権太聡 (Satoshi Gonda) - マイポータル

基本情報

所属: 独立行政法人産業技術総合研究所計測標準研究部門長さ計測科幾何標準研究室

J-GLOBAL ID: 200901042732508948
researchmap会員ID: 5000086348

外部リンク: http://www.aist.go.jp/RESEARCHERDB/cgi-bin/worker_detail.cgi?call=namae&rw_id=S18746950

MISC

Nanometric lateral scale development using an atomic force microscope with directly traceable laser interferometers

I. Misumi, S. Gonda, O. Sato, K. Sugawara, K. Yoshizaki, T. Kurosawa, T. Takatsuji

MEASUREMENT SCIENCE AND TECHNOLOGY 17(7) 2041-2047 2006年7月
Interference effect in optical beam deflection detection system of dynamic AFMs and its influence on micro-profile measurement

MEASUREMENT SCIENCE & TEMHNOLOGY 2006年
Nonlinear and hysteretic influence of piezoelectric actuators in AFMs on lateral dimension measurement

QX Huang, S Gonda, Misumi, I, O Sato, T Keem, T Kurosawa

SENSORS AND ACTUATORS A-PHYSICAL 125(2) 590-596 2006年1月
Reliability of parameters of associated base straight line in step height samples: Uncertainty evaluation in step height measurements using nanometrological AFM

Misumi, I, S Gonda, T Kurosawa, Y Azuma, T Fujimoto, Kojima, I, T Sakurai, T Ohmi, K Takamasu

PRECISION ENGINEERING-JOURNAL OF THE INTERNATIONAL SOCIETIES FOR PRECISION ENGINEERING AND NANOTECHNOLOGY 30(1) 13-22 2006年1月
Sub-hundred nanometre pitch measurements using an AFM with differential laser interferometers for designing usable lateral scales

Misumi, I, S Gonda, QX Huang, T Keem, T Kurosawa, A Fujii, N Hisata, T Yamagishi, H Fujimoto, K Enjoji …

MEASUREMENT SCIENCE AND TECHNOLOGY 16(10) 2080-2090 2005年10月
Pitch measurement of 150 nm 1D-Grating standards using an nanometrological atomic force microscope

産総研計量標準報告 3(4) 499-506 2005年
Simple and real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system

KEEM Taeho, KEEM Taeho, GONDA Satoshi, GONDA Satoshi, MISUMI Ichiko, MISUMI Ichiko, HUANG Qianxiang, HUANG Qianxiang, KUROSAWA Tomizo, KUROSAWA Tomizo

APPLIED OPTICS 44(17) 3492-3498 2005年
Impacts of probe-tip tilt on scanning probe microscopy

F Mizuno, Misumi, I, S Gonda, T Kurosawa

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B 22(6) 3394-3398 2004年11月
Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems

産総研計量標準報告 3(3) 365-370 2004年
Atomic-resolution measurements with a new tunable diode laser-based interferometer

RM Silver, H Zou, S Gonda, B Damazo, J Jun, C Jensen, L Howard

OPTICAL ENGINEERING 43(1) 79-86 2004年1月
Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems

KEEM T, GONDA S, MISUMI I, HUANG Q, KUROSAWA T

APPLIED OPTICS 43(12) 2443-2448 2004年
Pitch measurement of 150 nm 1D-Grating standards using an nanometrological atomic force microscope

International Journal of Precision Engineering and Manufacturing 5(3) 19-25 2004年
Submicrometre-pitch intercomparison between optical ditiraction, scanning electron microscope and atomic force microscope

L Misumi, S Gonda, T Kurosawa, Y Tanimura, N Ochiai, JI Kitta, F Kubota, M Yamada, Y Fujiwara, Y Nakayama …

MEASUREMENT SCIENCE AND TECHNOLOGY 14(12) 2065-2074 2003年12月
Dependence of morphology on miscut angle for Si(111) etched in NH4F

J Fu, H Zhou, J Kramar, R Silver, S Gonda

APPLIED PHYSICS LETTERS 82(18) 3014-3016 2003年5月
Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

Misumi, I, S Gonda, T Kurosawa, K Takamasu

MEASUREMENT SCIENCE AND TECHNOLOGY 14(4) 463-471 2003年4月
Uncertainty in pitch measurements of one-dimensional grating standards using a nanometrological atomic force microscope

産総研計量標準報告 2(2) 207-215 2003年
Uncertainty in measurements of micro-patterned thin film thickness using Nanometrological AFM - Reliability of parameters for base straight line -

産総研計量標準報告 2(2) 217-222 2003年