Main results obtained in this study for the micro-displacement characteristics are as follows ; (1) Experimental values of stiffness r_g are close to thats calculated by two contact models. (2) However, experimental values of displacement δ_<cmax> are larger than thats calculated by the same models. (3) For contacts of S25C/SiC and Si_3N_4/Si_3N_4 both experimental results of r_g and δ_<cmax> are larger for the S25C/SiC contact than thats for the Si_3N_4/Si_3N_4 contact.