Satoshi YAMAUCHI
(山内 智)
Modified on: 03/15
Profile Information
- Affiliation
- Professor, Graduate School of Science and Engineering (Engineering) Department of Materials Science and Engineering, Ibaraki University
- Degree
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Dr. Engineering(Tohoku University)
- Researcher number
- 30292478
- J-GLOBAL ID
- 200901008364965671
- researchmap Member ID
- 5000064191
Research Interests
2Research Areas
4Research History
2-
Apr, 1997
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Apr, 1991 - Mar, 1997
Education
1Awards
1Major Papers
64-
Study of Cu-growth feature by selective low-pressure chemical vapor deposition using a CuI precursorJapanese Journal of Applied Physics, SH1002 1-5, Apr 19, 2023 Peer-reviewedCorresponding author
Misc.
20-
Proc. International Workshop on Optical Terahertz Science and Technology 2013, Th3-38, Apr 4, 2013 Peer-reviewed
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Proc. 3rd International Symposium on Terahertz Nanoscience, 54, Dec 12, 2012 Peer-reviewed
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Proc. 3rd International Symposium on Terahertz Nanoscience, 56, Dec 12, 2012 Peer-reviewed
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Proc. International Symposium on Terahertz Nanoscience, 204, Sep, 2011 Peer-reviewed
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Proc. 21th International Conference on Optical Fiber Sensors, 7753 8011-31, Aug, 2011 Peer-reviewed
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Proc. 21th International Conference on Optical Fiber Sensors, 7753 7753-186, Jun, 2011 Peer-reviewed
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2009 34TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES, VOLS 1 AND 2, M5E27.0371-+, Sep 22, 2009 Peer-reviewed
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Join 32nd int’l Conf. on Infrared and Millimeter waves and 15th int’l Conf., 664-665-+, Sep, 2007 Peer-reviewed
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第１４回電気学会東京支部茨城支所研究発表会 講演予稿集, 68, Dec 2, 2006
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第４４回CVD研究会 講演予稿集, Nov 30, 2006 Invited
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18th International Conference on Optical Fiber Sensors, TuE30, Oct 23, 2006 Peer-reviewed
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Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing, Jan 26, 2005
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Plasma Science Symposium 2005/The 22nd Symposium on Plasma Processing, Jan 26, 2005
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Record of Alloy Semiconductor Phys. and Elect. Symp., 12 297-302, Oct, 1993
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Record of Alloy Semiconductor Phys. and Elect. Symp., 11 175-180, Oct, 1992
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Proc. Jpn. Symp. Plasma Chemistry, 4 267-272, Jul, 1991
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Record of Alloy Semiconductor Phys. and Elect. Symp., 9 111-116, Oct, 1990
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Record of Alloy Semiconductor Phys. and Elect. Symp., 8 407-414, Oct, 1989
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Record of Alloy Semiconductor Phys. and Elect. Symp., 7 471-478, Oct, 1988
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Proc. Jpn. Symp. Plasma Chemistry, 1 67-72, Jul, 1988
Books and Other Publications
2-
サイエンス＆テクノロジー, Sep 27, 2018 (ISBN: 9784864281706)
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情報機構, Aug 30, 2007 (ISBN: 9784901677837)
Presentations
41-
Advanced Metallization Conference 2023 32nd Asian Session, Oct 12, 2023
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E-MRS Fall-Meeting 2023, Sep 19, 2023, European Materials Research Society
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第30回電気学会茨城支所研究発表会, Dec 17, 2022, 電気学会
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ハロゲン利用ミニシンポジウム, Nov 25, 2022, 臭素化学懇話会 Invited
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Advanced Metallization Conference 2022 31st Asian Session, Oct 13, 2022, 応用物理学会 シリコンテクノロジー分科会
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第83回応用物理学会秋季学術講演会, Sep 21, 2022, 日本応用物理学会
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第69回 応用物理学会 春季学術講演会, Mar 25, 2022, 日本応用物理学会
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第29回電気学会東京支部茨城支所研究発表会, Dec 11, 2021, 電気学会
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第８０回応用物理学会秋季学術講演会, Sep 18, 2019, 日本応用物理学会
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平成 30 年度 電気学会東京支部 茨城支所 研究発表会, Nov 17, 2018, 電気学会
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第２５回電気学会東京支部茨城支所研究発表会, Nov 18, 2017, 電気学会
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第２５回電気学会東京支部茨城支所研究発表会, Nov 18, 2017, 電気学会
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第２５回電気学会東京支部茨城支所研究発表会, Nov 18, 2017, 電気学会
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TSV応用研究会, Oct 4, 2016, TSV応用研究会 Invited
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第23回電気学会東京支部茨城支所研究発表会, Nov 28, 2015, 電気学会東京支部茨城支所
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第74回応用物理学会秋季学術講演会, Sep 18, 2013, 応用物理学会
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第74回応用物理学会秋季学術講演会, Sep 17, 2013, 応用物理学会
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第20回電気学会東京支部茨城支所研究発表会, Nov 24, 2012
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第７３回応用物学会学術講演会, Sep 13, 2012
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第７３回応用物学会学術講演会, Sep 11, 2012
Professional Memberships
5Research Projects
7-
研究成果展開事業, 可能性検証, 科学技術振興機構(JST), Oct, 2023 - Mar, 2025
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Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (C), Japan Society for the Promotion of Science, Apr, 2022 - Mar, 2025
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共同研究, 東京エレクトロン株式会社, Feb, 2020 - Mar, 2023
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基盤研究(C), Apr, 2017 - Mar, 2020
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Grants-in-Aid for Scientific Research, Grant-in-Aid for Challenging Exploratory Research, Japan Society for the Promotion of Science, Apr, 2012 - Mar, 2015
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Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (B), Japan Society for the Promotion of Science, 2004 - 2006
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Grants-in-Aid for Scientific Research, Grant-in-Aid for Scientific Research (C), Japan Society for the Promotion of Science, 2001 - 2002