SATO Kazuo

J-GLOBAL         Last updated: Jul 25, 2017 at 17:34
SATO Kazuo
Dr. Eng.(The University of Tokyo)

Research Areas


Academic & Professional Experience

Mar 2014
Statutory Auditor, Yokohama National University
Apr 2012
Professor, Aichi Institute of Technology

Committee Memberships

JSME: Japan Society of Mechanical Engineers  Fellow
IEE Japan: Institute of Electrical Engineers of Japan  Senior member
JSPE: Japan Society for Precision Engineering  Fellow
IEEE: Institute of Electric and Electronics Engineers  
JSPE: Japan Society for Precision Engineering  Director of Tokai Chapter
JSPE: Japan Society for Precision Engineering  Councilor
The Japan Society for Precision Engineering  Board Member
IEE Japan: Institute of Electrical Engineers of Japan  
JSME: Japan Society of Mechanical Engineers  Councilor
The Japan Society of Mechanical Engineers  Board Menber

Awards & Honors

2011 Commendation for Science and Technology by the Minister of Education, MEXT
Winner: Kazuo SATO
Technology Award of Japan Society for Precision Engineering
Valued Reviewer, Sensors and Actuators A:Physical
JSME Tokai Entrepreneur Award
Paper Award of Society of Instrumentation and Control Engineers


Proc. Intl. Symp. Micro-NanoMechatronics and Human Science (MHS)   417-419   2010
MEMS needs Science: Innovation lives on in-depth research in Micro/Nano physics
3-4   2010
Viscosity measurement of microliter sample by using MEMS electrostatic resonator
569-572   2010
Development of droplet-based μ-TAS with high efficiency by using magnet wires as sample carrier
505-508   2010
Attached-type flexible flow sensor for air-conditioning network systems
344-348   2010
Thermal type internal force sensor packaged into hollow fiber
322-325   2010
In-situ TEM experiment of tensile tsting for single-crystal-silicon thin film
263-264   2010
Characteristics of thermal type flow sensor under reciprocating flow conditions
5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT, Perth, Australia)   #TP20 (P237)   2010
Implantable flow sensor into airway for laboratory animal
Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT, Perth, Australia)   #TP16 (P236)   2010
Micromachined viscometer using gas-liquid separated resonator
Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT, Perth, Australia)   #CSM7 (269)   2010
Characterization of etching anisotropy in a surfactant-added TMAH solution, and its application to scalloping reduction
Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT,Perth, Australia)   TP4 (P220)   2010
Advanced MEMS applications using orientation dependent adsorption of surfactant molelcules in TMAH solution
Proc. 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT, Perth, Australia)   FT13(p79)   2010
J. Micromechanics and Microengineering   20(6) #065008   2010
Sensors and Actuators A   159(1) 64-68   2010
Proc. Intl. Conf. Micro Electro Mechanical Systems (MEMS), Hong Kong   1091-1094   2010
Advanced wet etch bulk micromachining in {100} silicon wafers
2009 MRS Fall Meeting (Boston)   in print   2009
Extension of 3D Shapes of MEMS Structures Realized by Wet Etching
MNM-1   2009
Experimental verification and theoretical explanation of the effect of surfactant addition to TMAH based etchants for advanced applications in MEMS
150-154   2009
J. Micromechanics and Microengineering   19(10) #105008   2009
Fabrication Methods Based on Wet Bulk Micromachining for the Realization of Advanced MEMS Structures
Proc. 15th International Workshop on the Physics of Semiconductor Devices, NewDelhi   1225-1228   2009
Development and practice of a lecture program with an exercise of body experience -Two years trial of the supplement practice for the lecture "Materials processing"-
184-185   2009
Micro/Nano science uncovering the mysteries of silicon wet etching for the fabrication of MEMS structures
ICMAT (Intl. Conf. on Materials for Advanced Technologies) and IUMRS-ICA (Intl. Union of Materials Research Societies- Intl. Conf. in Asia) 2009, Singapore   #A20613-04466   2009
Selective removal of micro-corrugation by anisotropic wet etching
Proc. Transducers'09, Denver   1865-1868   2009
Surfactant in TMAH for new shapes of silicon MEMS components; its orientation dependent adsorption detected by infrared spectroscopy
Proc. Transducers'09, Denver   751-754   2009
Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiber
Proc. Transducers'09, Denver   1746-1749   2009
Micromachined tube-type of Si droplet generator
Proc. Transducers'09, Denver   386-389   2009
Temperature controlled miniaturized cell in magnetic beads handling system for bio-chemical reaction
Proc. Transducers'09, Denver   382-385   2009
Catheter type of flow sensor for trans-bronchial measurement for lung functions
Proc. Transducers'09, Denver   346-349   2009
Fabrication of monolithic flow sensor on tube structure
Proc. Transducers'09, Denver   184-187   2009
IEEJ Trans. Electrical and Electronic Engineering   4(3) 378-385   2009
Silicon microfluidic channels and microstructures by one step photolithography
Proc. Symp. Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP), Rome   1    2009
Gas-liquid separated resonator for bio-chemical application
Proc. Intl. Conf. Micro Electro Mechanical Systems (MEMS), Sorrento   912-915   2009
Development of fabric-type of tensional force sensor
Proc. Intl. Conf. Micro Electro Mechanical Systems (MEMS), Sorrento   773-776   2009
Proc. Intl. Conf. Micro Electro Mechanical Systems (MEMS), Sorrento   495-498   2009

Books etc

Silicon Wet Bulk Micromachining for MEMS
PAL Prem, SATO Kazuo (Part:Joint Work)
Pan Stanford Publishing Pte. Ltd.   Apr 2017   ISBN:978-981-4613-72-9
Comprehensive Microsystems
Elsevier   2007   
訳:シリコンマイクロ加工の基礎(M. Elwenspoek, H. Jansen著)
シュプリンガー・フェアラーク東京   2001   


Modeling of Anisotropic Etching of Silicon and the Effects of Ions in Solution
2007 - 2009
Physical Chemistry of Anisotropic Wet-Etching of Silicon Applied for MEMS
2005 - 2007
Standardization of methods characterizing mechanical properties of micromachine materials
2002 - 2004
Process modelling of anisotropic chemical etching of silicon
1998 - 1998
Atomic scale simulation of micromachining process of single crystal silicon
1997 - 1997

Research Grants & Projects

Chemical Anisotropic Etching of Single Crystal Silicon
Project Year: 1983   
Study on Evaluation of Mechanical Properties of Thin Film Materials
Project Year: 1994   
Study on an Elctrostatically Driven Film Actuator and Its Applications to Micro mechanical Devices