1997年5月
方形波パルス無声放電を用いた非平衡プラズマ化学反応の活性酸素種高効率生成への応用
日本機械学会論文集(B編), 63巻609号, pp.1720-1727
- ,
- 巻
- 63
- 号
- 609
- 開始ページ
- 1720
- 終了ページ
- 1727
- 記述言語
- 日本語
- 掲載種別
- DOI
- 10.1299/kikaib.63.1720
- 出版者・発行元
- The Japan Society of Mechanical Engineers
Oxygen atoms play a very importtant role in the atomospheric chemical vapor deposition of silicon dioxide films using tetraethylorthosilicate (TEOS) and ozone. In this study, the efficient generation of active oxygen species included these oxygen atoms has been carried out by use of pulsed silent discharge utilizing fast rising voltage. Discharge and generation characteristics of ozone. which is one of active oxygen species, have been measured experimentally. Generation characteristics of other active oxygen species have been estimated by chemical reaction simulation. As a result, it has been clarified that pulsed silent discharge can achieve highly nonequilibrium plasma conditions and generate active oxygen species efficiently.
- リンク情報
- ID情報
-
- DOI : 10.1299/kikaib.63.1720
- ISSN : 1884-8346
- ISSN : 0387-5016
- J-Global ID : 200902192825853594
- CiNii Articles ID : 130004079963