論文

査読有り
2012年6月

Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O-3 thin film on titanium substrate

MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS
  • Shuhei Matsushita
  • ,
  • Isaku Kanno
  • ,
  • Kazuhiko Adachi
  • ,
  • Ryuji Yokokawa
  • ,
  • Hidetoshi Kotera

18
6
開始ページ
765
終了ページ
771
記述言語
英語
掲載種別
研究論文(学術雑誌)
DOI
10.1007/s00542-012-1462-8
出版者・発行元
SPRINGER

We have developed a titanium (Ti)-based piezoelectric microelectromechanical systems scanner driven by a Pb(Zr, Ti)O-3 (PZT) thin film for the development of laser scanning displays. The 2-mu m-thick PZT thin film was directly deposited on a 50-mu m-thick Ti substrate by radio frequency magnetron sputtering. Prior to PZT deposition, the Ti substrate was microfabricated into the shape of a horizontal scanner by wet etching; therefore, we could fabricate a piezoelectric microactuator without using the photolithography process. We confirmed the growth of the polycrystalline PZT film with perovskite structures on the Ti substrate. We achieved an optical scanning angle of 22A degrees at a resonant frequency of 25.4 kHz using a driving voltage of 20 V (pp). These horizontal scanning properties can be applicable for laser displays.

リンク情報
DOI
https://doi.org/10.1007/s00542-012-1462-8
Web of Science
https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=JSTA_CEL&SrcApp=J_Gate_JST&DestLinkType=FullRecord&KeyUT=WOS:000304307700011&DestApp=WOS_CPL
ID情報
  • DOI : 10.1007/s00542-012-1462-8
  • ISSN : 0946-7076
  • Web of Science ID : WOS:000304307700011

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