In this study, we have developed Ti-based piezoelectric MEMS scanner mirrors driven by PZT thin films. The 2 m-thick PZT thin films were directly deposited on 50μm-thick Ti substrates by rf-magnetron sputtering. The Ti substrates were preliminary microfabricated into the shape of the scanner mirror by wet-etching, therefore we could fabricate piezoelectric micro-actuators without conventional photolithographic process. We fabricated horizontal MEMS scanner mirrors for laser scanner displays and achieved a large mechanical tilt angle of 10.0° at high resonant frequency of 23.7 kHz by low driving voltage of 10 Vpp. The experimental results were consistent with the results of FEM simulation. © 2011 IEEE.