TAKEHIRO Shinobu

J-GLOBAL         Last updated: May 15, 2007 at 00:00
 
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Name
TAKEHIRO Shinobu
Affiliation
Former Institution /Organization Tohoku University Research Institute of Electrical Communication Laboratory for Nanoelectronics and Spintronics Atomically Controlled Processing
Job title
Research Associate

Research Areas

 
 

Misc

 
Sidewall Protection by Nitrogen in Anisotropic Etching of P-doped Poly-Si1-xGex
SiGe: Materials, Processing, and Device   ,pp.243-250    2004
Sidewall protection by nitrogen and oxygen in poly-Si1−xGex anisotropic etching using Cl2/N2/O2 plasma
Materials Science in Semiconductor Processing   (38720) 239-243   2005

Research Grants & Projects

 
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The Other Research Programs