HORIUCHI Toshiyuki

J-GLOBAL         Last updated: Apr 4, 2018 at 10:24
 
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Name
HORIUCHI Toshiyuki
Degree
(BLANK)

Research Interests

 
 

Research Areas

 
 

Academic & Professional Experience

 
 
   
 
Tokyo Denki University School of Engineering, Department of Mechanical Engineering
 

Education

 
 
 - 
1970
Faculty of Engineering, The University of Tokyo
 

Misc

 
Toshiyuki Horiuchi
Japanese Journal of Applied Physics   35(12A) 6328-6333   1996
Sub-100nm space pattern replication by using a cross-sectioned x-ray mask
MICROELECTRONIC ENGINEERING, ELSEVIER SCIENCE B. V, Netherlands   (30) 219-222   1996

Research Grants & Projects

 
Research on Ultra-fine Patterning Technology
Research on Micro Machine
Research on Small Hovering Robots