MISC

査読有り
2011年

Shear piezoelectric coefficient d(15) of c-axis oriented epitaxial Pb(Zr,Ti)O-3 films

2011 INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS (ISAF/PFM) AND 2011 INTERNATIONAL SYMPOSIUM ON PIEZORESPONSE FORCE MICROSCOPY AND NANOSCALE PHENOMENA IN POLAR MATERIALS
  • Isaku Kanno
  • ,
  • Kenji Akama
  • ,
  • Ryuji Yokokawa
  • ,
  • Hidetoshi Kotera

記述言語
英語
掲載種別
DOI
10.1109/ISAF.2011.6014138
出版者・発行元
IEEE

Piezoelectric shear strain was measured for c-axis oriented epitaxial Pb(Zr,Ti)O-3 (PZT) thin films. The PZT films, with a composition near the morphotropic phase boundary (MPB), were epitaxially grown on (001) MgO substrates and then microfabricated into a rectangular shape. Lateral electrodes were deposited on both sides of the PZT films to apply an external electric field perpendicular to the polarization. A sinusoidal input voltage of 100 kHz was applied between the lateral electrodes and in-plane shear vibration was measured by a laser Doppler vibrometer. In-plane displacement due to shear mode piezoelectric mode vibration was clearly observed and increased proportionally with the voltage. Finite element method (FEM) analysis was conducted to determine the horizontal electric field in the PZT film, and the piezoelectric coefficient d(15) was calculated to be 440x10(-12)m/V.

リンク情報
DOI
https://doi.org/10.1109/ISAF.2011.6014138
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000295404500069&DestApp=WOS_CPL
ID情報
  • DOI : 10.1109/ISAF.2011.6014138
  • ISSN : 1099-4734
  • Web of Science ID : WOS:000295404500069

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