論文

査読有り
2011年8月

Characteristics of graphene FET directly transformed from a resist pattern through interfacial graphitization of liquid gallium

MICROELECTRONIC ENGINEERING
  • Jun-ichi Fujita
  • ,
  • Ryuichi Ueki
  • ,
  • Takuya Nishijima
  • ,
  • Yosuke Miyazawa

88
8
開始ページ
2524
終了ページ
2526
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.mee.2011.01.014
出版者・発行元
ELSEVIER SCIENCE BV

We found that an extremely thin resist pattern on silicon dioxide can be directly transformed into a graphene field effect transistor (FET) channel via interfacial graphitization of liquid gallium. These patterned graphene FETs have p-type characteristics and a maximum conductance modulation of 22% against an applied gate voltage that ranges from -50 to +50 V at room temperature. Further reduction of the initial resist thickness improves the modulation ratio remarkably up to more than 100%, but at the same time the conductance deteriorates greatly, to less than 10(-9) S. We believe that electron scattering at the grain-domain boundaries strongly increases the resistance of the channel, leading to an apparent on-off ratio increase as if the channel was behaving as a semiconductor. (C) 2011 Elsevier B.V. All rights reserved.

リンク情報
DOI
https://doi.org/10.1016/j.mee.2011.01.014
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000293663400222&DestApp=WOS_CPL
ID情報
  • DOI : 10.1016/j.mee.2011.01.014
  • ISSN : 0167-9317
  • Web of Science ID : WOS:000293663400222

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