論文

2020年

Roll/Pitch Rate Integrating MEMS Gyroscope Using Dynamically Balanced Dual-Mass Resonator

2020 7TH IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (INERTIAL 2020)
  • Shihe Wang
  • ,
  • Muhammad Salman Al Farisi
  • ,
  • Takashiro Tsukamoto
  • ,
  • Shuji Tanaka

記述言語
英語
掲載種別
研究論文(国際会議プロシーディングス)
出版者・発行元
IEEE

An in-plane and out-of-plane 2-axis resonator is required for a roll/pitch rate integrating gyroscope (RIG), which is much more challenging in design and fabrication compared with an in-plane 2-axis resonator used in a yaw RIG. In this study, we propose a dynamically balanced out-of-plane resonator to increase the out-of-plane quality factor (Q-factor). A balanced dual-mass structure is designed to reduce the torque applied to the supporting substrate, and thus increase the Q-factor of the out-of-plane mode. Design optimization for frequency matching, reducing mechanical deformation and increasing Q-factor through finite element method (FEM) simulation has been demonstrated. Manufacturing method of the device employing Au-Au thermo-compression bonding has been developed. The fabricated resonator oscillated at around 4380 Hz after remove by using an externally stacked piezoelectric actuator and laser Doppler vibrometer (LDV).

リンク情報
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000582416900041&DestApp=WOS_CPL
ID情報
  • ISSN : 2377-3464
  • Web of Science ID : WOS:000582416900041

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