論文

査読有り
2017年

低加速電子線SEM/STEMを用いた局在場可視化技術

Journal of the Vacuum Society of Japan
  • 藤田, 淳一

60
10
開始ページ
397
終了ページ
405
記述言語
日本語
掲載種別
研究論文(学術雑誌)
DOI
10.3131/jvsj2.60.397
出版者・発行元
一般社団法人 日本真空学会

High-sensitive visualization of the local electric and magnetic field is possible using a low energy electron beam combining with a simple grid detector configuration. The beam deflection goes along with the clear principle that the larger deflection can be induced by lower energy electron based on the Rutherford scattering scheme. The field distribution around two-dimensional materials allows quantitative analysis of the local field, showing good agreements with FEM simulation. Well defined beam scanning control established in the recent scanning electron microscope (SEM) can project the detector grid image superimposed on the specimen image. And thus the localized field distribution was easily visualized through a simple E-filed vector translation based on the deflection configuration. Detailed techniques and the analysis were described from the viewpoint of practical applications.<br>

リンク情報
DOI
https://doi.org/10.3131/jvsj2.60.397
ID情報
  • DOI : 10.3131/jvsj2.60.397
  • ISSN : 1882-4749

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