MISC

2008年

Lens System Adjustment in Semiconductor Lithography Equipment - Optimization for Lens Groups Rotation

JOURNAL OF ADVANCED MECHANICAL DESIGN SYSTEMS AND MANUFACTURING
  • Yuji Shinano
  • ,
  • Youzou Fukagawa
  • ,
  • Yoshimi Takano
  • ,
  • Toshiyuki Yoshihara

2
5
開始ページ
844
終了ページ
852
記述言語
英語
掲載種別
DOI
10.1299/jamdsm.2.844
出版者・発行元
JAPAN SOC MECHANICAL ENGINEERS

In this paper, we address the problem of lens aberration adjustment for lenses of semiconductor lithography equipment. The objective of aberration adjustment is to minimize the maximum value of aberration in any part of the images that are projected on the wafer. Formerly, an approximate solution method has been used, which is based on a brute force search for a subset of all cases. However, using that method, computational times are often long and a faster solution method is necessary. Nowadays, owing to significant progress in mathematical programming research, MIP(Mixed Integer Programming) solvers can reach an optimal solution quite fast. That is why, in this paper, we propose an exact solution method based on 0-1 MIP, which addresses the same "lens aberration" problem with the same objective of minimizing maximum absolute value of lens aberration. In real-world 9 instances, our solution method improves maximum aberration values by 18% to 56% over similar results from conventional solution methods.

リンク情報
DOI
https://doi.org/10.1299/jamdsm.2.844
CiNii Articles
http://ci.nii.ac.jp/naid/130000080727
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000270666400002&DestApp=WOS_CPL
ID情報
  • DOI : 10.1299/jamdsm.2.844
  • ISSN : 1881-3054
  • CiNii Articles ID : 130000080727
  • Web of Science ID : WOS:000270666400002

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