論文

1994年6月

超精密軸対称加工品の形状測定に関する研究(第1報)-測定原理とシミュレーション-

精密工学会誌
  • 伊藤 俊治
  • ,
  • 山本 昌治
  • ,
  • 成清 辰生
  • ,
  • 堀内 宰

60
6
開始ページ
867
終了ページ
871
記述言語
日本語
掲載種別
DOI
10.2493/jjspe.60.867
出版者・発行元
公益社団法人精密工学会

A study is presented on measurement of axisymmetrical form generated by ultra-precision machining. At first, sectional curves along concentric circles and diameters are measured by a contact type form measuring equipment. Secondly, these sectional curves are combined on cross points by least square method to compensate measuring errors due to tilts and lifts of the specimen. Consequently, the sectional curves can be evaluated based on the identical basic plane. After that, a curved surface is generated by interpolation from sectional curves and is shown as three dimensional display. The effectiveness of this method is revealed by simulation using actual form obtained by Fizeau interferometer.

リンク情報
DOI
https://doi.org/10.2493/jjspe.60.867
CiNii Articles
http://ci.nii.ac.jp/naid/110001367470
ID情報
  • DOI : 10.2493/jjspe.60.867
  • ISSN : 0912-0289
  • ISSN : 1882-675X
  • CiNii Articles ID : 110001367470
  • identifiers.cinii_nr_id : 1000070231496

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