2018年12月
Fully Differential Single Resonator FM Gyroscope Using CW/CCW Mode Separator
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
- ,
- 巻
- 27
- 号
- 6
- 開始ページ
- 985
- 終了ページ
- 994
- 記述言語
- 英語
- 掲載種別
- 研究論文(学術雑誌)
- DOI
- 10.1109/JMEMS.2018.2874060
- 出版者・発行元
- IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
This paper reports a fully differential frequency modulated (FM) gyroscope where the superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. The CW and CCW mode detectors were developed to control both modes simultaneously on the resonator. A frequency and quality factor mismatch compensation method was developed to perfectly orthogonalize these two modes. A FM gyroscope operation with excellent linearity between applied angular rate and frequency difference was demonstrated. The temperature coefficient of scale factor was as small as -52 +/- 136 ppm/degrees C. The scale factor and bias were stable over 700 hours with the drift less than 0.062 +/- 0.100 ppm/hr and 31 +/- 121 ppm/hr, respectively.
- リンク情報
- ID情報
-
- DOI : 10.1109/JMEMS.2018.2874060
- ISSN : 1057-7157
- eISSN : 1941-0158
- Web of Science ID : WOS:000451944800007