Shosaku Matsumura - My portal - researchmap

Profile Information

Affiliation: Former Institution / Organization Musashi Institute of Technology, Faculty of Engineering, Department of Electrical and Electronic Engineering

Degree: Doctor of Engineering(Shizuoka University)

J-GLOBAL ID: 200901035718989830
researchmap Member ID: 5000042440

Research Interests

4

Research Areas

2

Manufacturing technology (mechanical, electrical/electronic, chemical engineering) / Measurement engineering /
Nanotechnology/Materials / Thin-film surfaces and interfaces /

Research History

5

1993

- 同大学教授
1993

- Professor, Musashi-Institute of Technology
1968 - 1976

武蔵工大助手
1968 - 1976

Research Associate, Musashi-Institute of
Technology

Education

3

- 1968

Shizuoka University
- 1968

Graduate School, Division of Engineering, Shizuoka University
- 1966

Faculty of Engineering, Shizuoka University

Committee Memberships

1

1994 - 1996

世話人, 応用物理学会

Misc.

20

Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

K Teii, M Mizumura, S Matsumura, S Teii

JOURNAL OF APPLIED PHYSICS, 93(10) 5888-5892, May, 2003
Time- and space-resolved electric potentials in a parallel-plate radio-frequency plasma

K Teii, M Mizumura, S Matsumura, S Teii

JOURNAL OF APPLIED PHYSICS, 93(10) 5888-5892, May, 2003
Diagnostics of an inductively coupled CF₄/Ar Plasma

J. Vac. Sci technol A., 18, 864-872, 2000
Diagnostics of an inductively coupled CF₄/Ar Plasma

J. Vac. Sci technol A., 18, 864-872, 2000
Negative Ion Density Determination Using Probe to Detect Photo-Detached Electron by Continuous Wave Laser

Jpn.J.Appl.Phys., 33,4656-4658, 1997
Negative Ion Density Determination Using Probe to Detect Photo-Detached Electron by Continuous Wave Laser

Jpn.J.Appl.Phys., 33,4656-4658, 1997
Modeling of Noble gas –SiH4 Gas Mixture Glow Discharge Positive Column Plasmas

Jpn.J.Appl.Phys, 33,4285-4291, 1994
Measurement of Negative Ions Using Improved Probe for Detection of Photo Detached Electrons

Jpn.J.Appl.Phys., 33,4312-4315, 1994
Time-Resolved Measurements of RF Plasmas Using Electrostatic Probe Having Compensation Circuit for Space Potential Fluctuation

Jpn.J.Phys., 33,4344-434, 1994
Experimental Studies on Electrostatic Probe Response for Large and Rapid Voltage Swing

Jpn.J.Appl.Phys, 33,4353-4356, 1994
Modeling of Noble gas –SiH4 Gas Mixture Glow Discharge Positive Column Plasmas

Jpn. J. Appl. Phys., 33,4285-4291, 1994
Measurement of Negative Ions Using Improved Probe for Detection of Photo Detached Electrons

Jpn.J.Appl.Phys., 33,4312-4315, 1994
Time-Resolved Measurements of RF Plasmas Using Electrostatic Probe Having Compensation Circuit for Space Potential Fluctuation

Jpn.J.Phys., 33,4344-4347, 1994
Experimental Studies on Electrostatic Probe Response for Large and Rapid Voltage Swing

Jpn.J.Appl.Phys., 33,4353-4356, 1994
Probe System with Bias Compensation Using a Laser Heated Emissive Prove for RF Discharge

J.Phys.D, 25,2632-2637, 1992
The Effect of Molecular Ions on the Plasma Parameters in a Medium Pressure Rear Gas Radio Frequency Discharge Positive Column

J.Appl. Phys., 72,1744-1748, 1992
Digitalized Triple-prove System for the Direct Display of Electron Temperature in a Time-varying Plasma

Sci.Instrum., 65,1783-1787, 1992
Probe System with Bias Compensation Using a Laser Heated Emissive Prove for RF Discharge

J.Phys.D, 25,2632-2637, 1992
The Effect of Molecular Ions on the Plasma Parameters in a Medium Pressure Rear Gas Radio Frequency Discharge Positive Column

J.Appl.Phys., 72,1744-1748, 1992
Digitalized Triple-prove System for the Direct Display of Electron Temperature in a Time-varying Plasma

Sci. Instrum., 65,1783-1787, 1992

Professional Memberships

2

Research Projects

4

プラズマ中の負イオン計測

1995 - 2002
Measurement Negative Ion in Plasma

1995 - 2002
プロセスプラズマの計測

1990 - 2000
diagnostics of Plasma Processing

1990 - 2000