TAKEHIRO Shinobu

Last updated: May 15, 2007 at 00:00

Name	TAKEHIRO Shinobu
Affiliation	Former Institution /Organization Tohoku University Research Institute of Electrical Communication Laboratory for Nanoelectronics and Spintronics Atomically Controlled Processing
Job title	Research Associate

Research Areas

Electrical and electronic engineering / Electronic materials/Electric materials /
Electrical and electronic engineering / Electron device/Electronic equipment /

Applied Surface Science 224(1/4) 254-259 2004

Sidewall Protection by Nitrogen in Anisotropic Etching of P-doped Poly-Si_1-xGe_x

SiGe: Materials, Processing, and Device ,pp.243-250 2004

Applied Surface Science Vol.224 77-81 2004

Sidewall protection by nitrogen and oxygen in poly-Si_1−xGe_x anisotropic etching using Cl₂/N₂/O₂ plasma

Materials Science in Semiconductor Processing (38720) 239-243 2005

The Other Research Programs