2017年

# 低加速電子線SEM/STEMを用いた局在場可視化技術

Journal of the Vacuum Society of Japan
• 藤田, 淳一

60
10

397

405

DOI
10.3131/jvsj2.60.397

High-sensitive visualization of the local electric and magnetic field is possible using a low energy electron beam combining with a simple grid detector configuration. The beam deflection goes along with the clear principle that the larger deflection can be induced by lower energy electron based on the Rutherford scattering scheme. The field distribution around two-dimensional materials allows quantitative analysis of the local field, showing good agreements with FEM simulation. Well defined beam scanning control established in the recent scanning electron microscope (SEM) can project the detector grid image superimposed on the specimen image. And thus the localized field distribution was easily visualized through a simple E-filed vector translation based on the deflection configuration. Detailed techniques and the analysis were described from the viewpoint of practical applications.<br>

リンク情報
DOI
https://doi.org/10.3131/jvsj2.60.397
ID情報
• DOI : 10.3131/jvsj2.60.397
• ISSN : 1882-4749

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