2014年9月
High-lateral-resolution scanning deflectometric profiler using a commercially available autocollimator
MEASUREMENT SCIENCE AND TECHNOLOGY
- ,
- 巻
- 25
- 号
- 9
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1088/0957-0233/25/9/095202
- 出版者・発行元
- IOP PUBLISHING LTD
The lateral resolution of the angle-based deflectometric surface profiler using a commercially available autocollimator has been improved by introducing a novel null instrument. The proposed null instrument is simple, inexpensive, and has a short response time. High-accuracy flatness measurements of low-reflective surfaces have been successfully demonstrated using a laser beam with a spot size of 1 mm. The repeatability of the surface profile measurement is better than +/- 0.6 nm.
- リンク情報
- ID情報
-
- DOI : 10.1088/0957-0233/25/9/095202
- ISSN : 0957-0233
- eISSN : 1361-6501
- ORCIDのPut Code : 45569145
- Web of Science ID : WOS:000342357200028