In order to research effect on the cutting performance for aluminum alloy by mixing isopropyl alcohol (IPA) and water, the performance of IPA aqueous solution was compared with IPA and water by the sliding test, cooling test and cutting test. Cons...
In order to improve the laser micro-machinability of borosilicate glass, the glass surface was doped with metal (silver or copper) ions by electric field-assisted solid-state ion exchange. Doped ions drifted and diffused into the glass substrate u...
A laser forward transfer technique of gold nanoparticles (GNPs) deposited on glass substrates to silicon wafers and periodic patterning of transferred GNPs is demonstrated. Gold colloidal solution was prepared by citric acid reduction method. The ...
The measurement of cutting force is important to monitor the status of the process during micro drilling. It is used the cutting dynamometer, the shape of the workpiece is restricted and must be set to the center. These problems can be resolved by...
This study aims to develop novel cutting tools that have either microscale or nanoscale textures on their surfaces. Texturing microscale or nanoscale features on a solid surface allowed us to control the tribological characteristics of the tool. I...
Herrera Granados German, Ashida Kiwamu, I. Ogura, Y. Okazaki, N. Morita, L. Ruiz-Huerta, A. Caballero-Ruiz
Key Engineering Materials 523-524 93-98 2012年12月
Micro-grooves fabrication is increasing due to its importance in different technology fields, as they are required for higher functional applications such as the development of optical lens or micro channels for heat exchangers. A novel method bas...
In order to improve the laser micro-machinability of borosilicate glass, the glass surface was doped with metal (silver or copper) ions by an electric field-assisted ion-exchange method. Doped ions drifted and diffused into the glass substrate und...
Journal of Nanoscience and Nanotechnology 10 4440-4447 2010年7月
In this study, brittle materials were mechanically modified under precise normal force control at the mN~/i,N level using PCD tools as a nano tool. The lab-made PCD attached micro cantilevers were customized for tribo nanolithography. The machined...
Jeong Woo Park, Sun Ho Kim, Jeong Min Lee, Noboru Morita
2010 The 2nd International Conference on Computer and Automation Engineering, ICCAE 2010 5 621-626 2010年5月
Single crystalline silicon were mechanically modified (TNL, Tribo nanolithography) under precise normal force control at the mN ̃ μ N level using PCD tools as a nano tool. The machined patterns were measured under an atomic force microscope (AFM) ...
Proceedings of the 5th International Conference on Leading Edge Manufacturing in 21st Century, LEM 2009 2009年12月
Mask-free and rapid patterning of fused quartz surface is useful for various applications, such as rapid prototyping of optical elements and UV nanoimprint molds. We examined the fabrication of patterned quartz for such applications by ion-bombard...
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 74 3056-3062 2008年12月
This study aims to fabricate three-dimensional microstructures on a silicon surface using focused ion beam (FIB) irradiation and wet chemical etching. A silicon surface irradiated with FIB withstands etching in KOH, and consequently protruding str...
In various fields of nanotechnology, the importance of nanoscale three-dimensional (3D) structures is increasing. In order to develop an efficient process to fabricate nanoscale 3D structures, we have applied highly charged ion (HCI) beams to the ...
Colloids and Surfaces A: Physicochemical and Engineering Aspects 313-314 407-410 2008年2月
The ion beam lithography (IBL) method is one of the promising techniques that can fabricate 3D nano-structures. In order to develop IBL further, highly charged ion (HCI) beams have been applied to IBL method in our research group. Considering a hi...
Noritaka Kawasegi, Hiroshi Sugimori, Hideki Morimoto, Noboru Morita, Isao Hori
Proceedings of the 10th Anniversary International Conference of the European Society for Precision Engineering and Nanotechnology, EUSPEN 2008 2 116-120 2008年1月
We developed novel cutting tools that had either microscale or nanoscale textures on their surfaces. Texturing microscale or nanoscale features on a solid surface allowed us to control the tribological characteristics of the tool. The effect of th...
J. W. Park, S. S. Lee, B. S. So, Y. H. Jung, N. Kawasegi, N. Morita, D. W. Lee
Journal of Materials Processing Technology 187-188 321-325 2007年6月
Nanoscale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) followed by chemical etching was demonstrated. A specially designed cantilever with a diamond tip, allowing the formation of damaged layer on silicon subs...
International Journal of Machining and Machinability of Materials 2 3-16 2007年1月
This study investigated the nanomachining of metallic glass surfaces using an Atomic Force Microscope (AFM). To reveal the nanomachining characteristics of metallic glass, machining experiments were conducted under various machining parameters. Th...
Jeong Woo Park, Deug Woo Lee, Noboru Takano, Noboru Morita
Materials Science Forum 505-507 79-84 2006年12月
Nano-scale fabrication of silicon substrate based on the use of atomic force microscopy (AFM) was demonstrated. A specially designed cantilever with diamond tip allows the formation of damaged layer on silicon substrate by a simple scratching proc...
International Journal of Manufacturing Technology and Management 9 34-50 2006年7月
The etching resistance characteristics of a Focused Ion Beam (FIB) irradiated silicon surface against KOH are investigated in this study. An FIB irradiated silicon surface can withstand etching in KOH solution, whereas the non-irradiated area is e...
In order to fabricate a nanoscale three-dimensional (3D) structure by using the ion-beam lithography (IBL), we tried to control the etching rate and the etching depth by means of the charge state, the beam energy, and the fluence of the ion beam. ...
N. Kawasegi, N. Morita, S. Yamada, N. Takano, T. Oyama, K. Ashida, J. Taniguchi, I. Miyamoto, S. Momota, H. Ofune
Proceedings of the 6th International Conference European Society for Precision Engineering and Nanotechnology, EUSPEN 2006 2 397-400 2006年1月
This study proposes a novel method of nano-scale patterning on a metallic glass surface using focused ion beam (FIB) irradiation followed by wet chemical etching. We found that etch rate of a metallic glass surface irradiated with Ga+ion beam can ...
LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century 823-826 2005年12月
To achieve rapid patterning of quartz surface, ion beam irradiation using focused ion beam (FIB) and succeeding buffered hydrofluoric acid wet etching of quartz was examined. The etched depths of quartz saturated with increasing of ion dose and th...
LEM 2005 - 3rd International Conference on Leading Edge Manufacturing in 21st Century 817-822 2005年12月
Etching characteristics of a silicon surface irradiated by high-energy ion beam against HF are investigated in this study. Specially designed ion irradiation facility, which enables to irradiate high-energy ion beam, is employed. A deep structure ...
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 23 2471-2475 2005年11月
A simple process to fabricate a three-dimensional structure on silicon surface was developed by using tribo-nanolithography (TNL) in an aqueous KOH solution. An inclined rectangular structure can be fabricated by a process where a thin amorphous l...
Tribo-nanolithography (TNL) can form an affected layer on a silicon surface that is resistant to corrosion by KOH, and a nanostructure can be fabricated by combination with wet chemical etching. Transmission electron microscope (TEM), Auger electr...
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 71 2035-2040 2005年6月
This study is intended to fabricate 3D microstructures on single crystal silicon by tribo-nanolithography (TNL) and wet chemical etching. The processed area of single crystal silicon by diamond tip withstands etching in KOH solution, and consequen...
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 71 2041-2046 2005年6月
This study is intended to fabricate 3D microstructures on single crystal silicon by tribo-nanolithography (TNL) and wet chemical etching. In previous report, it could be known that height of microstructure fabricated by the TNL and subsequent wet ...
Nihon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 71 1754-1759 2005年5月
A simple process to fabricate 3 D microstructures on single crystal silicon is presented in this study. The area irradiated by focused ion beam (FIB) can be selectively etched in HF solution. Etching characteristics of irradiated area are studied....
Progress of Machining Technology - Proceedings of the Seventh International Conference on Progress of Machining Technology, ICPMT'2004 330-335 2004年12月
This study aims to fabricate three dimensional nanostructures of single crystal silicon by focused ion beam (FIB) process and subsequent wet chemical etching. Irradiated area by FIB acts as a mask against KOH solution, and consequently protruding ...
Jeong Woo Park, Jeong Woo Park, Noritaka Kawasegi, Noboru Morita, Deug Woo Lee
Journal of Manufacturing Science and Engineering, Transactions of the ASME 126 801-806 2004年11月
The TNL (Tribo Nanolithography) method in aqueous solution uses the atomic force microscopy as a machining tool for the nanoscale fabrication of silicon. A specially designed cantilever with a diamond tip allows the formation of oxide patterns eas...
Noboru Morita, Takehiro Watanabe, Yoshitaro Yoshida
JSME International Journal, Series 3: Vibration, Control Engineering, Engineering for Industry 34 149-153 1991年1月
It is difficult to eliminate recast layers and cracks in laser-machining caramics. These defects significantly detract from the excellent properties of ceramics. This paper describes the feasibility of a crack-free processing method for hot-presse...
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 70 2533-2540 2004年8月
This study proposes a new method on 3 D micro fabrication using a combination technique of nano-scale processing and wet chemical etching. The (100) surface of single crystal silicon was processed by using the mechanism of friction force microscop...
Nippon Kikai Gakkai Ronbunshu, C Hen/Transactions of the Japan Society of Mechanical Engineers, Part C 70 2541-2547 2004年8月
This study proposes the 3D micro-fabrication method on single crystal silicon using a focused inn beam (FIB) process with masking effect for chemical etching. It could be seen that the area processed by FIB remains though it was etched by KOH solu...
Jeong Woo Park, Noritaka Kawasegi, Noboru Morita, Deug Woo Lee
Applied Physics Letters 85 1766-1768 2004年9月
The tribonanolithography (TNL) of silicon substrate in aqueous solution based on the use of atomic force microscopy (AFM) was investigated. A cantilever with a diamond tip, which allowed the formation of a protruding oxide layer several nanometers...
JSME International Journal, Series C: Mechanical Systems, Machine Elements and Manufacturing 44 244-253 2001年9月
Nano-machining experiments are necessary in order to quantitatively understand the nano-machining process. A unique nano-machining and measurement FFM system, which has a stiff cantilever for processing, has been developed. The system can machine ...
The precision and efficient machining of CVD-SiC ceramic to required quality has not been well established yet. In this paper, a comparative study was conducted to investigate the special aspects in grinding of CVD-SiC ceramic, with ELID method or...
Journal of Materials Processing Technology 101 193-197 2000年4月
The final goal of this research is to construct a laser processing system to manufacture stepped shapes or free-form surfaces using the information of detected laser processing sound. In order to achieve this goal, basic investigations concerning ...
Journal of Materials Processing Technology 97 168-173 2000年1月
Laser processing is an important manufacturing technology in machining difficult-to-cut materials. It is known that a sound is generated when laser processing is carried out, the intensity of the sound changing according to the processing conditio...
Kazuyuki Mizuhara, Shinichi Takahashi, Jyunichi Kurokawa, Noboru Morita, Yoshitaro Yoshida
Materials Research Society Symposium - Proceedings 505 501-506 1998年1月
The effects of temperatures on the stress evaluation of boron doped silicon in solid and film forms are investigated. Several techniques, such as fluid cooling to eliminate the temperature raise and/or simultaneous observation of Stokes and anti S...
Satoshi Ogasawaka, Noboru Morita, Yoshitiro Yoshida
Seimitsu Kogaku Kaishi/Journal of the Japan Society for Precision Engineering 63 1563-1568 1997年12月
In this study, which is aimed at understanding the machining characteristics in vacuum for a super-clean room and outer space, a high-speed machining system in a vacuum chamber whose pressure can be reduced to 6×10-6Pa, is newly developed and diam...
Journal of the Ceramic Society of Japan. International ed. 102 189-194 1994年2月
Defocusing of a laser beam is one of the most important factors to control the feature of drilling holes in ceramic materials. This suggests that laser beam energy is delivered and focused on the bottom of the drilling hole by multi-reflection fro...
Journal of the Ceramic Society of Japan. International ed. 101(5) 510-515 1993年5月
The laser-induced thermal shock test and thermal stress analysis by a finite element method were carried out for explaining the generation and propagation behavior of thermal cracks in ceramics such as silicon nitride, alumina and zirconia caused ...
This paper describes the effect of crack-free laser processing of hot-pressed silicon nitride ceramics on fracture strength and residual stress. The fracture strength of the processed test pieces was determined by three-point bending tests. The re...
Noboru Morita, Takehiro Watanabe, Yoshitaro Yoshida
JSME International Journal, Series 3: Vibration, Control Engineering, Engineering for Industry 35 667-672 1992年1月
This paper describes the effect of crack-free laser processing of hot-pressed silicon nitride ceramics on fracture strength and residual stress. The fracture strength of the processed test pieces was determined by three-point bending tests. The re...
Noboru Morita, Zhi Gang Zhuang, Takehiro Watanabe, Yoshitaro Yoshida
Bulletin of the Japan Society of Precision Engineering 25 103-104 1991年6月
Aluminum nitride (AIN) ceramics decomposes into aluminum vapor and nitrogen gas at about 2790 K. Peculiarly, The aluminum metallic phase is formed in laser processing of AIN ceramics. This is probably caused by the existence of high [ressure Alumi...
This paper describes the influence of tool angles, especially rake angles, on the surface integrity of mirror cutting material. In this study, strain distribution in damaged layer is measured by a newly developed method. This method is applied ele...
This paper describes the basic conditions for the brittle-ductile transition in the ultraprecision machining of brittle materials in order to explain the deformation and fracture mechanism of a sub-surface layer induced by the microinteraction bet...
? 2018 Japan Society for Precision Engineering. All rights reserved. A desktop friction stir spot welding (FSSW) system was designed and developed for the micro joining application. This system consisted of a high-speed air spindle, a PC-controlle...
Wheel scribing techniques were commonly used for glass separation. We have studied on the internal stress field during/after wheel scribing using the photoclastic method. Internal stress data obtained by photoelastic method was integrated data of ...
Laser joining between two non-alkali aluminoborosilicate glass sheets was conducted using vanadate glass frit, which had lower melting point (m. p.) than substrates, as an insert material. In order to investigate the optimal joining conditions, th...
The crack propagation behavior and the internal stress field during mechanical cleavage of non-alkali glass sheets (thickness: 0.7 mm) were visualized by high-speed imaging techniques. At first, the effect of scribing conditions on the fractured s...
In this study, we propose the new equations which predict cutting forces under the conditions of a small feed (2.5μm) and negative approach angle. They are based on Nakayama's equations. According to our previous research, the experimental cutting...
