The sporicidal effects of low pressure radio frequency discharges in oxygen, produced by application of continuous and pulse
modulated radio frequency power, were evaluated. In sterilization experiments, filter paper strips containing Geobacillus
Stearothermophilus endospore, were used as biological indicators. It was studied the sterilization efficiency of RF discharges in
continuous and pulsed regime to established in whitch case the substrate temperature and the sterilization time are lower. The
experimental results showed the relationship between the time needed for a complete killing process and the input power. The
surface temperature of the holder was recorded for both functioning regimes. The discharges produced by changing the
characteristics of the applied pulse (duty cycle and frequency of modulation) modulating the RF signal shows that pulsed RF
plasma is a good method for limiting the heat temperature. The main sterilization effects are attributed to the reactive oxygen
species and ultraviolet radiation generated in reactor during discharges.