2016年
Upgrading Multilayer Zone Plate Technology for Hard X-Ray Focusing
XRM 2014: PROCEEDINGS OF THE 12TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY
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- 巻
- 1696
- 号
- 記述言語
- 英語
- 掲載種別
- DOI
- 10.1063/1.4937511
- 出版者・発行元
- AMER INST PHYSICS
Multilayer zone plate (MZP) technology for hard X-ray focusing was upgraded and its focusing performance was evaluated using 20-keV X-rays at the synchrotron beamline (BL24XU) of SPring-8. The MZP consists of MoSi2 and Si layers alternately deposited on a glass fiber by magnetron sputtering so that all zone boundaries satisfy the Fresnel zone configuration. The focused beam was evaluated using knife-edge scanning in which the measured intensity distribution is identical to the line spread function (LSF) in the focal plane. The focused beamsize of about 30 nm was estimated by oscillation peaks observed in the measured LSF according to Rayleigh's criterion.
- リンク情報
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- DOI
- https://doi.org/10.1063/1.4937511
- Web of Science
- https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000371671300017&DestApp=WOS_CPL
- URL
- https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84984548705&origin=inward
- ID情報
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- DOI : 10.1063/1.4937511
- ISSN : 0094-243X
- SCOPUS ID : 84984548705
- Web of Science ID : WOS:000371671300017