論文

査読有り 本文へのリンクあり 国際誌
2022年5月

In situ observations of the dissolution of an AlN film into liquid Al using a high-temperature microscope

Materials Science in Semiconductor Processing
  • Masayoshi Adachi
  • ,
  • Keigo Fujiwara
  • ,
  • Ryuta Sekiya
  • ,
  • Hidekazu Kobatake
  • ,
  • Makoto Ohtsuka
  • ,
  • Hiroyuki Fukuyama

142
開始ページ
106469-1
終了ページ
106469-6
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1016/j.mssp.2022.106469
出版者・発行元
Elsevier BV

This report describes the implementation of an original liquid-phase epitaxy (LPE) technique using a Ga–Al solution. An N-polar AlN thin film prepared using a sapphire nitridation method was employed as the template for the LPE growth process. The growth behavior depended on attaining a competitive balance of the polarity inversion and the dissolution reaction of the AlN thin film. Therefore, to improve the overall LPE process, it was crucial to understand exactly when and how the AlN thin film dissolved in the solution. This study investigated the dissolution of the N-polar AlN thin film into liquid Al and the resulting AlN growth through in situ observation experiments. The AlN thin film dissolved at a lower temperature than the required temperature for AlN growth. On the basis of these findings, we designed an LPE growth process to obtain a homogeneous AlN layer without the dissolution of the N-polar AlN thin film. Ultimately, a homogeneous AlN layer was successfully formed on the nitrided sapphire substrate using Ga-60mol%Al at 1300 °C for 5 h.

リンク情報
DOI
https://doi.org/10.1016/j.mssp.2022.106469 本文へのリンクあり
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85122744633&origin=inward 本文へのリンクあり
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=85122744633&origin=inward
ID情報
  • DOI : 10.1016/j.mssp.2022.106469
  • ISSN : 1369-8001
  • SCOPUS ID : 85122744633

エクスポート
BibTeX RIS