SHIMIZU Yuki

J-GLOBAL         Last updated: Nov 6, 2018 at 15:30
 
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Name
SHIMIZU Yuki
E-mail
yuki.shimizunano.mech.tohoku.ac.jp
URL
http://db.tohoku.ac.jp/whois/e_detail/47260949b9f99b4268993ac21e05c302.html
Affiliation
Tohoku University
Section
Graduate School of Engineering Department of Finemechanics Nanomechanics Precision Nanometrology
Job title
Associate Professor
Degree
博士(工学)(Nagoya University)

Research Areas

 
 

Academic & Professional Experience

 
Feb 2011
   
 
Associate Professor, 東北大学大学院工学研究科 ナノメカニクス専攻
 
Apr 2002
 - 
Jan 2011
研究員(2006~), 株式会社日立製作所 機械研究所/中央研究所/研究開発本部
 

Education

 
 
 - 
Jan 2009
機械理工学専攻, Graduate School, Division of Engineering, Nagoya University
 
 
 - 
Mar 2002
機械電子工学専攻, Graduate School, Division of Engineering, Tohoku University
 
 
 - 
Mar 2000
機械電子工学科, Faculty of Engineering, Tohoku University
 

Committee Memberships

 
Aug 2014
 - 
Today
砥粒加工学会  用語集改訂WG
 
Apr 2014
 - 
Today
精密工学会東北支部  庶務幹事
 
Aug 2012
 - 
Today
日本トライボロジー学会  研究委員会委員
 
Apr 2012
 - 
Today
日本機械学会  会誌編修部会委員
 
Apr 2012
 - 
Mar 2014
精密工学会東北支部  会計幹事
 

Awards & Honors

 
Sep 2017
Non-contact detection of surface defects by using a micro thermal sensor, 13th International Symposium on Measurement Technology and Intelligent Instruments 2017 Xi’an (ISMTII2017) Best Paper Award, The conference Committee of ISMTII2017
Winner: Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen, and Wei Gao
 
Aug 2016
Spindle Error Motion Measurement of Concentricity Gage by Using Laser Scan Micrometer, The 5th International Conference on Nanomanufacturing (nanoMan2016) Best Pawer Award, The conference Committee of nanoMan2016
Winner: Zengyuan Niu, Yuki Shimizu, So Ito, Wei Gao
 
Apr 2016
微空間での熱収支と光を応用した超精密ナノ形状計測の研究, 科学技術分野の文部科学大臣表彰 若手科学者賞, 文部科学省
 
Nov 2015
Investigation of the Deformation Mechanism of a Copper Workpiece during Nanoindentation by using Molecular Dynamics, Excellent Paper Award, The Editorial and Review Committee of the 11th CJUMP
Winner: Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao
 
Nov 2015
Precision Measurement of Slide Straightness of an Ultra-Precision Lathe, The 11th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2015) Excellent Paper Award, The Editorial and Review Committee of the 11th CJUMP
Winner: Zengyuan Niu, Yuanliu Chen, Daiki Matsuura, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao
 
Nov 2013
ASPEN Young Researcher Award, Asian Society for Precision Engineering and Nanotechnology
Winner: Yuki Shimizu
 
Sep 2014
Design of an optical system for evaluation of edge contour of a diamond cutting tool, Excellent Paper Award, International Measurement Confederation (IMEKO) Technical Committee TC14
Winner: Y. Shimizu, S. Jang and W. Gao
 
May 2012
ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術, 日本トライボロジー学会 2011年度日本トライボロジー学会技術賞, 一般社団法人日本トライボロジー学会
Winner: 清水裕樹,徐 鈞国,小平英一
 
Aug 2010
ASME ISPS2010 Best Conference Industry Paper Award, ASME Information Storage and Processing Systems (ISPS) Division
Winner: Yuki SHIMIZU, Junguo XU, Hidekazu Kohira, Kenji Kuroki and Kyosuke ONO
 
Apr 2009
2009年 日本機械学会奨励賞 (技術), 社団法人日本機械学会
 
Mar 2003
2002年度精密工学会沼田記念論文賞, 社団法人精密工学会
Winner: 高 偉, 星野 唯, 清水 裕樹, 清野 慧
 
Dec 2000
精密工学会東北支部2000年度支部講演会 優秀講演奨励賞, 社団法人精密工学会
 
Jun 2015
工作機械技術振興賞・論文賞, 公益財団法人工作機械技術振興財団
Winner: 張 城豪、清水 裕樹、伊東 聡、高 偉
 
Nov 2017
The 13th China-Japan International Conference on Ultra-Precision Machining Process (CJUMP2017) Best Paper Award, The conference Committee of CJUMP2017
Winner: Bo Wen, Yuan-Liu Chen, Yuki Shimizu and Wei Gao
 
Jul 2012
Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects, Excellent Presentation Award, International Society of Nanomanufacturing
 

Published Papers

 
Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Kazuki Nakamura, Hiraku Matsukuma, Xiuguo Chen, Wei Gao
Precision Engineering   54 284-293   Oct 2018
© 2018 Elsevier Inc. Laser autocollimation is innovated for absolute angular position measurement based on an optical frequency comb. The conventional laser autocollimation can only make relative angle measurement due to the unknown angular distan...
Xiuguo Chen, Xiuguo Chen, Taku Nakamura, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Optics and Laser Technology   103 359-366   Jul 2018
© 2018 Elsevier Ltd The high spatial coherence and high stability of a mode-locked femtosecond laser source make it ideal for chromatic confocal imaging. Nevertheless, the high non-smoothness of spectrum of the mode-locked laser source often restr...
Yuki Shimizu, Taiji Maruyama, Shota Nakagawa, Yuan Liu Chen, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology   29    May 2018
© 2018 IOP Publishing Ltd. For measurement of a focused laser beam diameter, a new method, referred to as the PD-edge method, in which an edge of an active cell in a photodiode (PD) is directly employed in the same manner as a knife-edge or a knif...
Yuan Liu Chen, Yanhao Xu, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology   29    May 2018
© 2018 IOP Publishing Ltd. This paper presents a high quality-factor (Q-factor) quartz tuning fork (QTF) with a glass probe attached, used in frequency modulation tapping mode atomic force microscopy (AFM) for the surface profile metrology of micr...
Yindi Cai, Yindi Cai, Yuan Liu Chen, Malu Xu, Yuki Shimizu, So Ito, Hiraku Matsukuma, Wei Gao
Measurement Science and Technology   29    Mar 2018
© 2018 IOP Publishing Ltd. Precision replication of the diamond tool cutting edge is required for non-destructive tool metrology. This paper presents an ultra-precision tool nanoindentation instrument designed and constructed for replication of th...
An optical angle sensor based on chromatic dispersion with a mode-locked laser source
Yuki Shimizu, Shuhei Madokoro, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems, and Manufacturing   12(5) 96   Jul 2018   [Refereed]
Xiuguo Chen, Xiuguo Chen, Yuki Shimizu, Chong Chen, Yuan Liu Chen, Wei Gao
Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics   36    Mar 2018
© 2018 Author(s). Delicate control of the initial polarization states of sub-beams incident to the interferometer unit in multibeam Lloyd's mirror interference lithography is of great significance for the fabrication of high-precision two-dimensio...
Evaluation of the grating period based on laser diffraction by using a mode-locked femtosecond laser beam
Yuki Shimizu, Kentaro Uehara, Hiraku Matsukuma, Wei Gao
Journal of Advanced Mechanical Design, Systems, and Manufacturing   12(5) 97   Jul 2018   [Refereed]
Yuki Shimizu, Satoshi Kataoka, Tatsuya Ishikawa, Yuan Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
Sensors (Switzerland)   18    Feb 2018
© 2018 by the authors. Licensee MDPI, Basel, Switzerland. In this paper a new concept of a liquid-surface-based three-axis inclination sensor for evaluation of angular error motion of a precision linear slide, which is often used in the field of p...
Design and Testing of a Micro-thermal Sensor Probe for Nondestructive Detection of Defects on a Flat Surface
Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen, Hiraku Matsukuma, Wei Gao
Nanomanufacturing and Metrology   1 45-57   Mar 2018   [Refereed]
Yuan Liu Chen, Yuki Machida, Yuki Shimizu, Hiraku Matsukuma, Wei Gao
CIRP Annals      Jan 2018
© 2018 This paper presents a stitching linear-scan method for roundness measurement of small cylinders. Differing from the conventional rotary-scan method by a roundness measuring instrument which suffers from challenges in accurately aligning a c...
Yuan Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering   50 380-387   Oct 2017
© 2017 Elsevier Inc. A method, which is referred to as the edge reversal method, is proposed for precision measurement of the cutting edge radius of single point diamond tools. An indentation mark of the cutting edge which replicates the cutting e...
Xiuguo Chen, Xiuguo Chen, Zongwei Ren, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Optics Express   25 22237-22252   Sep 2017
© 2017 Optical Society of America. Polarization control is of vital importance in two-axis Lloyd’s mirror interference lithography to achieve the preferred interference fringes. In this work, we first establish a three-dimensional polarization ray...
Yuan Liu Chen, Zengyuan Niu, Daiki Matsuura, Jung Chul Lee, Yuki Shimizu, Wei Gao, Jeong Seok Oh, Chun Hong Park
Measurement Science and Technology   28    Sep 2017
© 2017 IOP Publishing Ltd. In this paper, a four-probe measurement system is implemented and verified for the carriage slide motion error measurement of a large-scale roll lathe used in hybrid manufacturing where a laser machining probe and a diam...
Xiuguo Chen, Xiuguo Chen, Yuki Shimizu, Xin Xiong, Yuan Liu Chen, Wei Gao
Optics Express   25 21567-21582   Sep 2017
© 2017 Optical Society of America. A new method, in which the wavefronts of the zero-order and the positive and negative first-order diffracted beams from a planar scale grating in Littrow setup are analyzed by a Fizeau interferometer, is proposed...
Yuan Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura, Wei Gao
Optics Express   25 16725-16738   Jul 2017
© 2017 Optical Society of America. A mode-locked laser autocollimator, in which a group of first-order diffracted beams from a grating reflector are detected by an autocollimation unit, has an expanded angle measurement range compared with a conve...
Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering   49 253-261   Jul 2017
© 2017 Elsevier Inc. This paper presents auto-tracking single point diamond cutting, which can conduct precision cutting on non-planar brittle material substrates without prior knowledge of their surface forms, by utilizing a force controlled fast...
Zengyuan Niu, Yuan Liu Chen, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh, Chun Hong Park
International Journal of Precision Engineering and Manufacturing   18 651-660   May 2017
© 2017, Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg. This paper presents a precision measurement of the Z-slide vertical error motion of an ultra-precision lathe based on a three-probe measurement method. The ver...
Yuki Shimizu, Yuki Matsuno, Yuan Liu Chen, Wei Gao
International Journal of Automation Technology   11 781-786   Jan 2017
© 2017, Fuji Technology Press. All rights reserved. This paper presents an experimental study on a new concept of a surface defect detection method, in which surface defects will be detected by monitoring a change in heat flow between a micro ther...
Yuki Shimizu, Ryo Aihara, Kazuki Mano, Chong Chen, Yuan Liu Chen, Xiuguo Chen, Wei Gao
Precision Engineering      Jan 2017
© 2017 Elsevier Inc. A compact and stable two-axis Lloyd's mirror interferometer based on a new non-orthogonal type of mirror-substrate assembly is designed for fabrication of 100 mm × 100 mm large-area two-dimensional (2D) diffraction scale grati...
Yuki Shimizu, Yukitoshi Kudo, Yuan-Liu Chen, So Ito, Wei Gao
Precision Engieering   47 72-80   2017   [Refereed]
Yuki Shimizu, Siew Leng Tan, Dai Murata, Taiji Maruyama, So Ito, Yuan-Liu Chen, Wei Gao
Optics Express   24(3) 2788-2805   Feb 2016   [Refereed]
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao, Liangchi Zhang
Applied Surface Science   369 354-365   Jan 2016
© 2016 Elsevier B.V. All rights reserved. This paper investigates the contact characteristics between a copper workpiece and a diamond tool in a force sensor-integrated fast tool servo (FS-FTS) for single point diamond microcutting and in-process ...
Yuan-Liu Chen, Yuki Shimizu, Yukitoshi Kudo, So Ito and Wei Gao
Optics EXPRESS   24(14) 15554-15569   2016   [Refereed]
Yuan Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing Feng Ju
Journal of Micromechanics and Microengineering   26    Dec 2015
© 2016 IOP Publishing Ltd. This paper presents a measurement and compensation method of surface inclination for ductile cutting of silicon microstructures by using a diamond tool with a force sensor based on a four-axis ultra-precision lathe. The ...
Xinghui Li, Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   9524    Jan 2015
© 2015 SPIE. This paper presents a fabrication method of two-dimensional micro patterns for adaptive optics with a micrometric or sub-micrometric period to be used for fabrication of micro lens array or two-dimensional diffraction gratings. A mult...
Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing   16 423-431   Jan 2015
© 2015, Korean Society for Precision Engineering and Springer-Verlag Berlin Heidelberg. This paper presents the design and construction of a laser autocollimator-based optical sensor for measurement of the tilt angles of a reflector mounted on the...
Gaofa He, Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Open Electrical and Electronic Engineering Journal   8 342-347   Jan 2014
© 2014, He et al. For measuring the surface profile of many micro-optical components with complicated shapes, which are made of non-conductive material, the electrostatic force microscopy (EFM) was recommended. The relationship between the polariz...
So Ito, Daiki Matsuura, Takayuki Meguro, Shigeaki Goto, Yuki Shimizu, Wei Gao, Shigeru Adachi, Kyohei Omiya
Journal of Advanced Mechanical Design, Systems and Manufacturing   8    Jan 2014
© 2014 The Japan Society of Mechanical Engineers. Ceramics materials have excellent mechanical characteristics such as high-stiffness, low-thermal expansion, wear resistance and light weight. Owing to those characteristics, the ceramics parts have...
Yuki Shimizu, Wenjian Lu, Yuta Ohba and Wei Gao
Measurement Science and Technology      2014   [Refereed]
Yuki Shimizu, Takeshi Ito, Xinghui Li, WooJae Kim and Wei Gao
Measurement Science and Technology      2014   [Refereed]
Jung Chul Lee, Yuki Shimizu, Wei Gao, JeongSeok Oh and Chun Hong Park
Precision Engineering      2014   [Refereed]
Gaofa He, Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   8916    Dec 2013
For measuring the surface profile of many micro-optical components which are made of non-conductive material, such as diffractive grating and Fresnel lens, with complicated shapes on their surfaces, the electrostatic force microscopy (EFM) was rec...
So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato, Kouji Kubota
International Journal of Automation Technology   8 28-33   Dec 2013
This paper introduces the widthmeasurement of a cutting tool edge by utilizing a laser triangulation displacement sensor. By using the reflected light intensity of the laser displacement sensor, micrometric edge width which is smaller than the dia...
Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   8759    Apr 2013
This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the s...
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
Proceedings of SPIE - The International Society for Optical Engineering   8759    Apr 2013
To fabricate a scale grating for a surface encoder in a cost-effective way, a blue laser diode with a wavelength of 405 nm is employed in a Lloyd's mirror interferometer to carry out interference lithography (IL) of the grating. The beams from the...
Wenjian Lu, Yuki Shimizu, So Ito, Wei Gao
Key Engineering Materials   523-524 826-831   Dec 2012
A design study of a thermal-type contact sensor for the detection of small defects, the heights of which are less than 16 nm on wafer surfaces, is described in this paper. The feasibility of the contact sensor, which would detect frictional heat g...
Sung Ho Jang, Yuki Shimizu, Takemi Asai, So Ito, Wei Gao
Key Engineering Materials   523-524 925-931   Dec 2012
This paper presents an optical probe employed for edge contour measurement of single point diamond cutting tools. A laser beam from a laser diode (LD) is focused by an objective lens to form a small light spot with a radius of approximately 20 μm,...
Toyohiro Azuma, Eiji Niwa, Yuxin Peng, Junji Kaneko, Yuki Shimizu, So Ito, Wei Gao
Key Engineering Materials   523-524 939-944   Dec 2012
A strain-gauge-type precision displacement sensor, which is developed for the positioning of a micro-XY stage, is described in this paper. A thin-film strain-gauge element, which is made of Cr-N alloy, is directly fabricated on a ceramic base plat...
So Ito, Kang Won Lee, Yuki Shimizu, Wei Gao
Key Engineering Materials   523-524 945-950   Dec 2012
A contact stylus-type displacement sensor is proposed for a surface form measurement of micro-structures. The stylus is supported by an air-bearing, thus it can be moved smoothly without friction between the stylus and the air-bearing. In order to...
Akihide Kimura, Wei Gao, Woojae Kim, Koji Hosono, Yuki Shimizu, Lei Shi, Lijiang Zeng
Precision Engineering   36 576-585   Oct 2012
A three-axis surface encoder was developed for stage motion measurement with sub-nanometric resolutions. The surface encoder was composed of a scale XY planar grating with X- and Y-directional periodic grating structures and an optical sensor head...
Shigeaki Goto, Yuki Shimizu, Jung Chul Lee, So Ito, Wei Gao, Shigeru Adachi, Kyohei Omiya, Hiroki Sato, Tetsuya Hisada, Yoshifumi Saito, Hiroaki Kubota
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering   78 631-635   Jul 2012
This paper presents an on-machine surface profile measurement system for a large mirror to be used on a satellite. The system is constructed by fixing a long-stroke length gauge on a commercial rotary grinder which fabricates the mirror. The combi...
Bin Xu, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   8321    Dec 2011
This paper presents a micro-stylus probe, which is composed of a precision glass micro-ball and a shaft made by a glass tube. The diameter of the micro-ball was 50 μm. The tip angle of the glass-tube shaft was approximately 10 degrees. Strength te...
Yuxin Peng, Yasumasa Sakurai, Yoshikazu Arai, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   8321    Dec 2011
This paper presents a linear-rotary micro-stage that can generate motions along and about the Z-axis using piezoelectric elements (PZTs). The small stroke of a PZT is extended by repeating the PZT motions based on a mechanism of impact friction dr...
Yuki Shimizu, Yuki Shimizu, Junguo Xu, Hidekazu Kohira, Masayuki Kurita, Toshiya Shiramatsu, Masaru Furukawa
IEEE Transactions on Magnetics   47 3426-3432   Oct 2011
Targeting both higher touchdown sensitivity and highly accurate nanometer-scale defect detection on a disk surface, a thermal-contact sensor, integrated into a magnetic-head slider, was developed. It was experimentally shown that the contact senso...
Akihide Kimura, Koji Hosono, Woo Jae Kim, Yuki Shimizu, Wei Gao, Lijiang Zeng
International Journal of Nanomanufacturing   7 73-91   May 2011
A new optical two-degree-of-freedom (2-DOF) linear encoder with a mosaic scale grating is proposed to expand the measurement range along the in-plane direction of the grating. The 2-DOF linear encoder has the ability to measure the in-plane displa...
Y. Shimizu, S. Osawa, T. Meguro, W. Lu, W. Gao
Procedia Engineering   19 337-342   Jan 2011
Surface characterization of an XY sinusoidal grating, which is fabricated by FTS (fast tool servo) on a diamond turning machine, is presented. The grating has a three dimensional micro-structured surface, which is a superposition of sinusoidal wav...
Yuki Shimizu, Junguo Xu, Hidekazu Kohira, Masayuki Kurita, Toshiya Shiramatsu and Masaru Furukawa
IEEE Transactions on Magnetics      2011   [Refereed][Invited]
Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects
Yuki Shimizu, Wenjian Lu, and Wei Gao
Proceedings of the 3rd International Conference on Nanomanufacturing (nanoMan2012)      2012   [Invited]
Optimal polarization modulation for orthogonal two-axis Lloyd’s mirror interference lithography
XIUGUO CHEN, ZONGWEI REN, YUKI SHIMIZU, YUAN-LIU CHEN, AND WEI GAO
Optics Express      Sep 2017   [Refereed]
Self-calibration of Fizeau interferometer and planar scale gratings in Littrow setup
XIUGUO CHEN, YUKI SHIMIZU, XIN XIONG, YUAN-LIU CHEN, AND WEI GAO
Optics Express      Aug 2017   [Refereed]
Yuan-Liu Chen, Yindi Cai, Malu Xu, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering      Jul 2017   [Refereed]
Optical frequency domain angle measurement in a femtosecond laser autocollimator
Yuan-Liu Chen, Yuki Shimizu, Jun Tamada, Yukitoshi Kudo, Shuhei Madokoro, Kazuki Nakamura, and Wei Gao
Optics Express      Jul 2017   [Refereed]
Yuan-Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Precision Engineering      Mar 2017   [Refereed]
Yuki Shimizu, Yuki Matsuno, Yuan-Liu Chen, and Wei Gao
International Journal of Automation Technology      Feb 2017   [Refereed]
Zengyuan Niu, Yuan-Liu Chen*, Daiki Matsuura, Jung Chul Lee, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeong Seok Oh, Chun Hong Park
International Journal of Precision Engineering and Manufacturing      Jan 2017   [Refereed]
Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao, Liangchi Zhang
Applied Surface Science   369 354-365   Feb 2016   [Refereed]
Yuki Shimizu, SungHo Jang, Wei Gao
Measurement   94 934-941   2016   [Refereed]
YUKI SHIMIZU*, RYO AIHARA, ZONGWEI REN, YUAN-LIU CHEN, SO ITO, AND WEI GAO
Optics EXPRESS   24(14) 27521-27535   2016   [Refereed]
Yindi Cai, Yuan-Liu Chen, Yuki Shimizu, So Ito and Wei Gao
Journal of Engineering Manufacture      2016   [Refereed]
Shigeaki GOTO, Minglei LI, So ITO, Yuki SHIMIZU and Wei GAO
Journal of Advanced Mechanical Design, Systems, and Manufacturing   10(5) 16-00134   2016   [Refereed]
Yindi CAI, Xinghui LI, Ryo AIHARA, Ren ZONGWEI, Yuki SHIMIZU*, So ITO and Wei GAO
Journal of Advanced Mechanical Design, Systems, and Manufacturing   10(5) 16-00127   2016   [Refereed]
Jun TAMADA, Yukitoshi KUDO, Yuan-Liu CHEN, Yuki SHIMIZU* and Wei GAO
Journal of Advanced Mechanical Design, Systems, and Manufacturing   10(5) 16-00128   2016   [Refereed]
Yuan-Liu Chen, So Ito, Hirotaka Kikuchi, Ryo Kobayashi, Yuki Shimizu and Wei Gao
Measurement Science and Technology   27 1-13   2016   [Refereed]
So Ito, Hirotaka Kikuchi, Yuanliu Chen, Yuki Shimizu, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
Applied Sciences   6 156   2016   [Refereed]
So Ito, Yuan-Liu Chen, Yuki Shimizu, Hirotaka Kikuchi, Wei Gao, Kazuhiko Takahashi, Toshihiko Kanayama, Kunmei Arakawa, Atsushi Hayashi
Precision Engineering   43 525-529   2016   [Refereed]
Yuan-Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
Precision Engineering   43 462-467   2016   [Refereed]
Yuan-Liu Chen, Yindi Cai, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
Journal of Micromechanics and Microengineering   26 025002   2016   [Refereed]
Siew Leng Tan, Yuki Shimizu, Takayuki Meguro, So Ito, and Wei Gao
International Journal of Precision Engineering and Manufacturing   16(3) 423-431   Mar 2015   [Refereed]
Investigation on Sensitivity of a Contact-Type Thermal Sensor for Surface Defect Inspections
Yuki Shimizu, Yuta Ohba, Wei Gao
International Journal of Automation Technology      2015   [Refereed]
Yuan-Liu Chen, Yuki Shimizu, Yindi Cai, Shu Wang, So Ito. Bing-Feng Ju and Wei Gao
International Journal of Advanced Manufacturing Technology      2015   [Refereed]
Yuan-Liu Chen, Shu Wang, Yuki Shimizu, So Ito, Wei Gao, Bing-Feng Ju
Precision Engineering      2015   [Refereed]
B. Xu, Y. Shimizu, S. Ito and W. Gao
Precision Engineering      2015   [Refereed]
Zhigang JIA, Keiichiro HOSOBUCHI, So ITO, Yuki SHIMIZU and Wei GAO
Journal of Advanced Mechanical Design, Systems, and Manufacturing      2014   [Refereed]
Keiichiro HOSOBUCHI, Zhigang JIA, So ITO, Yuki SHIMIZU and Wei GAO
Journal of Advanced Mechanical Design, Systems, and Manufacturing      2014   [Refereed]
So Ito, Ryo Aihara , Woo Jae Kim , Yuki Shimizu and Wei Gao
Advanced Optical Technologies      2014   [Refereed]
Yuki Shimizu, Yuta Ohba, Wei Gao
Journal of Advanced Mechanical Design, Systems, and Manufacturing      2014   [Refereed]
SungHo Jang, Yuki Shimizu, So Ito and Wei Gao
Journal of Advanced Mechanical Design, Systems, and Manufacturing      2014   [Refereed]
X. Li, W. Gao, Y. Shimizu, S. Ito
CIRP Annals-Manufacturing Technology      2014   [Refereed]
Y. L. Chen. Y. Shimizu, S. Ito, W. Gao and B. F. Ju
Precision Engineering      2014   [Refereed]
Xinghui Li, Yuki Shimizu, Takeshi Ito, Yindi Cai, So Ito, Wei Gao
Optical Engineering      2014   [Refereed]
Zhigang Jia, So Ito, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu and Wei Gao
Measurement Science and Technology      2014   [Refereed]
Yuan-Liu Chen, Wei Gao, Bing-Feng Ju, Yuki Shimizu, So Ito
Measurement Science and Technology      2014   [Refereed]
Contact-Clearance Sensor for HDI Subnanometer Regime
Junguo Xu, Yuki Shimizu, Masaru Furukawa, Jianhua Li, Yuichiro Sano, Toshiya Shiramatsu,Yuichi Aoki, Hiroyuki Matsumoto, Kenji Kuroki and Hidekazu Kohira
IEEE Transactions on Magnetics      2014   [Refereed]
Yuxin Peng, So Ito, Yuki Shimizu, Toyohiro Azuma, Wei Gao and Eiji Niwa
Sensors and Actuators, A      2014   [Refereed]
So Ito, Sho Sekine, Yuki Shimizu, Wei Gao, Tsutomu Fukuda, Akira Kato and Kouji Kubota
International Journal of Automation Technology      2014   [Refereed]
Wei Gao, Bin Xu, Toshiki Takeishi, Yuki Shimizu and So Ito
Chinese Journal of Mechanical Engineering      2014   [Refereed]
A micro optical probe for edge contour evaluation of diamond cutting tools
S. H. Jang, Y. Shimizu, S. Ito, and W. Gao
Journal of Sensors and Sensor Systems      2014   [Refereed]
Bin Xu, Zhigang Jia, Xinghui Li, Yuan-Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proc. SPIE 8769, International Conference on Optics in Precision Engineering and Nanotechnology      2013   [Refereed][Invited]
Yuxin Peng, So Ito, Yasumasa Sakurai, Yuki Shimizu and Wei Gao
International Journal of Precision Engineering and Manufacturing      2013   [Refereed]
Zhigang Jia, So Ito, Keiichiro Hosobuchi, Shigeaki Goto, Yuki Shimizu, Gaofa He, Wei Gao
International Journal of Precision Engineering and Manufacturing      2013   [Refereed]
An Electrostatic Force Probe for Surface Profile Measurement in Noncontact Condition
So Ito, Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, Yuki Shimizu, Gaofa He and Wei Gao
International Journal of Automation Technology      2013   [Refereed]
Development of a micro-sized thermal contact sensor for inspection of surface defects
Yuki Shimizu, Wenjian Lu, Yuta Ohba and Wei Gao
International Journal of Automation Technology      2013   [Refereed]
Bin Xu, Yuki Shimizu, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing      2013   [Refereed]
Yuki Shimizu, Yuxin Peng, Junji Kaneko, Toyohiro Azuma, So Ito, Wei Gao and Tien-Fu Lu
Sensors and Actuators A      2013   [Refereed]
J. Xu, Y. Shimizu, J. Liu, T. Shiramatsu, M. Furukawa, J. Li and H. Kohira
IEEE Transactions on Magnetics   49(6) 2715-2718   2013   [Refereed]
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao
International Journal of Precision Engineering and Manufacturing      2013   [Refereed]
Wei Gao, Yuan-Liu Chen, Kang-Won Lee, Young-Jin-Noh, Yuki Shimizu, So Ito
CIRP Annals - Manufacturing Technology   62(1) 523-526   2013   [Refereed]
Xinghui Li, Wei Gao, Hiroshi Muto, Yuki Shimizu, So Ito, Songyi Dian
Precision Engineering   37 771-781   2013   [Refereed]
A Micro-ball Tapping Probe for Form Measurement of Micro-structured Surface
B. Xu, Y. Shimizu, S. Ito and W. Gao
JOURNAL OF THE CHINESE SOCIETY OF MECHANICAL ENGINEERS   34 73-80   2013   [Refereed]

Misc

 
Satoru Takahashi, Yuki Shimizu, Yasuhiro Mizutani
International Journal of Automation Technology   11 681   Jan 2017
清水裕樹, 松隈啓, 高偉
先端加工技術   (104) 4‐6   Mar 2018
高機能高速工具サーボによる3次元微細形状加工技術のイノベーション
清水裕樹,陳遠流,盧泳辰,伊東聡,高偉
機械技術   64(4) 36-40   Mar 2016
清水 裕樹,石川 龍弥,片岡 智史,陳 遠流,伊東 聡,高 偉
機械の研究   68(10) 827-833   Oct 2016
精密位置決めにおける多軸センサの活用
伊東 聡,清水 裕樹,高 偉
機械設計   60(11) 40-45   2016
超精密形状計測加工システム―ダイヤモンド切削工具の機上ナノ計測―
清水 裕樹,陳 遠流,張 城豪,伊東 聡,高 偉
機械技術   64(7) 28-31   2016
清水裕樹, 清水裕樹, GAO Wei, GAO Wei
日本機械学会誌   118(1164) 668-671   Nov 2015
知的なはかり方とは? 精度を左右する計測アルゴリズム
清水裕樹,高偉
日本機械学会誌   118(1164) 668-671   Nov 2015
Wei Gao, Kang Won Lee, Young Jin Noh, Yoshikazu Arai, Yuki Shimizu
Micro-Cutting: Fundamentals and Applications   315-344   Aug 2013
© 2013 John Wiley & Sons, Ltd. All rights reserved. This chapter presents a hybrid instrument, which consists of a fast tool servo and a piezoelectric force sensor. It presents a design strategy for integration of the force sensor into the fast ...
LI Xinghui, LI Xinghui, 清水裕樹, GAO Wei
光学   44(9) 356-362   Sep 2015
精密測定器・加工機向け光学式エンコーダー技術
李 星輝,清水 裕樹,高 偉
光学   44(9)    2015
SHIMIZU Yuki, GAO Wei
Journal of the Society of Mechanical Engineers   118(1164) 668-671   2015
精密位置決めのための角度センサ活用
清水 裕樹,伊東 聡,高 偉
機械設計   58(8) 46-52   2014
伊東聡, CHEN Yuanliu, NOH Young‐Jin, 清水裕樹, GAO Wei
ケミカルエンジニヤリング   58(7) 515-523   Jul 2013
大型加工物の高精度化を保証するインプロセス/オンマシン計測技術の最新動向
清水裕樹,高偉,伊東聡
機械技術   60(7) 30-33   2012

Books etc

 
Measurement and Instrumentation
高偉, 清水裕樹, 羽根一博, 祖山均, 足立幸志 (Part:Joint Work, 第3章,第11章,第12章)
朝倉書店   Mar 2017   
Micro-Cutting: Fundamentals and Applications
Wei Gao, Kang Won Lee, Young-Jin Noh, Yoshikazu Arai and Yuki Shimizu (Part:Joint Work, Chapter 11: In-Process Micro/Nano Measurement for Micro Cutting)
Wiley   2013   
Nanofabrication
Yuki Shimizu, Takemi Asai, Wei Gao (Part:Joint Work, Chapter X)
INTECH   Oct 2011   ISBN:978-953-307-912-7

Conference Activities & Talks

 
松隈啓, 清水裕樹, 高偉
精密工学会大会学術講演会講演論文集   5 Sep 2018   
清水裕樹, 松野優紀, 石田彩華, 松隈啓, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2018   
Development of a prototype micro thermal sensor probe for non-destructive surface defect detection
Yuki Shimizu, Yuki Matsuno, Hiraku Matsukuma, Wei Gao
6th International Conference on Nanomanufacturing (nanoMan2018)   4 Jul 2018   
Uncertainty analysis of a six-degree-of-freedom surface encoder for a planar motion stage
Yuki Shimizu, Masaya Furuta, Yuan-Liu Chen, Xiuguo Chen, Hiraku Matsukuma, Wei Gao
The 15th CIRP Conference on Computer Aided Tolerancing (CIRP CAT 2018)   11 Jun 2018   
清水裕樹, 松野優紀, CHEN Yuan‐Liu, 松隈啓, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2018   
Kentaro Uehara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
In this paper, a measurement method with a mode-locked laser source for evaluation of grating periods, which is based on the laser diffraction method with the Littrow configuration, is proposed. Optical frequencies of the mode-locked laser, which ...
Keisuke Adachi, Takuma Sugawara, Yuki Shimizu, Yuan Liu Chen, Wei Gao, Eiji Niwa, Yoshihiro Sasaki
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
This paper presents a design study of an XYZ three-axis micro stage which achieves a size of several cubic centimeters, a millimetric travel range, a nanometric driving resolution and three-axis motion at the same time. In addition, unique leaf sp...
Xiuguo Chen, Zongwei Ren, Yuanliu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
In this work, we establish a three-dimensional (3D) polarization ray-tracing model to trace the evolution of polarization states of incident beams through the corner-cube-like interferometer unit of an orthogonal two-axis Lloyd's mirror interferom...
Toshiki Saito, Yuki Machida, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
This paper proposes a new surface form measurement method using a scanning type surface profiler for small roll worlpieces, which are used in many industrial fields. In this method, inclination of a workpiece is required to be aligned precisely. F...
Zengyuan Niu, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
This paper presents a method for the measurement of relative vertical error motions with respect to vertical misalignment error of a bench center by using an optical micrometer. A roll is used as a reference object and the optical micrometer are e...
Shuhei Madokoro, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
This paper presents a new optical angle sensor, in which a mode-locked laser referred to as an optical frequency comb is employed as the light source. Highly-stable carrier frequency of the optical frequency comb is expected to improve the sensor ...
Yuki Shimizu, Taku Nakamura, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
An optical configuration for a confocal microscope employing a mode-locked laser source is proposed in this paper. Due to high illumination efficiency and a highly stable optical frequency of the mode-locked laser, which is traceable with the nati...
Kazuki Mano, Ryo Aihara, Yuki Shimizu, Yuan Liu Chen, Wei Gao
Proceedings of the 9th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2017   13 Nov 2017   
This paper presents an optical setup to fabricate a large-area two-dimensional diffraction grating by using a two-axis Lloyd's mirror interferometer. In order to fabricate large-area gratings, a large collimating lens, which generates a large diam...
清水裕樹, 中川翔太, CHEN Yuan‐Liu, GAO Wei
精密工学会大会学術講演会講演論文集   5 Sep 2017   
Optical Instruments for Measurement of the Next-generation Stage Systems for Dimensional Metrolog [Invited]
SHIMIZU Yuki
Optical Society of Korea OSK-OSJ Joint Symposium   11 Jul 2017   
清水裕樹, 松野優紀, CHEN Yuan‐Liu, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2017   
Yindi Cai, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
2016 IEEE 11th Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016   28 Nov 2016   
© 2016 IEEE. Molecular dynamics simulations of contact mode form measurement process on a soft substrate with a special surface profile using a diamond AFM tip are preformed to investigate the contact behavior and the surface profile damages or di...
Yuki Shimizu, Yuki Matsuno, Yuta Ohba, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016   21 Nov 2016   
© 2016 IEEE. This paper presents a concept of a micro thermal sensor to be used for defect inspection of a smoothly-finished surface such as a bare wafer or a hard disk. In the proposed concept, existences of the defects on a measurement surface w...
Zongwei Ren, Ryo Aihara, Yuki Shimizu, So Ito, Yuan Liu Chen, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016   21 Nov 2016   
© 2016 IEEE. This paper presents the analysis of an orthogonal multi-beam Lloyd's mirror interferometer for fabrication of two-axis gratings, which is employed as a measurement standard. Conventionally, for the fabrication of such complicated micr...
Zengyuan Niu, Ryo Kobayashi, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
16th International Conference on Nanotechnology - IEEE NANO 2016   21 Nov 2016   
© 2016 IEEE. This paper presents nanometrology of an ultraprecision machined surface by using optical sensors. To verify the feasibilities of optical sensors on the measurement of surface profile, different types of fiber-optic sensor and laser mi...
清水裕樹, 菅原拓馬, 安達圭祐, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘
日本機械学会年次大会講演論文集(CD-ROM)   10 Sep 2016   
伊東聡, CHEN Yuanliu, 菊地浩貴, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
日本機械学会年次大会講演論文集(CD-ROM)   10 Sep 2016   
Micro Thermal Sensor for Nanometric Surface Defect Inspection
IEEE NANO 2016 (16th International Conference on Nanotechnology)   22 Aug 2016   
伊東聡, 菊地浩貴, 小林遼, CHEN Yuan‐Liu, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
精密工学会大会学術講演会講演論文集   20 Aug 2016   
Investigation on the sensitivity of an optical angle sensor based on laser autocollimation
International Symposium on Optoelectronic Technology and Application 2016 (OTA 2016)   9 May 2016   
EVALUATION OF A FOCUSED LASER SPOT DIAMETER FOR AN OPTICAL ANGLE SENSOR
The 59th Ilmenau Scientific Colloquium   11 Sep 2017   
Optical Instruments for Measurement of the Next-generation Stage Systems for Dimensional Metrology
Optical Society of Korea Summer Meeting 2017   10 Jul 2017   
Quantitative evaluation of a cutting tool edge geometry by using a micro laser probe
39th International MATADOR Conference on Advanced Manufacturing (Matador 2017)   5 Jul 2017   
Computer simulation on the optical configuration of an ultra-sensitive angle sensor based on laser autocollimation
16th International Conference on Precision Engineering (ICPE 2016)   16 Nov 2016   
A design study of an XYZ micro-stage
The 7th International Conference on Positioning Technology (ICPT2016)   10 Nov 2016   
A sensitivity-improved micro thermal sensor for surface defect inspection
The 12th Chinese-Japan International Conference on Ultra-Precision Manining Process   4 Nov 2016   
菊地浩貴, 伊東聡, 陳遠流, 清水裕樹, GAO Wei, 高橋和彦, 金山利彦, 荒川訓明, 林敦
精密工学会大会学術講演会講演論文集   1 Mar 2016   
清水裕樹, 松野優紀, 大場裕太, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2016   
Laser interference lithography with a modified two-axis Lloyd’s mirror interferometer for fabrication of two-dimensional micro patterns
The 8th International Conference on Leading Edge Manufacturing in 21st Century (LEM21)   19 Oct 2015   
Yuan Liu Chen, Yindi Cai, Keisuke Tohyama, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper presents an experimental investigation of ductile cutting of silicon by using a diamond tool with a negative rake angle. A diamond cutting tool with a zero rake angle is inclined to form a negative rake angle for a better performance in...
Jun Tamada, Yukitoshi Kudo, Yuan Liu Chen, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper proposes a new optical angle sensor, in which a mode-locked femtosecond laser referred to as an optical frequency comb is employed as a light source. By using the optical frequency comb whose carrier frequency is well stabilized by usin...
Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
In this research, a long stroke atomic force microscope (LS-AFM) is developed for surface profile measurement of micro-optics with steep sidewalls. An electrochemically polished tungsten probe with sharpened apex is employed as the AFM probe which...
So Ito, Kikuchi Hirotaka, Yuan Liu Chen, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
A prototype measurement system by using a micro-probe is introduced for the precision measurement of the slit width. The stylus of the micro-probe is consisted of the thermally-pulled capillary glass tube and precision glass ball with 50 μm in dia...
Shigeaki Goto, Minglei Li, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper reports the experimental result of noncontact surface profile measurement of an insulating sample made of glass with the developed electrostatic force microscope (EFM). Noncontact scanning was carried out maintaining the tip-to-sample d...
Satoshi Kataoka, Tatsuya Ishikawa, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper presents measurement of the angular error motions of a precision linear stage by using a high resolution clinometer in the production process of the stage, where the measurement is repeatedly carried out together with a hand scraping op...
Zengyuan Niu, Yuanliu Chen, Daiki Matsuura, Ryo Kobayashi, Yuki Shimizu, So Ito, Wei Gao, Jeongseok Oh, Chunhong Park
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper presents a measurement method for vertical straightness of a roll workpiece on an ultra-precision lathe. The measurement of vertical straightness of a roll workpiece is directly influenced by the vertical error motions of carriage slide...
Yindi Cai, Yuanliu Chen, Yuki Shimizu, So Ito, Wei Gao, Ying Chen
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper presents molecular dynamics simulation on nanoindentation of diamond indenter on a copper workpiece. Surface damages of the workpiece are caused in the contact detection process for ultra-precision fabrication and form measurement of su...
Yindi Cai, Xinghui Li, Xinghui Li, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of the 8th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2015   18 Oct 2015   
This paper presents a design study on an optical setup for fabrication of a two-dimensional grating used in encoder systems. By adding major modifications to the conventional one-axis Lloyd's mirror interferometer, a modified two-axis Lloyd's mirr...
伊東聡, 関根匠, 清水裕樹, GAO Wei, 高橋和彦, 荒川訓明, 山本泰河, 久保田晃史
日本機械学会年次大会講演論文集(CD-ROM)   12 Sep 2015   
清水裕樹, NIU ZengYuan, 松浦大貴, 小林遼, 伊東聡, GAO Wei
日本機械学会年次大会講演論文集(CD-ROM)   12 Sep 2015   
松野優紀, 大場裕太, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
小林遼, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤友樹
精密工学会大会学術講演会講演論文集   20 Aug 2015   
大野敦子, KIM WooJae, CAI Yindi, CHEN Yuan‐Liu, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
中川翔太, JANG SungHo, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
伊東聡, 石川龍弥, 片岡智史, CHEN Yuan‐Liu, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
清水裕樹, 玉田純, 工藤幸利, CHEN Yuan‐Liu, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
相原涼, LI Xinghui, CAI Yindi, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
古田雅也, LI Xinghui, CAI Yindi, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
片岡智史, 石川龍弥, CHEN Yuan‐Liu, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
丸山泰司, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   20 Aug 2015   
町田裕貴, 清水裕樹, 伊東聡, GAO Wei, 山崎宏, 柴本裕輔, 花岡浩毅
精密工学会大会学術講演会講演論文集   20 Aug 2015   
菅原拓馬, 清水裕樹, 伊東聡, GAO Wei, 丹羽英二, 佐々木祥弘
精密工学会大会学術講演会講演論文集   20 Aug 2015   
伊東聡, JIA Zhigang, LI Minglei, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2015   
丸山泰司, 清水裕樹, 伊東聡, GAO Wei, TAN Siew Leng
精密工学会大会学術講演会講演論文集   1 Mar 2015   
Xinghui Li, Xinghui Li, Yindi Cai, Ryo Aihara, Yuki Shimizu, So Ito, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   1 Jan 2015   
© 2015 SPIE. This paper presents a fabrication method of two-dimensional micro patterns for adaptive optics with a micrometric or sub-micrometric period to be used for fabrication of micro lens array or two-dimensional diffraction gratings. A mult...
SHIMIZU Yuki, NIU Zeng Yuan, MATSUURA Daiki, KOBAYASHI Ryo, ITO So, GAO Wei
The Proceedings of Mechanical Engineering Congress, Japan   2015   
This paper presents a development of a method and a system for on-machine measurement of horizontal and vertical motion errors of a carriage slide in a machine tool and form errors of roll dies including deformation due to gravity. Conventional re...
Ito So, Sekine Sho, Shimizu Yuki, Gao Wei, Takahashi Kazuhiko, Arakawa Kunmei, Yamamoto Taiga, Kubota Kouji
The Proceedings of Mechanical Engineering Congress, Japan   2015   
This paper presents the development of the contact-type displacement probe with low measuring force for the profile measurement of the cutting edge on-machine and non-damaging. This probe is consisted of a triangulation-based laser displacement se...
清水裕樹, 大場裕太, GAO Wei
精密工学会大会学術講演会講演論文集   1 Sep 2014   
JANG SungHo, 清水裕樹, GAO Wei
日本機械学会東北支部総会・講演会講演論文集(CD-ROM)   14 Mar 2014   
LI Xinghui, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集(CD-ROM)   14 Mar 2014   
伊藤武志, LI Xinghui, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2014   
清水裕樹, JANG SungHo, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2014   
村田大, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2014   
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2014   
JANG SungHo, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch   2014   
清水裕樹, 伊藤武志, LI Xinghui, KIM WooJae, GAO Wei
砥粒加工学会学術講演会講演論文集(CD-ROM)   2014   
LI Xinghui, SHIMIZU Yuki, ITO So, GAO Wei
The Proceedings of Conference of Tohoku Branch   2014   
JIA Zhigang, HOSOBUCHI Keiichiro, ITO So, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch   2014   
Jacob W. Chesna, Jacob W. Chesna, Yuki Shimizu, Yuki Shimizu, Richard K. Leach
Proceedings of the 28th Annual Meeting of the American Society for Precision Engineering, ASPE 2013   26 Dec 2013   
Gaofa He, Gaofa He, Zhigang Jia, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   16 Dec 2013   
For measuring the surface profile of many micro-optical components which are made of non-conductive material, such as diffractive grating and Fresnel lens, with complicated shapes on their surfaces, the electrostatic force microscopy (EFM) was rec...
接触型マイクロ熱検知センサによるナノ平滑面微欠陥検出に関する研究
大場裕太,盧文剣,高偉
精密工学会秋季大会   13 Sep 2013   
清水裕樹, 大場裕太, LU Wenjian, GAO Wei
精密工学会大会学術講演会講演論文集   28 Aug 2013   
Feasibility study on the concept of thermal contact sensor for nanometer-level defect inspections on smooth surfaces
Wenjian LU, Yuta OHBA and Wei GAO
THE 11th INTERNATIONAL SYMPOSIUM OF MEASUREMENT TECHNOLOGY ANDINTELLIGENT INSTRUMENTS   1 Jul 2013   
Zhigang Jia, Shigeaki Goto, Keiichiro Hosobuchi, So Ito, Yuki Shimizu, Wei Gao
Proceedings of SPIE - The International Society for Optical Engineering   12 Apr 2013   
This paper presents the analysis of a prototype scanning electrostatic force microscope (SEFM) system developed for noncontact surface profile measurement. In the SEFM system, with a dual height method, the distance between the probe tip and the s...
Xinghui Li, Yuki Shimizu, So Ito, Wei Gao, Lijiang Zeng
Proceedings of SPIE - The International Society for Optical Engineering   12 Apr 2013   
To fabricate a scale grating for a surface encoder in a cost-effective way, a blue laser diode with a wavelength of 405 nm is employed in a Lloyd's mirror interferometer to carry out interference lithography (IL) of the grating. The beams from the...
細渕啓一郎, JIA Zhigang, 伊東聡, 清水裕樹, HE Gaofa, GAO Wei
日本機械学会東北支部総会・講演会講演論文集   15 Mar 2013   
大澤慎一, 関根匠, 伊東聡, 清水裕樹, GAO Wei, 久保田晃史, 加藤明, 荒川訓明, 安竹睦実
日本機械学会東北支部総会・講演会講演論文集   15 Mar 2013   
目黒孝幸, 松浦大貴, 清水裕樹, 伊東聡, GAO Wei, 足立茂, 大宮恭平
日本機械学会東北支部総会・講演会講演論文集   15 Mar 2013   
村田大, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   27 Feb 2013   
OSAWA Shinichi, SEKINE Sho, ITO So, SHIMIZU Yuki, GAO Wei, KUBOTA Kouji, KATO Akira, ARAKAWA Kuniaki, YASUTAKE Mutsumi
The Proceedings of Conference of Tohoku Branch   2013   
Meguro Takayuki, Matsuura Daiki, Shimizu Yuki, Ito So, Gao Wei, Adachi Shigeru, Omiya Kyohei
The Proceedings of Conference of Tohoku Branch   2013   
HOSOBUCHI Keiichiro, JIA Zhigang, ITO So, SHIMIZU Yuki, HE Gaofa, GAO Wei
The Proceedings of Conference of Tohoku Branch   2013   
LU Wenjian, OHBA Yuta, SHIMIZU Yuki, GAO Wei
The Proceedings of Conference of Tohoku Branch   2013   
J. Xu, Y. Shimizu, J. Liu, T. Shiramatsu, M. Furukawa, J. Li, H. Kohira
2012 Digest APMRC - Asia-Pacific Magnetic Recording Conference: A Strong Tradition. An Exciting New Look!   1 Dec 2012   
Pit detection study of a thermal contact sensor was carried out by both experiments and simulation. The experimental results showed that the thermal contact sensor was able to detect a small pit with good sensitivity. And the simulation study reve...
Kang Won Lee, So Ito, Yuki Shimizu, Wei Gao, Katsutoshi Tanaka, Masahiko Fukuta, Yoshiaki Kai
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings   30 Jul 2012   
This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for...
Yuki Shimizu, Sungho Jang, Takemi Asai, So Ito, Wei Gao
2012 IEEE I2MTC - International Instrumentation and Measurement Technology Conference, Proceedings   30 Jul 2012   
In this paper, a scanning-light method is proposed to evaluate the form of the tool cutting edge in a wide range up to several millimeters. An optical system, which consists of a photo diode, a laser diode unit and an objective lens, was developed...
後藤成晶, 清水裕樹, LEE JungChul, 伊東聡, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明
精密工学会誌   5 Jul 2012   
Design of a Micro-sized Thermal Contact Sensor for Inspection of Surface Defects
Yuki Shimizu, Wenjian Lu, and Wei Gao
3rd International Conference on Nanomanufacturing (nanoMan2012)   Jul 2012   
ヘッド組み込み型熱検知センサを用いた磁気ディスク表面のナノ微小欠陥検出技術
清水 裕樹,徐 鈞国,小平英一
トライボロジー会議 2012 春   May 2012   
A scanning-light method for inspection of tool cutting edge
Yuki Shimizu, SungHo Jang, Takemi Asai, So Ito, Wei Gao
2012 IEEE International Instrumentation and Measurement Technology Conference   May 2012   
東豊大, 丹羽英二, PENG Yuxin, 金子純史, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集   13 Mar 2012   
JANG SungHo, 清水裕樹, 伊東聡, GAO Wei
日本機械学会東北支部総会・講演会講演論文集   13 Mar 2012   
細野幸治, KIM Woojae, 清水裕樹, 伊東聡, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2012   
後藤成晶, 細渕啓一郎, 伊東聡, 清水裕樹, GAO Wei
精密工学会大会学術講演会講演論文集   1 Mar 2012   
武藤啓志, 後藤成晶, 細野幸治, 清水裕樹, GAO Wei, 足立茂, 大宮恭平, 佐藤広規, 久田哲弥, 齋藤佳史, 久保田浩明
精密工学会大会学術講演会講演論文集   1 Mar 2012   

Research Grants & Projects

 
熱検知接触型センサによるウェハ表面欠陥の高感度検出技術に関する研究
Grant-in-Aid for Scientific Research
Project Year: Feb 2011 - Today
超精密加工用ダイヤモンド工具刃先のナノ・マイクロ摩耗定量評価技術の開発
Project Year: Apr 2012 - Today
次世代超精密移動ステージ角度誤差計測用高精度3軸レーザオートコリメータの研究
Grant-in-Aid for Scientific Research
Project Year: Apr 2012 - Mar 2015
超高精度ナノグリッド基準と光絶対スケールコムの創出が拓く精密光計測フロンティア
Grant-in-Aid for Scientific Research
Project Year: Apr 2015 - Mar 2020
微空間で精密に創成した高安定ナノ熱収支場による次世代超平滑面の非接触高速欠陥評価
Grant-in-Aid for Scientific Research
Project Year: Apr 2015 - Mar 2018

Social Contribution

 
夏休み子ども科学キャンパス
[Others]  30 Jul 2014 - 31 Jul 2014
市内の小学校6年生を対象に,「不思議なうすい板で発電してみよう」と題して,簡単な電子工作を含む体験型学習教室の運営に講師として参加.
夏休み子ども科学キャンパス
[Others]  30 Jul 2013 - 31 Jul 2013
市内の小学校6年生を対象に,「君のアイディアでいろんなものを測ってみよう」と題して,鉄道線路等々,身近なものの形状をはかる体験型学習教室の運営に講師として参加.
夏休み子ども科学キャンパス
[Others]  30 Jul 2012 - 31 Jul 2012
市内の小学校6年生を対象に,「君のアイディアでいろんなものを測ってみよう」と題して,鉄道線路等々,身近なものの形状をはかる体験型学習教室の運営に講師として参加.

Others

 
Mar 2016   ミリメートル級の長ストローク駆動におけるナノレベル位置決めを実現する超精密3軸XYZマイクロステージの開発
医療・バイオテクノロジーや精密計測・加工の分野において要求される,限られたスペース内での精密位置決めの実現を目的として,従来比1/10のサイズを有するコンパクト(縦横サイズ25 mm×25 mm)なナノ位置決め用マイクロステージを開発する.永久磁石を用いた独自のステージプレート保持機構を適用するとともに,ステージ案内機構である微小板バネ表面に新たに直接形成する高感度Cr-Nひずみゲージを変位検出センサとして活用し,独創的なステージシステム構成とする.これにより,与圧機構等を必要としないコンパクトな形態での2軸フィードバック制御を可能とし,同サイズ従来品の10倍以上であるXY各軸方向ストローク1 mmを,位置決め分解能10 nmを維持したまま実現する.更に,2軸XYマイクロステージに新たにZ軸移動機構を付与した,3軸XYZマイクロステージの開発を試み,その有効性を実証するとともに,本提案手法のメカトロニクス技術への波及効果を狙う.
Apr 2015   次世代ナノ位置決めステージを実現する超精密姿勢計測センサの開発
本研究では,受光素子アクティブ制御を適用したレーザー角度センサによる,超高分解能(0.001"以上)・広測定レンジ(±1000")実現を目指す.受光素子アクティブ制御機構を含む1軸角度測定用プロトタイプ光学系を構築し,その有効性を実証する.
Oct 2012   超精密加工用ダイヤモンド工具刃先のナノ・マイクロ摩耗定量評価技術の開発
シングルポイントダイヤモンド切削工具による超精密加工について,更なる加工精度の向上を目指し,mmオーダの広いスケールに渡る,nmオーダ分解能の高速工具輪郭形状定量評価技術の確立に向けた研究開発に取り組む.