SHOJI, Shuichi

SHOJI, Shuichi

J-GLOBAL         Last updated: Nov 6, 2019 at 03:19
SHOJI, Shuichi
Waseda University
Faculty of Science and Engineering School of Fundamental Science and Engineering
Job title
Research funding number


Shuichi Shoji was born in Miyagi, Japan in 1956. He received his BS, MS and PhD. degree in electronic engineering from Tohoku University, Sendai, Miyagi, Japan in 1979, 1981 and 1984 respectively. His interest was chemical micro sensors based on Si semiconductor device technology and he developed tens micron tip size Ion Sensitive Field Effect Transistor (ISFET) for detecting biological cell level ion concentrations. He had been an assistant professor in Faculty of Engineering of Tohoku University from 1984. He developed a small sized passive flow cell for continuous blood gas analysis using Si micro sensors. He also fabricated pressure micro sensors and micro voltage detector including simple signal amplified integrated circuits by Si IC technologies. In the middle of 1980’s, he developed micro flow devices, microvalves and micropumps, using Si micromachining technologies and applied the microvalves for a micro blood gas analysis system. He was a researcher of the University of Neuchatel, Switzerland from 1990 to 1991 and a visiting scientist at Massachusetts Institute of Technology in 1991. During his stay in Neuchatel, he was involved in the Swiss national research program on Micro Total Analysis Systems. He was an associate professor of Tohoku University from 1992.
In 1994 he moved to Faculty of Science and Engineering of Waseda University as an associate professor. His main interests were micro flow devices for chemical and biochemical applications and fabrications of 3D microstructures. From 1997 he is a professor of Waseda University. He was conference general Co-chairs of IEEE Micro Electromechanical Systems: MEMS in 1997 and Micro Total Analysis Systems: MicroTAS in 2002. He is currently a professor of Department of Electronic & Photonic Systems, and Major in Nano-science and Nano-engineering, Waseda University. He was an international stirring committee member of International Conference on Solid-State Sensors, Actuators and Microsystems: Transducers from 2009 to 2015, a Program Vice-Chair (Asia region) for Transducers’2011 and Transducers' 2015 which were held in Beijing and in Alasca and a Program Chair for Transducers'2017 in Kaohsiung. He was a president of Sensors & Micromachines Society , the Institute of Electrical Engineering of Japan from 2012 to 2014. His current interests are fabrications of 3D micro/nano structures of Si, Glass, polymers etc. and integration of these structures for functional systems. Main applications of these technologies are chemical/biochemical and medical applications. He developed micro flow devices and systems for singles cell level detection and analysis. He is one of the frontiers of MEMS and MicroTAS, specially a reading researcher of micro flow devices and systems.

Research Interests


Awards & Honors

Jul 2019
Introduction of the Study on Moisture Adsorption Characteristics of Woody Carbon Material, Best Student Poster Award, The 10th Japan-China-Korea Joint Conference on MEMS/NEMS 2019
Winner: N. Takahashi, H. Kuwae, S. Shoji, J. Mizuno
Apr 2019
Cu-Cu Quasi-Direct Bonding with Atomically Thin-Au and Pt Intermediate Layer Using Atomic Layer Deposition, IEEE EPS Japan Chapter Young Award, 2019 International Conference on Electronics Packaging (ICEP 2019)
Winner: H. Kuwae, K. Yamada, W. Momose, S. Shoji, J. Mizuno
Apr 2019
Study of Low-Residual Stress Amorphous Film Deposition Method for LiTaO3/Quarts or LiNbO3/Quarts Bonding toward 5G Surface Acoustic Wave Devices, IEP Poster Award of ICEP 2019」, 2019 International Conference on Electronics Packaging (ICEP 2019)
Winner: A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno
Mar 2019
Water-Electrokinetic Energy Harvester Using Flexible Woody Carbon Film, CIAiS International Symposium 2019 Best Poster Award
Winner: S. Maeda, H. Kuwae, S. Shoji, J. Mizuno
Oct 2017
Effects of Surface Modification on Woody Carbon Materials by Vacuum Ultraviolet Treatment, 2017 Taiwan-Japan Workshop on Electronic Interconnection I Best Oral Presentation Award
Winner: H. Kuwae, K. Mizokami, S. Maeda,.S. Shoji, J. Mizuno

Published Papers

D.H. Yoon, Y. Nozaki, D. Tanaka, T. Sekiguchi, S. Shoji
Micromachines 2019   10(9) 613   Sep 2019   [Refereed]
D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji
Micromachines   9(10)    Oct 2018   [Refereed]
T. Kasahara, R. Ishimatsu, H. Kuwae, S. Shoji, J. Mizuno
Japanese Journal of Applied Physics   57(12) 128001-1-128001-4   Oct 2018   [Refereed]
Structural Formation of Oil-in-Water (O/W) and Water-in-Oil-in-Water (W/O/W) Droplets in PDMS Device Using Protrusion Channel without Hydrophilic Surface Treatment
D.H. Yoon, D. Tanaka, T. Sekiguchi, S. Shoji
Micromachines 2018   9(9)    Sep 2018   [Refereed]

Books etc

㈱シーエムシー出版   Mar 2014   
㈱テクノタイムズ社   Mar 2013   
ナノインプリントの開発とデバイス応用」(第12章4 実装技術 及び、第14章2 マイクロTAS)
シーエムシー出版   Oct 2011   
Microfluidics, Topics in Current Chemistry 304
S. Shoji, K. Kawai
Springer-Verlag Berlin Heidelberg   Apr 2011   
シーエムシー出版   Mar 2010   

Conference Activities & Talks

Sequential Formation of Daughter Droplets by Breakup of Microdroplets into Bypass Channel
S. Hattori, D.H. Yoon, Y. Nozaki, T, Isano, H. Yamagata, H. Fujita, T. Sekiguchi, S. Shoji
The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)   29 Oct 2019   
Establishment of Labo-In-A-Microdroplet for Azo Compound Synthesis
D. Tanaka, S. Sawai, T. Sugaya, Y. Nozaki, D.H. Yoon, T. Isano, H. Yamagata, H. Fujita, T. Sekiguchi, T. Akitsu, S. Shoji
The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)   28 Oct 2019   
Simultaneous Microdroplets Generation by Tall Breakup Induced with Multi-Branch Channel
S. Kajiya, D.H. Yoon, Y. Nozaki, T. Isano, H. Yamagata, H. Fujita, T. Sekiguchi, S. Shoji
The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS 2019)   28 Oct 2019   
LiTaO3/Quarts Bonding with Low-Residual-Stress Al2O3 Amorphous Intermediate Layer for 5G Surface Acoustic Wave Devices
A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno
14th International Microsystems, Packaging, Assembly and Circuits Technology Conference (IMPACT-IAAC 2019)   25 Oct 2019   
Low-Residual Stress ALD-AI2O3 Intermediate Layer for LiTaO3/Quarts Combined Surface Acoustic Wave Substrate
A. Tezuka, H. Kuwae, K. Yamada, S. Shoji, S. Kakio, J. Mizuno
2019 Taiwan-Japan Workshop on Electronic Interconnection III   22 Oct 2019   

Association Memberships


Research Grants & Projects

Advanced Micro Fluidic Engineering and Its Applications for High Sensitive Quantitative Measurements of Biomolecules
Project Year: May 2011 - Mar 2016
In this study, the noble microfluidic device technology was developed in order to enable the optical high sensitive quantitative measurement of the micro luminescent sample as follows. 1) The micro droplet manufacturing technology of the various s...
Project Year: 2008 - 2012
Based on the researches for development of functional materials with the control of solid-liquid interface and for development of devices with the practical use of nano- and meso-structures and phenomena at the interface, the establishment of Elec...
Project Year: 2004 - 2006
In recent one of the most active area of Micro Total Analysis Systems (μTAS) or Lab-on-a-Chip (LOC), DNA, Protein analysis methods and devices have been improved. However, traditional sample preparations before analysis are required in many cases....
Project Year: 2003 - 2005
The objective of this research was to develop novel nanofabrication processes of metal nanostructures trough electrochemical approaches. Especially, control and utilization of the nonlinear diffusion of the species, which is unique to the electroc...
Project Year: 2001 - 2003
Nano/micro flow systems open up the new possibilities for chemical and biochemical analysis and synthesis. For the design of nano/micro flow systems LSI designing concepts is applicable considering the symmetries between the electric devices and t...


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