MISC

2017年11月

Rotational cross-shaped magnetized radio-frequency sputtering plasma source for uniform circular target utilization

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
  • Tsubasa Ide
  • ,
  • Md. Amzad Hossain
  • ,
  • Yutaro Nakamura
  • ,
  • Yasunori Ohtsu

35
6
記述言語
英語
掲載種別
DOI
10.1116/1.4999221
出版者・発行元
A V S AMER INST PHYSICS

A rotational cross-shaped magnetized radio-frequency (RF) sputtering plasma source was developed for uniform circular target utilization. The cross-shaped magnetized RF plasma was attained by inducing a linear E x B-r drift motion using a cruciform arrangement of neodymium magnets, where E and Br are the electric field perpendicular and magnetic field parallel to the target, respectively. A two-dimensional magnetic field simulation clarified that the electrons are strongly magnetized by the Hall parameter at a magnitude 20 times that of the ions. Strong cross-shaped plasma discharges are observed. The temporal evolutions of the ion saturation current were measured by a Langmuir probe at various radial positions, and the time-averaged ion saturation current was found to decrease from the center to the outer area of the target. The target utilization percentage was found to increase from 73.6% to 86.3% when Fe pole pieces were incorporated on the cruciform arrangement of neodymium magnets. Published by the AVS.

リンク情報
DOI
https://doi.org/10.1116/1.4999221
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000415685300021&DestApp=WOS_CPL
URL
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=85034270952&origin=inward
ID情報
  • DOI : 10.1116/1.4999221
  • ISSN : 0734-2101
  • eISSN : 1520-8559
  • Web of Science ID : WOS:000415685300021

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