2017年11月
Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
- ,
- ,
- ,
- 巻
- 35
- 号
- 6
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1116/1.4999221
- 出版者・発行元
- A V S AMER INST PHYSICS
A rotational cross-shaped magnetized radio-frequency (RF) sputtering plasma source was developed for uniform circular target utilization. The cross-shaped magnetized RF plasma was attained by inducing a linear E x B-r drift motion using a cruciform arrangement of neodymium magnets, where E and Br are the electric field perpendicular and magnetic field parallel to the target, respectively. A two-dimensional magnetic field simulation clarified that the electrons are strongly magnetized by the Hall parameter at a magnitude 20 times that of the ions. Strong cross-shaped plasma discharges are observed. The temporal evolutions of the ion saturation current were measured by a Langmuir probe at various radial positions, and the time-averaged ion saturation current was found to decrease from the center to the outer area of the target. The target utilization percentage was found to increase from 73.6% to 86.3% when Fe pole pieces were incorporated on the cruciform arrangement of neodymium magnets. Published by the AVS.
- リンク情報
-
- DOI
- https://doi.org/10.1116/1.4999221
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000415685300021&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85034270952&origin=inward
- ID情報
-
- DOI : 10.1116/1.4999221
- ISSN : 0734-2101
- eISSN : 1520-8559
- Web of Science ID : WOS:000415685300021