論文

査読有り
2014年9月

High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator

MEASUREMENT SCIENCE AND TECHNOLOGY
  • Youichi Bitou
  • ,
  • Yohan Kondo

25
9
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1088/0957-0233/25/9/095202
出版者・発行元
IOP PUBLISHING LTD

The lateral resolution of the angle-based deflectometric surface profiler using a commercially available autocollimator has been improved by introducing a novel null instrument. The proposed null instrument is simple, inexpensive, and has a short response time. High-accuracy flatness measurements of low-reflective surfaces have been successfully demonstrated using a laser beam with a spot size of 1 mm. The repeatability of the surface profile measurement is better than +/- 0.6 nm.

リンク情報
DOI
https://doi.org/10.1088/0957-0233/25/9/095202
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000342357200028&DestApp=WOS_CPL
URL
http://orcid.org/0000-0002-7905-1817
ID情報
  • DOI : 10.1088/0957-0233/25/9/095202
  • ISSN : 0957-0233
  • eISSN : 1361-6501
  • ORCIDのPut Code : 45569145
  • Web of Science ID : WOS:000342357200028

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