MEKARU Harutaka

J-GLOBAL         Last updated: Nov 19, 2019 at 09:52
 
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Name
MEKARU Harutaka
Affiliation
National Institute of Advanced Industrial Science and Technology
Section
Nanoimprint Manufacturing Technology Group, Advanced Manufacturing Research Institute
Job title
Researcher
Degree
Doctor of philosophy(science)(The Graduate University for Advanced Studies)

Research Areas

 
 

Academic & Professional Experience

 
1999
   
 
Toyota Institute of physics and chemistry, fellow ship
 
1999
 - 
2000
Institute for molecular science, fellow ship
 
2000
 - 
2005
University of Hyogo (Himeji Institute of Technology), Reaserch associate
 

Education

 
 
 - 
1999
Department of Structural Molecular Science, Graduate School, Division of Mathematical and Physical Science, The Graduate University for Advanced Studies
 
 
 - 
1994
Department of Mechanical Engineering System, Faculty of Engineering, Utsunomiya University
 

Awards & Honors

 
1998
The 4th presentation encouragement prize of the Japane Society of Applied Physics
 
2005
Best presentation prize in the spring symposium of the Japan Cociety for Precision Engineering
 
2006
Outstanding Poster Award of International MEMS Conference 2006
 

Published Papers

 
Harutaka Mekaru
International Journal of Adhesion and Adhesives   84 394   Aug 2018   [Refereed]
Harutaka Mekaru, Akitaka Yoshigoe, Michihiro Nakamura, Tomohiro Doura, Fuyuhiko Tamanoi
ACS Applied Nano Materials   2(1) 479   Jan 2019   [Refereed]
Mekaru Harutaka
Japanese Journal of Applied Physics   56(6)    2017   [Refereed]
Mekaru Harutaka
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   23(5) 1309-1318   2017   [Refereed]
Mekaru Harutaka, Yano Takayuki
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   23(7) 2707-2717   2017   [Refereed]
Mekaru Harutaka
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   22(2) 329-336   2016   [Refereed]
Harutaka Mekaru
New Trends in Alloy Development, INTECH      Sep 2015   [Refereed]
Mekaru Harutaka
Japanese Journal of Applied Physics   54(6)    2015   [Refereed]
Mekaru Harutaka
Microelectronic Engineering   143 15-20   2015   [Refereed]
Mekaru Harutaka
Micromachines   6(2) 252-265   2015   [Refereed]
Mekaru Harutaka, Lu Jie, Tamanoi Fuyuhiko
Advanced Drug Delivery Reviews   95 40-49   2015   [Refereed]
Mekaru Harutaka
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   20(6) 1103-1109   2014   [Refereed]
LAP LAMBERT Academic Publishing      Nov 2013   [Refereed]
高木 秀樹, 大友 明宏, 銘苅 春隆, 小久保 光典, 後藤 博史
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society      Apr 2013   [Refereed]
Mekaru Harutaka, Hiroshima Hiroshi
Japanese Journal of Applied Physics   52(6)    2013   [Refereed]
Optical Fibers, Nova Science Publishers      2013   [Refereed]
Mekaru Harutaka, Hiroshima Hiroshi
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   19(4) 599-608   2013   [Refereed]
Mekaru Harutaka, Ohtomo Akihiro, Takagi Hideki, Kokubo Mitsunori, Goto Hiroshi
Microelectronic Engineering   110 156-162   2013   [Refereed]
Mekaru Harutaka, Okuyama Chieko, Ueno Akihisa
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   19(3) 315-323   2013   [Refereed]
Mekaru Harutaka, Ohtomo Akihiro, Takagi Hideki
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   19(3) 325-333   2013   [Refereed]
大友 明宏, 銘苅 春隆, 高木 秀樹, 小久保 光典, 後藤 博史
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society      Feb 2012   [Refereed]
Mekaru Harutaka, Ohtomo Akihiro, Takagi Hideki, Kokubo Mitsunori, Goto Hiroshi
Microelectronic Engineering   98 171-175   2012   [Refereed]
Mekaru Harutaka, Yano Takayuki
Japanese Journal of Applied Physics   51(6)    2012   [Refereed]
Mekaru Harutaka, Hiroshima Hiroshi
Microelectronic Engineering   97 43-47   2012   [Refereed]
Ohtomo Akihiro, Kokubo Mitsunori, Goto Hiroshi, Mekaru Harutaka, Takagi Hideki
Journal of Vacuum Science & Technology B   30(6)    2012   [Refereed]
Mekaru Harutaka, Okuyama Chieko, Ueno Akihisa
Journal of Vacuum Science & Technology B   30(6)    2012   [Refereed]
大友 明宏, 銘苅 春隆, 高木 秀樹, 小久保 光典, 後藤 博史
電気学会論文誌. E, センサ・マイクロマシン準部門誌 = The transactions of the Institute of Electrical Engineers of Japan. A publication of Sensors and Micromachines Society      Jul 2011   [Refereed]
銘苅 春隆
光アライアンス      Jan 2011   [Refereed]
Mekaru Harutaka, Takagi Hideki, Ohtomo Akihiro, Kokubo Mitsunori, Goto Hiroshi
Journal of Vacuum Science & Technology B   29(6)    2011   [Refereed]
Mekaru Harutaka, Hiroshima Hiroshi
Japanese Journal of Applied Physics   50(6)    2011   [Refereed]
Mekaru Harutaka, Ohtomo Akihiro, Takagi Hideki, Kokubo Mitsunori, Goto Hiroshi
Microelectronic Engineering   88(8) 2059-2062   2011   [Refereed]
Harutaka Mekaru
Lithography, INTECH      Feb 2010   [Refereed]
An ultrasonic hot embossing was proposed as a new and precise replication technology where the effect of assistance of ultrasonic vibration in hot embossing was experimentally verified. It was found that the contact time and contact force decrease...
銘苅 春隆, 奥山 千枝子, 上野 昭久, 高橋 正春
精密工学会学術講演会講演論文集      2010   [Refereed]
銘苅 春隆, 小林 健, 伊藤 寿浩
精密工学会学術講演会講演論文集      2010   [Refereed]
銘苅 春隆, 高橋 正春, 福島 絵理
精密工学会学術講演会講演論文集      2010   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Japanese Journal of Applied Physics   49(6)    2010   [Refereed]
Mekaru Harutaka, Fujimaki Makoto, Awazu Koichi, Takahashi Masaharu
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   16(8-9) 1339-1346   2010   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Journal of Vacuum Science & Technology B   28(6) C6M114-C6M121   2010   [Refereed]
Mekaru Harutaka, Koizumi Osamu, Ueno Akihisa, Takahashi Masaharu
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   16(8-9) 1323-1330   2010   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Journal of Vacuum Science & Technology a   28(4) 706-712   2010   [Refereed]
Mekaru Harutaka, Koizumi Osamu, Ueno Akihisa, Takahashi Masaharu
Microelectronic Engineering   87(5-8) 922-926   2010   [Refereed]
Lee Dongkeon, Mekaru Harutaka, Hiroshima Hiroshi, Matsumoto Sohei, Itoh Toshiro, Takahashi Masaharu, Maeda Ryutaro
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   16(8-9) 1399-1411   2010   [Refereed]
銘苅 春隆
超音波TECHNO      Nov 2009   [Refereed]
銘苅 春隆, 高橋 正春
精密工学会学術講演会講演論文集      2009   [Refereed]
銘苅 春隆, 奥山 千枝子, 土田 智之, 安井 学, 北谷 武, 山下 満, 上柿 順一, 高橋 正春
精密工学会学術講演会講演論文集      2009   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Journal of Vacuum Science & Technology a   27(4) 785-792   2009   [Refereed]
Mekaru Harutaka, Fukushima Eri, Hiyama Yoshihito, Takahashi Masaharu
Journal of Vacuum Science & Technology B   27(6) 2814-2819   2009   [Refereed]
Mekaru Harutaka, Okuyama Chieko, Ueno Akihisa, Takahashi Masaharu
Journal of Vacuum Science & Technology B   27(6) 2820-2825   2009   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
International Journal of Precision Engineering and Manufacturing   10(1) 79-83   2009   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Journal of Micromechanics and Microengineering   19(12)    2009   [Refereed]
Mekaru Harutaka, Kusumi Shinji, Sato Noriaki, Shimizu Masami, Yamashita Michiru, Shfmada Osamu, Hattori Tadashi
Electrical Engineering in Japan   166(1) 43-51   2009   [Refereed]
Mekaru Harutaka, Okuyama Chieko, Tsuchida Tomoyuki, Yasui Manabu, Kitadani Takeshi, Yamashita Michiru, Uegaki Jun-ichi, Takahashi Masaharu
Japanese Journal of Applied Physics   48(6)    2009   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro
Journal of Micro-Nanolithography Mems and Moems   8(3)    2009   [Refereed]
Lee Dongkeon, Mekaru Harutaka, Hiroshima Hiroshi, Matsumoto Sohei, Itoh Toshihiro, Takahashi Masaharu, Maeda Ryutaro
Microelectronic Engineering   86(4-6) 920-924   2009   [Refereed]
Mekaru Harutaka, Takahashi Masaharu
Japanese Journal of Applied Physics   47(6) 5178-5184   2008   [Refereed]
Mekaru Harutaka, Tsuchida Tomoyuki, Uegaki Jun-ichi, Yasui Manabu, Yamashita Michiru, Takahashi Masaharu
Microelectronic Engineering   85(5-6) 873-876   2008   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro
Journal of Micro-Nanolithography Mems and Moems   7(1)    2008   [Refereed]
Mekaru Harutaka, Noguchi Toshihiko, Goto Hiroshi, Takahashi Masaharu
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   14(9-11) 1325-1333   2008   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro
Device and Process Technologies For Microelectronics, Mems, Photonics and Nanotechnology Iv   6800    2008   [Refereed]
Mekaru Harutaka, Takano Takayuki, Ukita Yoshiaki, Utsumi Yuichi, Takahashi Masaharu
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   14(9-11) 1335-1342   2008   [Refereed]
諸貫 信行, 桝田 正美, 太田 稔
微細加工と表面機能 : ナノ・マイクロ構造による光学、摩擦、ぬれ等の機能実現、リアライズアドバンストテクノロジー社      May 2007   [Refereed]
銘苅 春隆, 高野 貴之, 粟津 浩一, 前田 龍太郎
電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society      Feb 2007   [Refereed]
銘苅 春隆, 久住 真治, 佐藤 憲昭, 清水 正巳, 山下 満, 嶋田 修, 服部 正
電気学会論文誌. C, 電子・情報・システム部門誌 = The transactions of the Institute of Electrical Engineers of Japan. C, A publication of Electronics, Information and System Society      Feb 2007   [Refereed]
銘苅 春隆, 高木 秀樹, 廣島 洋, 高橋 正春
精密工学会学術講演会講演論文集      2007   [Refereed]
銘苅 春隆, 高野 貴之, 粟津 浩一, 高橋 正春, 前田 龍太郎
精密工学会学術講演会講演論文集      2007   [Refereed]
銘苅 春隆, 北谷 武, 山下 満, 高橋 正春
精密工学会学術講演会講演論文集      2007   [Refereed]
Mekaru H, Takahashi M.
Microprocesses and Nanotechnology 2007, Digest of Papers   300-+   2007   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro
Emerging Lithographic Technologies Xi, Pts 1 and 2   6517    2007   [Refereed]
Mekaru Harutaka, Noguchi Toshihiko, Goto Hiroshi, Takahashi Masaharu
Japanese Journal of Applied Physics Part 1-Regular Papers Brief Communications & Review Papers   46(9B) 6355-6362   2007   [Refereed]
Mekaru Harutaka, Kitadani Takeshi, Yamashita Michiru, Takahashi Masaharu
Journal of Vacuum Science & Technology a   25(4) 1025-1028   2007   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro, IEEE
2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3   161-165   2007   [Refereed]
Mekaru Harutaka, Kusumi Shinji, Sato Noriaki, Shimizu Masami, Yamashita Michiru, Shimada Osamu, Hattori Tadashi
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   13(3-4) 393-402   2007   [Refereed]
Mekaru Harutaka, Takano Takayuki, Awazu Koichi, Takahashi Masaharu, Maeda Ryutaro
Journal of Vacuum Science & Technology B   25(6) 2196-2201   2007   [Refereed]
Mekaru Harutaka, Goto Hiroshi, Takahashi Masaharu
Microelectronic Engineering   84(5-8) 1282-1287   2007   [Refereed]
Mekaru Harutaka, Nakamura Osamu, Maruyama Osamu, Maeda Ryutaro, Hattori Tadashi
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   13(3-4) 385-391   2007   [Refereed]
Mochizuki Hiroaki, Mekaru Harutaka, Kusumi Shinji, Sato Noriaki, Shimizu Masami, Yamashita Michiru, Shimada Osamu, Hattori Tadashi
Microsystem Technologies-Micro-and Nanosystems-Information Storage and Processing Systems   13(5-6) 547-550   2007   [Refereed]
Ezoe Yuichiro, Koshiishi Masaki, Mita Makoto, Mitsuda Kazuhisa, Ishisaki Yoshitaka, Hoshino Akio, Yang Zhen, Takano Takayuki, Mekaru Harutaka, Maeda Ryutaro
Space Telescopes and Instrumentation II: Ultraviolet to Gamma Ray, Pts 1 and 2   6266 B2661   2006   [Refereed]
Idei K, Mekaru H, Takeda H, Hattori T
Jsme International Journal Series a-Solid Mechanics and Material Engineering   49(1) 69-73   2006   [Refereed]
前田 龍太郎, 後藤 博史, 廣島 洋, 粟津 浩一, 銘刈 春隆, 高橋 正春(電子工学)
ナノインプリントのはなし、日刊工業新聞社      Dec 2005   [Refereed]
銘苅 春隆, 久住 真治, 佐藤 憲昭, 清水 正巳, 山下 満, 嶋田 修, 服部 正
精密工学会学術講演会講演論文集      2005   [Refereed]
内海 裕一, 岸本 武文, 銘苅 春隆
日本設備管理学会誌   16(1) 20-26   May 2004   [Refereed]
銘苅 春隆, 中村 修, 丸山 修
日本設備管理学会誌      May 2004   [Refereed]
内海 裕一, 岸本 武文, 銘苅 春隆, 服部 正
日本機械学会 機素潤滑設計部門講演会講演論文集      Apr 2004   [Refereed]
出井 一義, 銘苅 春隆, 福田 義博, 竹田 博昭, 服部 正
日本機械学会 機素潤滑設計部門講演会講演論文集      Apr 2004   [Refereed]
佐藤 憲昭, 清水 正巳, 銘苅 春隆, 久住 真治, 山下 満, 嶋田 修, 服部 正
日本機械学会 機素潤滑設計部門講演会講演論文集      Apr 2004   [Refereed]
銘苅 春隆, 服部 正, 中村 修
超音波TECHNO   16(1) 65-69   Jan 2004   [Refereed]
銘苅春隆, 中村 修, 服部 正, 丸山 修
日本機械学会 機素潤滑設計部門講演会講演論文集, 2004   71-72   2004   [Refereed]
内海 裕一, 岸本 武文, 銘苅 春隆, 服部 正
精密工学会学術講演会講演論文集      2004   [Refereed]
銘苅 春隆, 久住 真治, 佐藤 憲昭, 山下 満, 嶋田 修, 服部 正
精密工学会学術講演会講演論文集      2004   [Refereed]
久住 真治, 佐藤 憲昭, 銘苅 春隆, 山下 満, 嶋田 修, 服部 正
日本機械学会 機械材料・材料加工技術講演会講演論文集      Oct 2003   [Refereed]
銘苅 春隆, 中村 修, 丸山 修, 出井 一義, 服部 正
精密工学会学術講演会講演論文集      2003   [Refereed]
Shan XC, Maeda R, Ikehara T, Mekaru H, Hattori T
Nano- and Microtechnology: Materials, Processes, Packaging, and Systems   4936 356-364   2002   [Refereed]
Hattori T, Mekaru H, Utsumi Y
Review of Scientific Instruments   73(3) 1376-1378   2002   [Refereed]
木村 哲平, 銘苅 春隆, 服部 正
日本機械学会 機械材料・材料加工技術講演会講演論文集      Nov 2001   [Refereed]
植田 寛康, 才木 常正, 銘苅 春隆, 内海 裕一, 服部 正
日本機械学会 機械材料・材料加工技術講演会講演論文集      Nov 2001   [Refereed]
銘苅 春隆, 内海 裕一, 服部 正
日本機械学会 機械材料・材料加工技術講演会講演論文集   2001(9) 371-372   Nov 2001   [Refereed]
Nonogaki Y, Gao Y, Mekaru H, Miyamae T, Urisu T
Journal of Electron Spectroscopy and Related Phenomena   119(2-3) 241-246   2001   [Refereed]
Imaizum Y, Mekaru H, Urisu T
Applied Organometallic Chemistry   13(3) 195-200   Mar 1999   [Refereed]
銘苅 春隆 AND メカル ハルタカ AND Harutaka MEKARU
   1999   [Refereed]
本研究では、シンクロトロン放射光を励起光源として用いた光化学反応プロセスの実験を行う目的で、分子科学研究所極端紫外光実験施設(UVSOR)に、放射光励起反応プロセスへ応用できる光フラックスな波長可変分光ビームラインを新たに開発・建設し、その出力光特性の評価を行った後、有機アルミニウムガスを用いた具体的な放射光励起化学反応プロセスに応用した。この放射光励起反応プロセス用ビームラインは、前置鏡1枚で集光し、多層膜ミラー分光器を組み込んでいる点が特徴である。シンクロトロン放射光は連続的な波長を持...

Misc

 
IOP Journal of Physics: Conference Series   34, 859-864    2006
JSME International Journal A   49(1), 74-78    2006
Japanese Journal of Applied Physics   44, 5749-5754    2005
Microsystem Technologies   10, 682-688    2004

Books etc

 
New Trends in Alloy Development Characterization and Application
MEKARU Harutaka (Part:Contributor, Application of Ni-P Alloys to A Mold Material for Thermal Imprinting on Pyrex Glass)
INTECH   Sep 2015   
Immersion Nanoimprint Lithography
MEKARU Harutaka
LAP LAMBERT Academic Publishing   Nov 2013   
Optical Fibers: New Developments
MEKARU Harutaka (Part:Contributor, Microfabrication on the Surface of Optical Fibers for the Next-generation of MEMS Devices)
Nova Science Publishers   2013   
Lithography
MEKARU Harutaka (Part:Contributor, Effect of Applying Ultrasonic Vibration in Hot Embossing and Nanoimprint)
INTECH   Feb 2010   

Works

 
1 year Local New Consortium Project supported by Ministry of Economy, Trade and Industry
2001
3 years Local New Consortium Project supported by Ministry of Economy, Trade and Industry
2001 - 2004
Grant-in-Aid for Scientific Research (KAKENHI) supported by Ministry of Education, Culture, Sports, Science and Technology (MEXT)
2001 - 2004
Scientific Research (A) supported by Ministry of Education, Culture, Sports, Science and Technology
2001 - 2002
2 years Local New Consortium Project supported by Ministry of Economy, Trade and Industry
2002 - 2005

Research Grants & Projects

 
Synchrotron Radiation Stimulated Process
photo-CVD using synchrotron radiation
LIGA Process
Fabrication of 3D X-ray mask and micromold using FIB
Public/Private Cooperative Joint Researches
Project Year: 2005   
Nanoimprint and nano-transfer assisted by ultrasonic vibration
Public/Private Cooperative Joint Researches
Project Year: 2005