around 10mT was applied to the driver region, an electron density increased drastically and attained to over 10(19)m(-3) in the driver region. Effect of the axial magnetic field in driver and expansion region was examined. Lower gas pressure operation below 0.5Pa was possible with higher RF frequency. H- density in the expansion region was measured by using laser photo-detachment system. It decreased as the axial magnetic field applied, which was caused by the increase of energetic electron from the driver.

リンク情報
DOI
https://doi.org/10.1063/1.3637402
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000302950100033&DestApp=WOS_CPL
ID情報
  • DOI : 10.1063/1.3637402
  • ISSN : 0094-243X
  • Web of Science ID : WOS:000302950100033

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