MISC

1999年

微小接合を考慮した超伝導素子の作製プロセス

木更津工業高等専門学校紀要
  • 石井 孝一

32
32
開始ページ
7
終了ページ
10
記述言語
日本語
掲載種別
出版者・発行元
木更津工業高等専門学校

This paper is a proposal of a new SIS making process. One of a proposal is a method that I easily can wire to a small junction. Another is to be a few and be able do for damage by etching to small junction. This making process is the following method. At first, it make wiring portion and large junction structure. As being next, the portion to have been shaved with etching process fill up to become a same height as another portion. Last process, it make for the very small SIS junction that was connected with for 2 series. By this method, for a flat portion, a making of a SIS junction by an electronic exposure gets possible. And, an influence of etching against SIS junction is once it. Damage by etching gets a few if it is in comparison to a former making process. Further, it thinks that this making process can apply it for a bolometer mixer device making also.

リンク情報
CiNii Articles
http://ci.nii.ac.jp/naid/110007730806
CiNii Books
http://ci.nii.ac.jp/ncid/AA12688974
URL
http://id.ndl.go.jp/bib/4719489
ID情報
  • ISSN : 2188-921X
  • CiNii Articles ID : 110007730806
  • CiNii Books ID : AA12688974

エクスポート
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