MISC

2007年9月10日

Q値制御法による位相変調方式原子間力顕微鏡の感度向上

表面科学 = Journal of The Surface Science Society of Japan
  • 小林 成貴
  • ,
  • 李 艶君
  • ,
  • 内藤 賀公
  • ,
  • 影島 賢巳
  • ,
  • 菅原 康弘

28
9
開始ページ
532
終了ページ
535
記述言語
日本語
掲載種別
DOI
10.1380/jsssj.28.532
出版者・発行元
公益社団法人 日本表面科学会

Recently we have found that phase modulation atomic force microscopy (PM-AFM) has higher force sensitivity than amplitude modulation AFM (AM-AFM). The Q-control technique which is often utilized in AM-AFM allows to increase the effective Q-factor of the cantilever. In this study, we utilize the technique to PM-AFM and investigate the force sensitivity with and without the technique theoretically as well as experimentally. We show that the force sensitivity in PM-AFM is highly improved by the Q-control technique.

リンク情報
DOI
https://doi.org/10.1380/jsssj.28.532
CiNii Articles
http://ci.nii.ac.jp/naid/10019752603
CiNii Books
http://ci.nii.ac.jp/ncid/AN00334149
ID情報
  • DOI : 10.1380/jsssj.28.532
  • ISSN : 0388-5321
  • CiNii Articles ID : 10019752603
  • CiNii Books ID : AN00334149
  • identifiers.cinii_nr_id : 9000001997006

エクスポート
BibTeX RIS