Regularly aligned arrays of magnetic nano dots buried in silicon wafers have been fabricated using damascene technique with the help of electron beam lithography. Arrays of square, rectangular, cross-shaped and Y-shaped structures of submicron size have been obtained. Spin distributions have been observed by means of magnetic force microscopy and analyzed by a micromagnetic simulation with Landau-Lifshitz-Gilbert equations. Importance of magnetostatic interactions working between adjacent dots has been elucidated. (C) 2006 Elsevier B.V. All rights reserved.