| | HABUKA Hitoshi Last updated: Mar 1, 2019 at 02:41 | Name | HABUKA Hitoshi |
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E-mail | habuka-hitoshi-ng ynu.ac.jp |
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Affiliation | Yokohama National University |
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Section | Faculty of Engineering Division of Materials Science and Chemical Engineering |
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Academic & Professional Experience Apr 2002 - Today Professor, Yokohama National University Apr 2000 - Mar 2002 Associate Professor, Yokohama National University Apr 1986 - Mar 2000 Shin-Etsu Chemical Co., Ltd. Isobe R&D Center Education - 1996 Department of chemical engineering, Graduate School, Division of Engineering, Hiroshima University - 1981 Department of chemistry, Graduate School, Division of Natural Science, Kyoto University - 1979 Department of chemistry, Faculty of Science, Niigata University Published Papers Hitoshi Habuka,Mitsuko Muroi,Miya Matsuo,Yuuki Ishida,Shiro Hara,Shin-Ichi Ikeda Materials Science in Semiconductor Processing 88 192-197 Dec 2018 [Refereed] Yuuki Ishida,Shin-Ichi Ikeda,Shiro Hara,Hitoshi Habuka,Kenta Irikura,Mitsuko Muroi,Ayami Yamada,Miya Matsuo Materials Science in Semiconductor Processing 87 13-18 Nov 2018 [Refereed] Ayami Yamada, Mitsuko Muroi, Toru Watanabe, Ayumi Saito, Ayumi Sakurai and Hitoshi Habuka Semiconductor Science and Technology 33(9) Jul 2018 [Refereed] Miya Matsuo,Kento Miyazaki,Hitoshi Habuka,Akihiro Goto ECS Journal of Solid State Science and Technology 7(9) N123-N127 2018 [Refereed] Toru Watanabe, Ayami Yamada, Ayumi Saito, Ayumi Sakurai, Hitoshi Habuka Materials Science in Semiconductor Processing 72 134-138 Dec 2017 [Refereed] Books etc Polycrystalline Films Hitoshi Habuka (Part:Joint Work) Nova Publisher 2017 ISBN:9781536108187 |
Silicon Epitaxial Reactor for Minimal Manufacturing Hitoshi Habuka "Epitaxy" Editor Miao Zhong 2017 ISBN:9789535152514 |
Advances in Medicine and Biology Samar Soliman, Lavanya Elangovan, Yong Du, and Chandra Mohan, Parthasarathy Arumugam and Joon Myong Song, Xiu Liu and Yongzhen Gong, Ana Pilipović and MihaljPoša, Hitoshi Habuka, Spyridoula N. Papoutsi, Barbara Wolgamuth, Michelangelo Maestri, Enrica Bonanni, Nicholas-Tiberio Economou, Mélissa Simard, Isabelle Lorthois, Maxim Maheux, Bryan Roy, Louis-Charles Masson, Alexandre Morin, and Roxane Pouliot, Natavudh Townamchai and Somchai Eiam-Ong (Part:Joint Work, Chapter 5, "Organic Molecules Interaction Evaluated by In Situ Measurement and Rate Theory") Nova Science Publishers Sep 2016 ISBN:9781634855679 |
Hitoshi Habuka (Part:Joint Work, Chapter 4, "In Situ Observation of Chemical Vapour Deposition Using Langasite Crystal Microbalance") InTech Sep 2016 ISBN:9789535125730 |
Advances in Materials Science Research Giuseppe Acciani, Hitoshi Habuka, Yuji Aoki, Masataka SugimotoYunxiang Tong, Yufeng Zheng, Li Li, Dmitry V. Gunderov, Min-Chie Chiu, Long-Jyi Yeh, Yao-Jen Lai, Mariyam Adnan, J. Jeyakodi Moses (Part:Joint Work, Chapter 2, "Chlorine Trifluoride Dry Etching for Silicon Carbide Material Production Process") Nova Science Publishers Aug 2016 ISBN:9781634831819 |
Conference Activities & Talks Increase in Silicon Film Deposition Rate in a SiHCl3-SiHx-H2 System A. Saito, A. Yamada, A. Sakurai and H. Habuka 18th International Conference on Crystal Growth and Epitaxy Aug 2016 Transport Phenomena in a Slim Vertical CVD Reactor for Minimal Manufacturing A. Yamada, N. Li, M. Matsuo, H. Habuka, Y. Ishida, S. Ikeda and S. Hara 18th International Conference on Crystal Growth and Epitaxy Aug 2016 Etching rate behavior of 4H-silicon carbide epitaxial film using chlorine trifluoride gas Asumi Hirooka, Hitoshi Habuka, Tomohisa Kato International Conference on Silicon Carbide and Related Materials 2015 Oct 2015 In Situ cleaning process of silicon carbide epitaxial reactor for removing film-type deposition formed on susceptor Kosuke Mizuno, Hitoshi Habuka, Yuuki Ishida, Toshiyuki Ohno International Conference on Silicon Carbide and Related Materials 2015 Oct 2015 In-situ observation of chemical vapor deposition using SiHCl3 and BCl3 Gases A. Saito, K. Miyazaki, M. Matsui and H. Habuka EuroCVD20 Jul 2015 Works Patent on measurement method for organic species concentration The Others 2000 Patent surface cleaning Process of silicon The Others 1999 Patent on Surface condition for crystal growth The Others 1997 Patent on process for obtaining uniform thickness of crystal film The Others 1996 Patent on producing light emitting cliodes The Others 1989 Others Nov 2004 Etching technology for etching various materials Apr 2004 Analysis of transport phenomena in a thin film formation reactor Jul 2001 Semiconductor epitaxial growth reactor technology |
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