Effects of electron beam irradiation on an aluminophosphate microporous material, AlPO4-5 with AFI type framework structure, and its damage processes under the electron beam accelerated by 300 kV were investigated. The successive series of the electron diffraction patterns taken along [001] direction from the same area of the specimen revealed that about 6 C/cm(2) total dose on the sample enhances the vitrification of the AlPO4-5 structure. HRTEM images after 2.5 C/cm(2) total dose already show that the electron beam damage partly becomes more apparent and generates the structural distortion. (C) 2013 Elsevier B.V. All rights reserved.