2002年9月
Effect of laser irradiation on the properties of indium tin oxide films deposited at room temperature by pulsed laser deposition
VACUUM
- ,
- ,
- ,
- ,
- ,
- 巻
- 67
- 号
- 2
- 開始ページ
- 209
- 終了ページ
- 216
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1016/S0042-207X(02)00172-0
- 出版者・発行元
- PERGAMON-ELSEVIER SCIENCE LTD
Indium. tin oxide (ITO) thin films 60-100 nm thick have been grown on SiO2 glass by laser irradiation of the substrate during pulsed laser deposition. A laser beam with an energy density of 0.07 was directed on to the middle part of the substrates during film growths. Films were deposited from a 95 wt% In2O3-5 wt% SnO2 sintered ceramic target at a room temperature and oxygen pressures (P-O2) ranging from 0.13 to 5.99 Pa. The structural, electrical, and optical properties of the laser-irradiated and the nonirradiated parts of the films were studied as a function of P-O2. Crystalline ITO films with <1 1 1> preferred orientation were observed at all P-O2, except 0.13 Pa. Under P-O2 around 1.33 Pa, minimal resistivities of 1.2 x 10(-4) and 2.3 x 10(-4) Omega CM were obtained on the laser irradiated and the nonirradiated parts of the deposited films. The observed low resistivity for the laser-irradiated part of the films was a consequence of both the high carrier concentration and Hall mobility of the films. High optical transmittance (> 85%) to visible light was obtained. (C) 2002 Elsevier Science Ltd. All rights reserved.
- リンク情報
-
- DOI
- https://doi.org/10.1016/S0042-207X(02)00172-0
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000178464000006&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=0037072596&origin=inward
- ID情報
-
- DOI : 10.1016/S0042-207X(02)00172-0
- ISSN : 0042-207X
- SCOPUS ID : 0037072596
- Web of Science ID : WOS:000178464000006