TABATA Osamu

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Name
TABATA Osamu
Affiliation
Kyoto University
Section
Graduate School of Engineering, Department of Micro Engineering, Graduate School of Engineering Department of Micro Engineering
Job title
Professor,Professor
Degree
Doctor of Engieering(Nagoya Institute of Technology)

Research Areas

 
 

Academic & Professional Experience

 
1981
 - 
1996
Researcher, Toyota Central Research
 
 
   
 
and Development Laboratories, Inc.,
 
 
   
 
Aichi, Japan.
 
1996
 - 
2000
Associate Professor, Department of
 
 
   
 
Mechanical Engineering, Ritsumeikan
 

Education

 
 
 - 
1993
Department of Industrial Engineering, Graduate School, Division of Engineering, Nagoya Institute of Technology
 
 
 - 
1979
Department of Instrumentation Engineering, Faculty of Engineering, Nagoya Institute of Technology
 

Awards & Honors

 
1988
Science News Award from Biomedical Engineering Society of Japan
 
1988
Presentation Paper Award from the Institute of Electrical Engineers of J
 
1993
R&D 100 Award from R&D Magazine for research
 
1993, 1998

Published Papers

 
Takumi Hayashi, Kenta Arima, Naoki Yamashita, Seongsu Park, Zhipeng Ma, Osamu Tabata, Kentaro Kawai
IEEE TRANSACTIONS ON NANOTECHNOLOGY   17(4)    Jul 2018   [Refereed]
Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
ELECTRICAL ENGINEERING IN JAPAN   204(2)    Jul 2018   [Refereed]
Wenlei Zhang, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
APPLIED SURFACE SCIENCE   443    Jun 2018   [Refereed]
Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
APPLIED SCIENCES-BASEL   8(6)    Jun 2018   [Refereed]
Zhipeng Ma, Yunfei Huang, Seongsu Park, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Hirofumi Yamada, Osamu Tabata
SMALL   14(1)    Jan 2018   [Refereed]
Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Shinji Ito, Junko Satoh, Atsuko Oka, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
RSC ADVANCES   7(58)    2017   [Refereed]
Naoki Yamashita, Zhipeng Ma, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
MICRO & NANO LETTERS   12(11)    Nov 2017   [Refereed]
Zhipeng Ma, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   56(6)    Jun 2017   [Refereed]
Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   56(6)    Jun 2017   [Refereed]
Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   56(6)    Jun 2017   [Refereed]
Hiromasa Yagyu, Jae-Young Lee, Do-Nyun Kim, Osamu Tabata
JOURNAL OF PHYSICAL CHEMISTRY B   121(19)    May 2017   [Refereed]
Effect of Localized Laser Treatment on Fatigue Performance of Single-Crystal Silicon Microstructures
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
SENSORS AND MATERIALS   28(2)    2016   [Refereed]
Kazuhiro Ban, Yoshikazu Hirai, Kazuya Tsujimoto, Akira Terao, Natsuhiko Mizutani, Tetsuo Kobayashi, Osamu Tabata
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A   34(6)    Nov 2016   [Refereed]
Toshiyuki Tsuchiya, Kenji Miyamoto, Koji Sugano, Osamu Tabata
ENGINEERING FRACTURE MECHANICS   163    Sep 2016   [Refereed]
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   11    Jun 2016   [Refereed]
Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   55(6)    Jun 2016   [Refereed]
Sahour Sayed, Mohammed Gamil, Ahmed Fath El-Bab, Koichi Nakamura, Toshiyuki Tsuchiya, Osamu Tabata, Ahmed Abd El-Moneim
SENSOR REVIEW   36(2)    Mar 2016   [Refereed]
Toshiyuki Tsuchiya, Yusuke Kogita, Akira Taniyama, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   25(1)    Feb 2016   [Refereed]
M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   22(2)    Feb 2016   [Refereed]
Surface roughness modification of free standing single crystal silicon microstructures using KrF excimer laser treatment for mechanical performance improvement
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
Journal of Surface Engineered Materials and Advanced Technology   5    2015   [Refereed]
ALA-induced fluorescence detection with photoresist-based microfluidic cell sorter for bladder cancer diagnosis
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
Sensors and Actuators B: Chemical   213    2015   [Refereed]
Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   24(6)    Dec 2015   [Refereed]
Akio Uesugi, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
MICRO & NANO LETTERS   10(12)    Dec 2015   [Refereed]
Nader A. Mansour, Ahmed M. R. Fath El-Bab, Samy F. M. Assal, Osamu Tabata
MECHATRONICS   31    Oct 2015   [Refereed]
Zhipeng Ma, Young-Joo Kim, Seongsu Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Do-Nyun Kim, Osamu Tabata
Micro & Nano Letters   10(10)    Oct 2015   [Refereed]
K. Sugano, A. Nakata, T. Tsuchiya, O. Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   25(8)    Aug 2015   [Refereed]
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Yoshihiko Hirao, Osamu Tabata
SENSORS AND ACTUATORS B-CHEMICAL   213    Jul 2015   [Refereed]
Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   54(6)    Jun 2015   [Refereed]
Effect of localized KrF excimer laser treatment on fracture behaviors of freestanding and single crystal silicon beams
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
Microsystem Technologies      Jan 2015   [Refereed]
High-temperature tensile testing machine for investigation of brittle-ductile transition behaviour of single crystal silicon microstructure
Akio Uesugi, akahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
Japanese Journal of Applied Physics   54(6S1)    Jan 2015   [Refereed]
Graphene-Based Strain Gauge on a Flexible Substrate
Mohammed Gamil, Hassan Nageh, Ingy Bkrey, Sahour Sayed, Ahmed M. R. Path El-Bab, Koichi Nakamura, Osamu Tabata, Ahmed Abd El-Moneim
SENSORS AND MATERIALS   26(9)    2014   [Refereed]
M. Gamil, O. Tabata, K. Nakamura, A.M.R.P. El-Bab, A. Abd El-Moneim
Key Engineering Materials   605    2014   [Refereed]
Study on Vibration-coupling Control of Out-of-plane Coupled Resonator for Anti-shock Tuning Fork Gyroscopes
S. T. Praveen, K. Sugano, T. Tsuchiya, O. Tabata
電気学会論文誌E   134-E    2014   [Refereed]
Mohamed E. Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, Sherif Sedky
JAPANESE JOURNAL OF APPLIED PHYSICS   53(6)    Jun 2014   [Refereed]
Praveen Singh Thakur, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   20(3)    Mar 2014   [Refereed]
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   20(3)    Mar 2014   [Refereed]
M. Gamil, K. Nakamura, A.M.R.P. El-Bab, O. Tabata, A. Abd El- Moneim
Modeling and Numerical Simulation of Material Science   3    2013   [Refereed]
Kazuya Tsujimoto, Kazuhiro Ban, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Natsuhiko Mizutani, Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   23(11)    Nov 2013   [Refereed]
Longhai Li, Xiaojun Tian, Zaili Dong, Lianqing Liu, Osamu Tabata, Wen J. Li
MICRO & NANO LETTERS   8(10)    Oct 2013   [Refereed]
Ken-ichiro Kamei, Yoshikazu Hirai, Osamu Tabata
IEEE Nanotechnology Magazine   7(3)    Sep 2013   [Refereed]
Kazuya Tsujimoto, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
Electronics and Communications in Japan   96(5)    Apr 2013   [Refereed]
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   23(3)    Mar 2013   [Refereed]
Ken-ichiro Kamei, Yoshikazu Hirai, Momoko Yoshioka, Yoshihide Makino, Qinghua Yuan, Minako Nakajima, Yong Chen, Osamu Tabata
ADVANCED HEALTHCARE MATERIALS   2(2)    Feb 2013   [Refereed]
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
JAPANESE JOURNAL OF APPLIED PHYSICS   51(11)    Nov 2012   [Refereed]
Hiromasa Yagyu, Yoshikazu Hirai, Akio Uesugi, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
POLYMER   53(21)    Sep 2012   [Refereed]
Alex Man Ho Kwan, Sichao Song, Xing Lu, Lei Lu, Ying-Khai Teh, The Ying-Fei, Eddie Wing Cheung Chong, Yan Gao, William Hau, Fan Zeng, Man Wong, Chunmei Huang, Akira Taniyama, Yoshihide Makino, So Nishino, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   21(3)    Jun 2012   [Refereed]
Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   18(6)    Jun 2012   [Refereed]
Toshiyuki Tsuchiya, Yasutake Ura, Koji Sugano, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   21(3)    Jun 2012   [Refereed]
Ahmed M. R. Fath El Bab, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   21(3)    Jun 2012   [Refereed]
Fabrication of Gold Nanoparticle Pattern Using Combination of Self-Assembly and Two-Step Transfer
Koji Sugano, Takashi Ozaki, Toshiyuki Tsuchiya, Osamu Tabata
SENSORS AND MATERIALS   23(5)    2011   [Refereed]
Wen-Ming Zhang, Osamu Tabata, Toshiyuki Tsuchiya, Guang Meng
PHYSICS LETTERS A   375(32)    Jul 2011   [Refereed]
Masashi Sato, Shogo Tsuda, Isaku Kanno, Hidetoshi Kotera, Osamu Tabata
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS   17(5-7)    Jun 2011   [Refereed]
Mi Li, Lianqing Liu, Ning Xi, Yuechao Wang, Zaili Dong, Osamu Tabata, Xiubin Xiao, Weijing Zhang
BIOCHEMICAL AND BIOPHYSICAL RESEARCH COMMUNICATIONS   404(2)    Jan 2011   [Refereed]
Tensile Testing of Single-Crystal Silicon Thin Films at 600 degrees C Using Infrared Radiation Heating
Toshiyuki Tsuchiya, Tetsuro Ikeda, Akifumi Tsunematsu, Koji Sugano, Osamu Tabata
SENSORS AND MATERIALS   22(1)    2010   [Refereed]
A Closer Look at DNA Nanotechnology - A bridge between nanomaterials and a nanosystem
Osamu Tabata
IEEE Nanotechnology Magazine      Dec 2010   [Refereed]
Koji Sugano, Yuki Uchida, Osamu Ichihashi, Hideo Yamada, Toshiyuki Tsuchiya, Osamu Tabata
MICROFLUIDICS AND NANOFLUIDICS   9(6)    Dec 2010   [Refereed]
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   19(5)    Oct 2010   [Refereed]
Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   20(6)    Jun 2010   [Refereed]
T. Tsuchiya, Y. Yamaji, K. Sugano, O. Tabata
EXPERIMENTAL MECHANICS   50(4)    Apr 2010   [Refereed]
Toshiyuki Tsuchiya, Hiroyuki Hamaguchi, Koji Sugano, Osamu Tabata
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   4(3)    May 2009   [Refereed]
Toshiyuki Tsuchiya, Yasutake Ura, Tomoya Jomori, Koji Sugano, Osamu Tabata
JOURNAL OF MICRO-NANOLITHOGRAPHY MEMS AND MOEMS   8(1)    Jan 2009   [Refereed]
Micro/Nano Assembly as a Key to SENS (Synthetic Engineering for Nano Systems)
Osamu Tabata
ECS Transactions   16(15)    2008   [Refereed]
Design and Simulation of a Tactile Sensor for Soft-Tissue
Ahmed M. R. Fath El Bab, Tomohisa Tamura, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Mohamed E. H. Eltaib, Mohamed M. Sallam
電気学会センサ・マイクロマシン部門誌   128-E(5)    2008   [Refereed]
Hiromasa Yagyu, Osamu Tabata
APPLIED SURFACE SCIENCE   255(5)    Dec 2008   [Refereed]
Hiromasa Yagyu, Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   18(5)    May 2008   [Refereed]
Koji Sugano, Weiyu Sun, Toshiyuki Tsuchiya, Osamu Tabata
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   3(3)    May 2008   [Refereed]
Kenji Miyamoto, Tomoya Jornori, Koji Sugano, Osamu Tabata, Toshiyuki Tsuchiya
SENSORS AND ACTUATORS A-PHYSICAL   143(1)    May 2008   [Refereed]
U Uchida, K Sugano, T Tsuchiya, O Tabata, T Ikehara
128(5)    May 2008   [Refereed]
A Ishida, M Sato, W Yoshikawa, O Tabata
Smart Materials and Structures   16(5)    2007
Tactile sensor for compliance detection
Ahmed M. R. Fath El-Bab, Mohamed E. H. Eltaib, Mohamed M. Sallam, Osamu Tabata
SENSORS AND MATERIALS   19(3)    2007
Takashi Ozaki, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   16(3)    Jun 2007
Hiromasa Yagyu, Osamu Tabata
IEEJ TRANSACTIONS ON ELECTRICAL AND ELECTRONIC ENGINEERING   2(3)    May 2007
Yoshikazu Hirai, Yoshiteru Inamoto, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   17(2)    Feb 2007
Fabrication of Plastic Micro Tip Array using Laser Micromachining of Nanoparticles Dispersed Polymer and Micromolding
Yagyu Hiromasa, Hayashi Shigehiko, Osamu Tabata
IEEJ Transactions on Sensors and Micromachines   126(1)    2006   [Refereed]
Moving Mask Direct Photo-Etching (M2DPE) for 3D Micromachining of Polytetrafluoroethylene
Nakamura Yushi, Osamu Tabata
IEEJ Transactions on Sensors and Micromachines   126(7)    2006   [Refereed]
Hybrid Dynamic Coating with n-Dodecyl b-D-Maltoside and Methyl Cellulose for High-Performance Carbohydrate Analysis on Poly(methyl methacrylate) Chips
Dang Fuquan, Kakehi Kazuaki, Cheng Jingjun, Osamu Tabata, Kurokawa Masaya, Nakajima Kazuki, Ishikawa Mitsuru, Baba Yoshinobu
Anal. Chem   2006(78)    2006   [Refereed]
Y Hirai, S Hafizovic, N Matsuzuka, JG Korvink, O Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   15(1)    Feb 2006
F Dang, S Shinohara, O Tabata, Y Yamaoka, M Kurokawa, Y Shinohara, M Ishikawa, Y Baba
LAB ON A CHIP   5(4)    2005
Algorithm to Derive Optimal Mask and Movement Patterns in Moving Mask Deep X-ray Lithography (M2DXL)
Matsuzuka Naoki, Osamu Tabata
IEEJ Trans. SM   125(5)    2005   [Refereed]
N Matsuzuka, Y Hirai, O Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   15(11)    Nov 2005
Shape memory thin films formed with carrousel-type magnetron sputtering apparatus
A Ishida, M Sato, O Tabata, W Yoshikawa
SMART MATERIALS & STRUCTURES   14(5)    Oct 2005
H Yagyu, K Sugano, S Hayashi, O Tabata
JOURNAL OF MICROMECHANICS AND MICROENGINEERING   15(6)    Jun 2005
FQ Dang, O Tabata, M Kurokawa, AA Ewis, LH Zhang, Y Yamaoka, S Shinohara, Y Shinohara, M Ishikawa, Y Baba
ANALYTICAL CHEMISTRY   77(7)    Apr 2005
Moving Mask Direct Photo-Etching (M2DPE) for 3D Micromachining of Polytetrafluoroethylene
Nakamura Yushi, Osamu Tabata
Memoirs of SR Center   6    2004   [Refereed]
Simulation of Anisotropic Chemical Etching of Single Crystalline Silicon using Cellular-Automata
Kakinaga Takamitsu, Osamu Tabata, Baba Noriaki, Isono Yoshitada, J.G.Korvink, K.H.Ehrmann
電気学会論文誌E(センサ・マイクロマシン準部門誌)   124(1)    2004   [Refereed]
3-D Microfabrication Process by Double Exposure Method in Standard X-Ray Lithography
Matsuzuka Naoki, Hirai Yoshikazu, Osamu Tabata
Memoirs of SR Center   6    2004   [Refereed]
Micro Capillary Array Electrophoresis Chip by Moving Mask LIGA Technology
You Hui, Shinohara Shoji, Enami Kennichi, Shibata Shinsuke, Osamu Tabata, Shiraishi Haruki, Ueda Masanori, Baba Yoshinobu
International Journal of Information Acquisition   1(1)    2004   [Refereed]
H Yagyu, S Hayashi, O Tabata
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS   13(1)    Feb 2004
Deep X-ray Exposure System with Multistage for 3-D Microfabrication
You Hui, Matsuzuka Naoki, Yamaji Tadahiro, Osamu Tabata
Journal of Micromechatronics   2(1)    2003   [Refereed]
Algorithm for Analyzing Optimal Mask Movement Pattern in Moving Mask Deep X-ray Lithography (M2DXL)
Matsuzuka Naoki, Osamu Tabata
Memoirs of SR Center   5    2003   [Refereed]
Process Simulation System for 3D X-Ray Lithography and Development
123(9)    2003   [Refereed]
Development of Wearable Elements with Variable Stiffness
69(688-C)    2003   [Refereed]
Reduction of surface roughness and aperture size effect for etching of Si with XeF2
Koji Sugano, Osamu Tabata
Journal of Micromechanics and Microengineering   12    2002   [Refereed]
Ciliary Motion Actuator using Self-Oscillating Gel
Osamu Tabata, Hirasawa Hiroshi, Aoki Shintaro, Yoshida Ryo, Kokufuta Etsuo
Sensors and Actuators A   95    2002   [Refereed]
Moving Mask Deep X-ray Lithography System with Multi Stage for 3-D Microfabrication
Osamu Tabata, You Hui, Matsuzuka Naoki, Yamaji Tadahiro, Uemura Suguru, Dama Issei
Microsystem Technologies   8    2002   [Refereed]
Effect of aperture size and pressure on XeF2 etching of silicon
Koji Sugano, Osamu Tabata
Microsystem Technologies   9(1)    2002
Micro Fabricated Tunable Bending Stifness Device
Osamu Tabata, Konishi Satoshi, Cusin Pierre, Ito Yuichi, Kawai Fumie, Hirai Shinichi, Kawamura Sadao
Sensors and Actuators,   A89    2001
Anisotropic Etching of Silicon in TMAH Solution
Osamu Tabata
Sensors and Materials   13(5)    2001   [Refereed]
Selectivity Control of Mask Material for XeF2 Etching Using UV light Exposure
Koji Sugano, Osamu Tabata
電気学会E部門論文誌   121-E(12)    Jan 2001   [Refereed]
3-Dimensional Microstructure Fabrication Using Multiple Moving Mask Deep X-Ray Lithography Process
Osamu Tabata, Terasoma Kouichi, Agawa Norihiro, Yamamoto Kouji
電気学会E部門論文誌   120-E(7)    2000   [Refereed]

Misc

 
Y. Kato, Yoshikazu Hirai, K. Kamei, Toshiyuki Tsuchiya, Osamu Tabata
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15)   0   Jun 2015
Y. Mori, Z. Ma, S. Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15)   0   Jun 2015   [Refereed]
Y. Matsui, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15)   0   Jun 2015
Z. Ma, Y.-J. Kim, S. Park, Yoshikazu Hirai, Toshiyuki Tsuchiya, D.-N. Kim, Osamu Tabata
The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015)   581-584   Apr 2015
K. Ban, K. Tsujimoto, Yoshikazu Hirai, A. Terao, N. Mizutani, T. Kobayashi, Osamu Tabata
The 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum (IFCF-EFTF 2015)   0   Apr 2015
DNAオリガミ架橋構造のシリコン基板への選択的形成
朴晟洙, 馬志鵬, 平井義和, 土屋智由, 田畑修, 森裕都
平成27年電気学会全国大会   3-095   Mar 2015
X. Ma, Y. Kato, Yoshikazu Hirai, F. Kempen, F. Keulen, Toshiyuki Tsuchiya, Osamu Tabata
SPIE Advanced Lithography 2015 (Optical Microlithography XXVIII)   9426-14   Feb 2015
A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)   389-392   Jan 2015
K. Hokazono, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)   417-420   Jan 2015
K. Sugano, D. Matsui, Toshiyuki Tsuchiya, Osamu Tabata
The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015)   608-611   Jan 2015
Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers
K. Sugano, D. Matsui, Toshiyuki Tsuchiya, Osamu Tabata
The 27th International Microprocesses and Nanotechnology Conference (MNC 2014)   7P-11-90   Nov 2014
The diffracted X-ray tracking method for recording the single-molecule conformational changes of the KcsA potassium channel in a sub-millisecond time resolution
H. Shimizu, M. Iwamoto, Y. Oota, Yoshikazu Hirai, Osamu Tabata, S. Oiki
The 45th Natl Inst Physiol Sci (NIPS) International Symposium   22   Nov 2014
Revealing the radial elastic modulus of multi-layered DNA origami by AFM nanoindentation
Zhipeng Ma, Seongsu Park, Yuto Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
第58回日本学術会議材料工学連合講演会, 日本学術会議材料工学委員会,他関連34学協会   722   Oct 2014
An Optimization Tool for 3D Lithography Utilizing DMD-based Maskless Exposure System
Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris van Kempen, Fred van Keulen, Toshiyuki Tsuchiya, Osamu Tabata
第31回「センサ・マイクロマシンと応用システム」シンポジウム   20pm3-PS023   Oct 2014
Development of a High Efficient Proton Conductor Media using Extended-Nano Space under the outer Electric Field
Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, Osamu Tabata, Toshiyuki Tsuchiya, T. Kitamori
The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014)   1236-1239   Oct 2014
Tensile Testing in Vacuum with Concentrated Infrared Light Heating for Single Crystal Silicon Mechanical Characterization at High Temperature
A. Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 27th International Microprocesses and Nanotechnology Conference, Fukuoka, Japan (4-7 October, 2014)   6C-5-1   Oct 2014
Yoshikazu Hirai, Daisuke Takagi, Satoshi Anai, Yoshitomo Chihara, Toshiyuki Tsuchiya, Kiyohide Fujimoto, Osamu Tabata
EUROSENSORS 2014   87 62-65   Sep 2014
Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
Akio Uesugi, Takahiro Yasutomi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014)   0   Jun 2014
An optimization approach for 3D photolithography utilizing DMD maskless exposure system
Xiaoxu Ma, Yoshiki Kato, Yoshikazu Hirai, Floris Kempen, Fred Keulen, Toshiyuki Tsuchiya, Osamu Tabata
The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014)   0   Jun 2014
First-principles simulation on orientation dependence of piezoresistivity in graphene nanoribbon
M. Gamil, K. Nakamura, A.M.R.F. El-Bab, Osamu Tabata, A.A. El-Moneim
The 2nd International Conference on Engineering and Technology (ICET 2014)   1-6   Apr 2014
T. Tsuchiya, Vijay Kumar Singh, Y. Hirai, O. Tabata
The 2014 International Conference on Optical MEMS and Nanophotonics   119-120   2014
Y. Kogita, Y. Hirai, T. Tsuchiya, O. Tabata
The 2014 International Conference on Optical MEMS and Nanophotonics   65-66   2014
Elasticity measurement of DNA origami nanotube in liquid with tapping mode AFM
L. Li, L. Liu, Osamu Tabata, W.J. Li
The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2014)   684-687   2014
D. Takagi, Y. Hirai, S. Anai, Y. Chihara, K. Fujimoto, T. Tsuchiya, Y. Hirao, O. Tabata
The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering   22-26   Nov 2013
M. Elwi Mitwally, Toshiyuki Tsuchiya, Osamu Tabata, S. Sedky
2013 International Microprocesses and Nanotechnology Conference   0   Nov 2013
Fractography Analysis Of Tensile Tested (110) Silicon Prepared by Different Surface Morphology And Crystal Orientations
Akio Uesugi, Yoshikazu Hirai, Koji Sugan, Toshiyuki Tsuchiya, Osamu Tabata
ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013)   0   Jul 2013
Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
Y. Kato, Yoshikazu Hirai, F. van Kempen, F. van Keulen, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology   192-193   Apr 2013
F.C.M. Van Kempen; Y. Hirai; F. Van Keulen; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1625-1628   2013   [Refereed]
K. Sugano; H. Katayama; Y. Hirai; T. Tsuchiya; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1807-1810   2013   [Refereed]
A. Uesugi; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
2013 Transducers and Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS 2013   1946-1949   2013   [Refereed]
L. Li; X. Tian; Z. Dong; L. Liu; O. Tabata; W.J. Li
8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE NEMS 2013   56-59   2013   [Refereed]
T. Akishiba; N. Tamura; T. Ichii; Y. Hirai; K. Sugano; T. Tsuchiya; H. Sugimura; O. Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   307-310   2013   [Refereed]
A. Nakano; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata; A. Umeda
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   645-648   2013   [Refereed]
Li Longhai, Tian Xiaojun, Dong Zaili, Liu Lianqing, Osamu Tabata, W.J. Li
The 2013 IEEE International Conference on Nano/Micro Engineered and Molecular Systems   109-112   2013
Floris van Kempen, Yoshikazu Hirai, Fred van Keulen, Osamu Tabata
The 17th International Conference on Solid-State Sensors Actuators and Microsystems   1625-1628   2013
Atsushi Nakano, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)   645-648   2013
K Sugano, H Katayama, Y. Hirai, T. Tsuchiya, O. Tabata
The 17th International Conference on Solid-State Sensors Actuators and Microsystems   1807-1810   2013
A Uesugi, Y. Hirai, K Sugano, T. Tsuchiya, O. Tabata
The 17th International Conference on Solid-State Sensors Actuators and Microsystems   1946-1949   2013
T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata
26TH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2013)   307-310   2013
Mohammed Gamil, Koichi Nakamura, Ahmed Fath El-Bab, Osamu Tabata, Mohamed Serry, Ahmed Abd El-Moneim
1st International Conference on Innovative Engineering Systems (IEEE-RAS ICIES2012)   0   Dec 2012
Phenotypic modulation of pluripotent stem cells (PSCs) induced by microfabrication materials
K. Kamei, Yoshikazu Hirai, Y. Makino, M. Yoshioka, L. Liu, M. Nakajima, Q. Yuan, Y. Chen, Osamu Tabata
The 16th International Conference on. Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2012)   1063-1065   Oct 2012
Automated optimization of gray-scale masks for 3D micro-structuring
F. van Kempen, Yoshikazu Hirai, F. van Keulen, Osamu Tabata
The 6th European Congress on Computional Methods in Applied Sciences and Engineering (ECCOMAS 2012)   0   Sep 2012
Optimization techniques for gray-scale photolithography
F. van Kempen, Yoshikazu Hirai, F. van Keulen, Osamu Tabata
The 9th ASMO UK / ISSMO conference on Engineering Design Optimization Product and Process Improvement   0   Jul 2012
Investigation of Nonlinear Decrease of Autofluorescence in Negative Thick-Film Resist
Daimon Matsui, Yoshikazu Hirai, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012)   ac12000168   Jul 2012
Phenotypic Modulation of Pluripotent Stem Cells by Microfabrication Materials
Kenichiro Kamei, Yoshikazu Hirai, Yoshihide Makino, Li Liu, Qinghua Yuan, Osamu Tabata
The International Society for Stem Cell Research (ISSCR) 10th Annual Meeting   T-2262   Jun 2012
Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes
Praveen Thakur Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
2012 MRS Spring Meeting, San Francisco   B7.5   Apr 2012
Out-of-plane Bending Reliability Test for Intrinsic Mechanical Strength of Polycrystalline Silicon Thin Film Using Etching-damage-less Membrane
Tomoki Tanemura, Shuichi Yamashita, Hiroyuki Wado, Yukihiro Takeuchi, Toshiyuki Tsuchiya, Osamu Tabata
2012 MRS Spring Meeting, San Francisco   B9.2.   Apr 2012
Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
T. Kataoka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   335-336   Mar 2012
Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   999-1000   Mar 2012
Fabrication of nanogap electrodes by gold nanorod growth on substrate
S. Nishino, Y. Takenaka, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   652-653   Mar 2012
Evaluation of negative photoresists on phenotypes of human induced pluripotent stem cells (hiPSCs)
K. Kamei, Yoshikazu Hirai, Y. Makino, L. Liu, Q. Yuan, M. Yoshioka, Y. Chen, Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   558-559   Mar 2012
Temperature dependency of DNA origami self-assembly rate
C. Huang, T. Akishiba, N. Tamura, Yoshikazu Hirai, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   411-412   Mar 2012
A. Kitamura, Yoshikazu Hirai, K. Sugano, Osamu Tabata, Toshiyuki Tsuchiya
The 25th IEEE International Conference on Micro Electro Mechanical Systems   1213-1216   Feb 2012
Toshiyuki Tsuchiya, Osamu Tabata, A. Umeda
The 25th IEEE International Conference on Micro Electro Mechanical Systems   420-423   Jan 2012
AuNPs conjugate DNA origami nanotubes for nanophotonic application
S. Z. Kiss, D. S. Hautzinger, Osamu Tabata, J. G. Korvink
The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   402-404   Jan 2012
M. Gamil; K. Nakamura; A.M.R.F. El-Bab; O. Tabata; M. Serry; A.A. El-Moneim
Proceedings of the 2012 1st International Conference on Innovative Engineering Systems, ICIES 2012   52-57   2012   [Refereed]
H. Yagyu; Y. Hirai; A. Uesugi; Y. Makino; K. Sugano; T. Tsuchiya; O. Tabata
Materials Research Society Symposium Proceedings   1415 59-64   2012   [Refereed]
O. Tabata
2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012      2012   [Refereed]
A. Kitamura; Y. Hirai; K. Sugano; O. Tabata; T. Tsuchiya
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   1213-1216   2012   [Refereed]
T. Tsuchiya; O. Tabata; A. Umeda
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   420-423   2012   [Refereed]
H. Yagyu; Y. Hirai; Y. Makino; K. Sugano; T. Toshiyuki; O. Tabata
Procedia Engineering   47 402-405   2012   [Refereed]
Toshiyuki Tsuchiya, Osamu Tabata, Akira Umeda
2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   420-423   2012   [Refereed]
Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
H. Yagyu, Yoshikazu Hirai, A. Uesugi, Y. Makino, K. Sugano, Toshiyuki Tsuchiya, Osamu Tabata
2011 MRS Fall Meeting   1415 0   Nov 2011
A.M.H. Kwan; S. Song; X. Lu; L. Lu; Y.K. Teh; Y.F. Teh; E.W.C. Chong; Y. Gao; W. Hau; F. Zeng; M. Wong; C. Huang; A. Taniyama; Y. Makino; S. Nishino; T. Tsuchiya; O. Tabata
2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011   220-225   Oct 2011   [Refereed]
T. Tsuchiya; H. Tokusaki; Y. Hirai; K. Sugano; O. Tabata
2011 IEEE/IFIP 19th International Conference on VLSI and System-on-Chip, VLSI-SoC 2011   208-213   Oct 2011   [Refereed]
Analysis of Acceleration Sensitivity in Frequency-Decoupled MEMS Tuning Fork Gyroscope
Thakur Praveen Singh, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
第28回「センサ・マイクロマシンと応用システム」シンポジウム   623-626   Sep 2011
K. Sugano; A. Nakata; H. Yoshimune; Y. Hirai; T. Tsuchiya; O. Tabata
ASME-JSME-KSME 2011 Joint Fluids Engineering Conference, AJK 2011   2 365-369   Jul 2011   [Refereed]
Y. Hirai; A. Uesugi; Y. Makino; H. Yagyu; K. Sugano; T. Tsuchiya; O. Tabata
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS\\'11   2706-2709   Jul 2011   [Refereed]
Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
平井 義和; 上杉 晃生; 牧野 圭秀; 柳生 裕聖; 菅野 公二; 土屋 智由; 田畑 修
The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST2011),, pp. 62-63   62-63   Jun 2011   [Refereed]
K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS\\'11   1773-1776   Jun 2011   [Refereed]
K. Sugano; R. Hiraoka; T. Tsuchiya; O. Tabata; M. Klaumunzer; M. Voigt; W. Peukert
2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS\\'11   2570-2573   Jun 2011   [Refereed]
Praveen Singh Thakur, 菅野 公二, 土屋 智由, 田畑 修
The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers'11),   2006-2009   Jun 2011   [Refereed]
Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity
Thakur,Praveen Singh; 菅野 公二; 土屋 智由; 田畑 修
The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems,, pp. 1297-1300   1297-1300   Feb 2011   [Refereed]
C. Huang; T. Saeki; M. Endo; H. Sugiyama; C.-H. Weng; G.-B. Lee; K. Sugano; T. Tsuchiya; O. Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   197-200   Feb 2011   [Refereed]
M. Li; L. Liu; N. Xi; Y. Wang; Z. Dong; G. Li; O. Tabata; X. Xiao; W. Zhang
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   188-191   Feb 2011   [Refereed]
K. Sugano; H. Yoshimune; A. Nakata; Y. Hirai; T. Tsuchiya; O. Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   75-78   Feb 2011   [Refereed]
Y. Hirai; Y. Nakai; Y. Makino; K. Sugano; T. Tsuchiya; O. Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   184-187   Feb 2011   [Refereed]
T.P. Singh; K. Sugano; T. Tsuchiya; O. Tabata
Procedia Engineering   25 51-54   Jan 2011
Y. Hirai; K.-I. Kamei; Y. Makino; L. Liu; Q. Yuan; Y. Chen; O. Tabata
Procedia Engineering   25 1233-1236   Jan 2011
M. Sato; I. Kanno; H. Kotera; O. Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   24th Vol.2 1264-1268   Jan 2011   [Refereed]
A. Taniyama; Y. Hirai; K. Sugano; O. Tabata; T. Ikehara; T. Tsuchiya
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   449-452   Jan 2011   [Refereed]
H. Tokusaki; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   1241-1245   Jan 2011   [Refereed]
Design of alkali metal vapor cell adapting sacrificial microchannel sealing technique
K.Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya and O. Tabata
International workshop on micro/nano-engineering   12 17-18   2011   [Refereed]
T.P. Singh; K. Sugano; T. Tsuehiya; O. Tabata
NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems   1250-1253   2011   [Refereed]
K. Tsujimoto; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   368-371   2011   [Refereed]
A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   449-452   2011
M. Sato, I. Kanno, H. Kotera, O. Tabata
2011 IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)   1265-1268   2011
Nanogap-controllable Arrangement of Gold Nanoparticles Using Template-Assisted Self-Assembly
Koji Sugano, Ryoji Hiraoka, Toshiyuki Tsuchiya, Osamu Tabata
Core-to-Core 2010 World Network Seminar on Advanced Particle Science and Technology   99   Nov 2010
Y. Hirai; Y. Nakai; K. Sugano; T. Tsuchiya; O. Tabata
Procedia Engineering   5 854-857   Sep 2010   [Refereed]
A.M.R. Fath El Bab; K. Sugano; T. Tsuchiya; O. Tabata; M.E.H. Eltaib; M.M. Sallama
Procedia Engineering   5 1304-1307   Sep 2010   [Refereed]
Sacrificial Microchannel Sealing by Glass-Frit Rflow for Micromachined Alkali Gas-Filled Cell
Kazuya,Tsujimoto; Yoshikazu,Hirai; 菅野 公二; Tsuchiya, Toshiyuki; Tabata, Osamu
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 211   211   Jul 2010   [Refereed]
Component modelling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
Hiroyuki,Tokusaki; Yoshikazu,Hirai; Sugano, Kouji; Tsuchiya, Toshiyuki; Tabata, Osamu
The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2010),, p. 160   160   Jul 2010   [Refereed]
G. Lopez; T. Tanemura; R. Sato; T. Saeki; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata; M. Fujita; M. Maeda
2010 IEEE 5th International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010   245-249   Jan 2010   [Refereed]
DNA Mediated self-assembly of micro-scale components and sites
R. Sato; T. Tanemura; Y. Hirai; K. Sugano; T. Tsuchiya; O. Tabata
7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices, FNANO 2010   11-12   2010   [Refereed]
Y. Ura; K. Sugano; T. Tsuchiya; O. Tabata
TRANSDUCERS 2009 - 15th International Conference on Solid-State Sensors, Actuators and Microsystems   2062-2065   Jun 2009   [Refereed]
F.V. Keulen; Y. Hirai; O. Tabata
2009 10th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2009   0   Apr 2009   [Refereed]
Modeling of Self-face-alignment Process Using Contact Potential Difference
佐藤 亮; 種村 友貴; Guillermo,Lopez Hinojosa; Mohammed,Serry ElSayed Ahmed; 菅野 公二; 土屋 智由; 田畑 修
International Conference on Electronics Packaging (ICEP2009),, pp. 959-962   959-962   Apr 2009   [Refereed]
Fabrication of Large-scale Nanoparticle Array Using Combination of Self-Assembly and 2-step Transfer
SUGANO K.;OZAKI T.;TSUCHIYA T.;TABATA O.
Int Conf Electron Packag   2009 409-412   Apr 2009   [Refereed]
T. Tanemura; G. Lopez; R. Sato; K. Sugano; T. Tsuchiya; O. Tabata; M. Fujita; M. Maeda
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)   184-187   Jan 2009   [Refereed]
Hirai Yoshikazu, Kouji Sugano, Toshiyuki Tsuchiya, Osamu Tabata
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers'09)   1616-1619   Jan 2009   [Refereed]

Books etc

 
Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS
Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata
Springer   2012   
Advanced Micro and Nanosystems, Reliability of MEMS
Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata, Toshiyuki Tsuchiya
John Wiley & Sons Inc   Dec 2007   
Comprehensive Microsystems
Yogesh B. Gianchandani, Osamu Tabata, Hans Zappe
Elsevier Science   Nov 2007   
Advanced Micro and Nanosystems, Micro Process Engineering: Fundamentals, Devices, Fabrication, And ApplicationsAdvanced Micro and Nanosystemand
Norbert Kockmann, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
John Wiley & Sons Inc   Feb 2006   
Advanced Micro and Nanosystems, Microengineering of Metals And Ceramics: Design, Tooling and Injection Molding
Detlef Lohe, Jurgen Haufselt, Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
John Wiley & Sons Inc,   Oct 2005   
Advanced Micro and Nanosystems, Microengineering of Metals And Ceramics: Special Replication Techniques, Automation And Properties
Detlef Lohe, Jurgen Haufselt, Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
John Wiley & Sons Inc   Sep 2005   
Advanced Micro and Nanosystems, CMOS-MEMS,
Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
John Wiley & Sons Inc   Feb 2005   
Material Properties: Measurement and Data
TABATA Osamu (Part:Contributor)
Springer   2005   
Advanced Micro and Nanosystems, LIGA and its Applications
John Wiley & Sons Inc   Jun 2007   
Advanced Micro and Nanosystems, Enabling Technology for Mems and Nanodevices
Henry Baltes, Oliver Brand, Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata
John Wiley & Sons Inc   Aug 2004   
Silicon Micromachining
TABATA Osamu、SATO Kazuo (Part:Joint Translation)
シュプリンガーフェアラーク   2001   

Conference Activities & Talks

 
DNA as an Engineering Material to Bridge MEMS and Nanomedicine [Invited]
TABATA Osamu
The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013)   10 Nov 2013   
DNA as an Engineering Material to Bridge MEMS and Nanotechnology [Invited]
TABATA Osamu
The 17th Nanotechnology and Micro Electromechanical System Symposium(十七屆奈米工程暨微系統技術研討會)   22 Oct 2013   
DNA Nanotechnology as a Bridge between Nanomaterial and Nanosystem [Invited]
TABATA Osamu
Challenges in Soft Matter Research: From Modeling to Structure and Applications   7 Oct 2013   
DNA as an engineering material [Invited]
TABATA Osamu
The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT2012)   8 Jul 2012   
DNA nanotechnology to bridge MEMS and nanomaterial [Invited]
TABATA Osamu
The 2nd Int. Guardian Angels Workshop: Sensors, Interfaces and Systems   3 Feb 2012   
Integration of Nanostructure with MEMS [Invited]
TABATA Osamu
The Arab Forum-2011 on Industrial Applications of Nanotechnolgoy   27 Dec 2011   
DNA Nanotechnology as a Bridge Between Nanomaterial and Nanosystem [Invited]
TABATA Osamu
Japan-Taiwan joint workshop on Bioelectronics   18 Jan 2011   
Fabrication Platform for Configurable Nanosystem [Invited]
TABATA Osamu
The 3rd IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2009)   Oct 2009   
Project Based Education on MEMS/Microsystem with International Collaboration [Invited]
TABATA Osamu
1st Symposium on E-JUST, Curricula Development, Research and Innovation Directions   25 Nov 2008   
DNA as an Intelligent Adhesive for Self Assembly of Micro/Nano Components [Invited]
TABATA Osamu
2nd IEEE Int. Conf. on Nano/Molecular Medicine and Engineering   6 Nov 2008   
ナノバイオ材料の自己組織化によるナノ・マイクロシステム構築 [Invited]
TABATA Osamu
29 Oct 2008   
Micro/Nano assembly as a key to SENS (Synthetic Engineering for Nano Systems) [Invited]
TABATA Osamu
Pacific Rim Meeting on Electrochemical and Solid-state Science (PRiME2008)   13 Oct 2008   
MEMSとナノテクノロジーのシームレス融合技術 -実装技術への期待と可能性- [Invited]
TABATA Osamu
エレクトロニクス実装学会MES2008基調講演   18 Sep 2008   
MEMS/MS and Assembly as Key Components and Technology for Advanced System [Invited]
TABATA Osamu
The First Japan-Egypt International Symposium on Science and Technology (EJICST 2008)   8 Jun 2008   
Micro/Nano assembly as a key to realize NEMS(2008) [Invited]
TABATA Osamu
FNANO2008   22 Apr 2008   
Particle Assembly as a Key Approach to Realize NEMS [Invited]
TABATA Osamu
17th APHS Seminar   12 Apr 2008   
MEMS技術の研究開発動向と京都大学におけるMEMS研究・教育 [Invited]
TABATA Osamu
21 Mar 2008   
Expectation and Role of International Collaboration [Invited]
TABATA Osamu
Seminar “Growing innovation: Belgium has a fertile ground soil for fruitful collaboration between academic and industrial worlds.”   14 Feb 2008   
MEMS技術の最新動向とアセンブル技術 [Invited]
TABATA Osamu
24 Jan 2008   
Micro/Nano assembly as a key technology for NEMS [Invited]
TABATA Osamu
The 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2008)   7 Jan 2008   Hainan, China
Introduction of MEMS Activity at Nano/Micro System Engineering Lab@Kyoto Univ. [Invited]
TABATA Osamu
4 Dec 2007   
MEMS技術の研究開発動向と京都大学におけるMEMS研究・教育 [Invited]
TABATA Osamu
IEP関西支部見学会・技術講演会   28 Nov 2007   
塵埃の世界 -マイクロエンジニアリングへの誘い- [Invited]
TABATA Osamu
21 Nov 2007   
MEMSの産業応用と研究動向 [Invited]
TABATA Osamu
1 Mar 2007   
Role of University Research for Open Innovations in MNT [Invited]
TABATA Osamu
The 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2007)   16 Jan 2007   
Exploiting University Research for Open Innovations in MNT [Invited]
TABATA Osamu
GETI Emerging Technology Executive Seminar   7 Dec 2006   
見る・観る・視る・診る・看る -マイクロ・ナノシステムが拓く世界- [Invited]
TABATA Osamu
30 Nov 2006   
Computational Three-Dimensional Process Design for MEMS [Invited]
TABATA Osamu
International Conference on MEMS and Semiconductor Nanotechnology,   20 Dec 2005   Kharagpur, India
Computational 3-D Microfabrication for MEMS and MEMS Research activities at Micro-Nano System Lab. [Invited]
TABATA Osamu
Tamkang University 2005 International Nano and MEMES Workshop   23 Nov 2005   
Computational MEMS Process Design and Process Development(2005) [Invited]
TABATA Osamu
2005 International Conference on Solid State Devices and Materials   13 Sep 2005   
Computational MEMS Process Design and Development [Invited]
TABATA Osamu
15th International Sensors Conference (ISC'04)   12 Nov 2004   
MEMS Technology Trend and Importance of Assembly [Invited]
TABATA Osamu
SECAPセミナー   2 Nov 2004   
Moving Mask Deep X-ray Lithography for Three Dimensional Microfabrication [Invited]
TABATA Osamu
The 5th Asian Synchrotron Radiation Forum   16 Mar 2004   
Moving-Mask UV Lithography for 3-D Microfabrication and Application to Fluidic Microsystems [Invited]
TABATA Osamu
Kyoto University Research for Open Innovations in MNT [Invited]
TABATA Osamu
Fourth Assiut University International Conference on Mechanical Engineering Advanced Technology for Industrial Production   

Works

 
Development of Ultra Fine Metal Mold Technology for Micro Integrated Chemical Devices
2002 - 2002
Establishment of Nanochip Techoloy and its Appliation to Genomic Analysis
1999 - 2004
Research on Process Simulation for Micro/Nanomachine
2001 - 2004

Research Grants & Projects

 
Fabrication Technology for Micro/Nano System
Project Year: 1996   
Meaurement and Analysis Technology for Micro/Nano System
Project Year: 1996   
Synthesis Engineering for Macro/Nano System
Project Year: 1996   

Patents

 
特願09/773909 : Processing Device And Method Of Processing Material With Ultraviolet Light Or Light Of Shorter Wavelength Than Ultraviolet Light
Jun Minakuchi,Koji Yamamoto,Osamu Tabata
特願USP6694503 : Processing Device and Method of Processing Material with Ultraviolet Light or Light of Shorter Wavelength than Ultraviolet Light
Jun Minakuti, Osamu Tabata and Koji Yamamoto
特願PCT/JP2009/051678 : Elastic wave rransducers, elastic wave transducer array, ultrasonic probe, and ultrasonic imaging apparatus
Kenichi Nagae, Osamu Tabata,