2004年1月
Low-temperature growth of thin silicon nitride film by electron cyclotron resonance plasma irradiation
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
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- 巻
- 43
- 号
- 1A-B
- 開始ページ
- L47
- 終了ページ
- L49
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1143/JJAP.43.L47
- 出版者・発行元
- JAPAN SOC APPLIED PHYSICS
An amorphous silicon nitride thin film has been fabricated by electron cyclotron resonance plasma irradiation. The growth of the film is carried out by Ar/N-2 mixed plasma irradiation at a low temperature of 400degreesC. It is found that nitrogen partial pressure decisively affects film quality. A SiN film having a structure nearest to stoichiometric construction is obtained by precisely controlling the N-2 mixing ratio at 60%. This implies that the existence of Ar with a suitable partial pressure increases the nitrogen radical concentration in the Ar/N-2 mixed plasma. Under optimum conditions, the as-grown SiN film shows a leakage current more than two orders of magnitude lower than that of thermally grown SiO2 having the same equivalent oxide thickness. A high-resolution transmission electron micrograph shows an atomically flat interface of the Si substrate and SiN film.
- リンク情報
- ID情報
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- DOI : 10.1143/JJAP.43.L47
- ISSN : 0021-4922
- Web of Science ID : WOS:000220092700015