MISC

査読有り
2013年8月

Multifunctional TEM-specimen holder equipped with a piezodriving probe and an electron irradiation port

Journal of Electron Microscopy
  • Daisuke Shindo
  • ,
  • Satoshi Suzuki
  • ,
  • Kuniaki Sato
  • ,
  • Zentaro Akase
  • ,
  • Yasukazu Murakami
  • ,
  • Kazuya Yamazaki
  • ,
  • Yuuta Ikeda
  • ,
  • Tomohisa Fukuda

62
4
開始ページ
487
終了ページ
490
DOI
10.1093/jmicro/dft021

The charging effect due to electron irradiation in an electron microscope has been studied so far with incident electrons. Here we report on a new specimen holder to control the charging effect by using electrons emitted from an irradiation port in the holder while maintaining a constant intensity of the incident electron beam. Details of the charging effect, such as electric field variation, are expected to be investigated by electron holography. The new specimen holder was developed by modifying a double-probe piezodriving specimen holder to introduce an electron irradiation port in one of its two arms. As a result, the new modified specimen holder consists of a piezodriving probe and an electron irradiation port, both of which can be controlled in three dimensions, using piezoelectric elements and micrometers. We demonstrate that variations in the charging effect for epoxy resin and surface contamination can be observed by electron holography. © The Author 2013. Published by Oxford University Press [on behalf of The Japanese Society of Microscopy]. All rights reserved.

リンク情報
DOI
https://doi.org/10.1093/jmicro/dft021
Scopus
https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84883274269&origin=inward
Scopus Citedby
https://www.scopus.com/inward/citedby.uri?partnerID=HzOxMe3b&scp=84883274269&origin=inward

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