基本情報

J-GLOBAL ID
200901047006150009
researchmap会員ID
5000017450

委員歴

  1

論文

  1
  • M Sugiyama, T Iino, T Nakajima, T Tanaka, H Itoh, J Aoyama, Y Egashira, K Yamashita, H Komiyama, Y Shimogaki
    FUNDAMENTAL GAS-PHASE AND SURFACE CHEMISTRY OF VAPOR-PHASE DEPOSITION II AND PROCESS CONTROL, DIAGNOSTICS, AND MODELING IN SEMICONDUCTOR MANFACTURING IV 2001(13) 284-291 2001年  査読有り