MISC

2003年7月

Design and fabrication of double-cavity tunable filter using micromachined structure

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS
  • W Janto
  • ,
  • T Amano
  • ,
  • F Koyama
  • ,
  • A Matsutani
  • ,
  • T Kondo
  • ,
  • M Arai

42
7B
開始ページ
L828
終了ページ
L830
記述言語
英語
掲載種別
DOI
10.1143/JJAP.42.L828
出版者・発行元
INST PURE APPLIED PHYSICS

We propose a micromachined tunable optical filter with a double-cavity structure, which exhibits a sharper and flatter filter response than a conventional single-cavity filter, resulting in lower interchannel crosstalk and lower insertion loss. The possibility of using widely tunable filters in 200-GHz-spacing wavelength-division-multiplexing (WDM) systems is presented. In addition, a lower tuning voltage can be achieved with thinner movable cantilevers. We have fabricated a double-cavity filter with 7.5-pair top, 23.5-pair middle and 3.5-pair bottom GaAs/GaAlAs multilayer mirrors. The filter provides a better shape factor of reflection spectra of 0.41 than a single-cavity filter.

リンク情報
DOI
https://doi.org/10.1143/JJAP.42.L828
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000184662400011&DestApp=WOS_CPL
ID情報
  • DOI : 10.1143/JJAP.42.L828
  • ISSN : 0021-4922
  • Web of Science ID : WOS:000184662400011

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