論文

査読有り
2016年6月

Pulse number controlled laser annealing for GeSn on insulator structure with high substitutional Sn concentration

APPLIED PHYSICS LETTERS
  • Kenta Moto
  • ,
  • Ryo Matsumura
  • ,
  • Taizoh Sadoh
  • ,
  • Hiroshi Ikenoue
  • ,
  • Masanobu Miyao

108
26
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1063/1.4955059
出版者・発行元
AMER INST PHYSICS

Crystalline GeSn-on-insulator structures with high Sn concentration (>8%), which exceeds thermal equilibrium solid-solubility (similar to 2%) of Sn in Ge, are essential to achieve high-speed thin film transistors and high-efficiency optical devices. We investigate non-thermal equilibrium growth of Ge1-xSnx (0 <= x <= 0.2) on quartz substrates by using pulsed laser annealing (PLA). The window of laser fluence enabling complete crystallization without film ablation is drastically expanded (similar to 5 times) by Sn doping above 5% into Ge. Substitutional Sn concentration in grown layers is found to be increased with decreasing irradiation pulse number. This phenomenon can be explained on the basis of significant thermal non-equilibrium growth achieved by higher cooling rate after PLA with a lower pulse number. As a result, GeSn crystals with substitutional Sn concentration of similar to 12% are realized at pulse irradiation of single shot for the samples with the initial Sn concentration of 15%. Raman spectroscopy and electron microscopy measurements reveal the high quality of the grown layer. This technique will be useful to fabricate high-speed thin film transistors and high-efficiency optical devices on insulating substrates. Published by AIP Publishing.

リンク情報
DOI
https://doi.org/10.1063/1.4955059
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000379178200022&DestApp=WOS_CPL
URL
http://orcid.org/0000-0001-6988-5597
ID情報
  • DOI : 10.1063/1.4955059
  • ISSN : 0003-6951
  • eISSN : 1077-3118
  • ORCIDのPut Code : 35022374
  • Web of Science ID : WOS:000379178200022

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