論文

査読有り
2018年4月1日

Development of a secondary electron energy analyzer for a transmission electron microscope

Microscopy
  • Hideyuki Magara
  • ,
  • Takeshi Tomita
  • ,
  • Yukihito Kondo
  • ,
  • Takafumi Sato
  • ,
  • Zentaro Akase
  • ,
  • Daisuke Shindo

67
2
開始ページ
121
終了ページ
124
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1093/jmicro/dfx126
出版者・発行元
Oxford University Press

A secondary electron (SE) energy analyzer was developed for a transmission electron microscope. The analyzer comprises a microchannel plate (MCP) for detecting electrons, a coil for collecting SEs emitted from the specimen, a tube for reducing the number of backscattered electrons incident on the MCP, and a retarding mesh for selecting the energy of SEs incident on the MCP. The detection of the SEs associated with charging phenomena around a charged specimen was attempted by performing electron holography and SE spectroscopy using the energy analyzer. The results suggest that it is possible to obtain the energy spectra of SEs using the analyzer and the charging states of a specimen by electron holography simultaneously.


リンク情報
DOI
https://doi.org/10.1093/jmicro/dfx126
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000434061300007&DestApp=WOS_CPL

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