論文

査読有り 責任著者
2018年

Femtosecond laser direct writing of Cu-based fine patterns using Cu2O nanospheres

Proceedings of SPIE - The International Society for Optical Engineering
  • Yukinari Kondo
  • ,
  • Mizue Mizoshiri
  • ,
  • Junpei Sakurai
  • ,
  • Seiichi Hata

10520
開始ページ
#1052006
終了ページ
#1052006
記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
DOI
10.1117/12.2287686
出版者・発行元
SPIE

Cu-based fine patterns were directly fabricated using femtosecond laser reduction of Cu2O nanospheres (NSs) via nonlinear optical absorption. Cu2O NS solution films, containing Cu2O NSs, polyvinylpyrrolidone (PVP), and 2-propanol, were prepared by spin-coating of the Cu2O NS solution on glass substrates or Cu-coated glass substrates. Finer line patterns were formed by scanning the focused femtosecond laser pulses. The absorption of the Cu2O NS solution film at wavelength of the femtosecond laser pulses, 780 nm, was low, whereas the intense absorption at wavelength of 390 nm was observed. Finer patterns were obtained on the Cu-coated glass substrates than on the glass substrates. The minimum line width of 0.6 μm was obtained on the Cu-sputtered film, which was smaller than the focal spot diameter of 1.3 μm. The heat accumulation is lower on the Cu-sputtered films due to their high thermal conductivity, resulting that the line width with the sub diffraction limit was achieved. The electrical conductivity of the patterns on the glass substrates was evaluated to be 4.1×106 S/m at scanning speed of 200 μm/s and pulse energy of 0.312 nJ, which is close to that of bulk copper.

リンク情報
DOI
https://doi.org/10.1117/12.2287686
ID情報
  • DOI : 10.1117/12.2287686
  • ISSN : 1996-756X
  • ISSN : 0277-786X
  • SCOPUS ID : 85048590355

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